Cylindrical fiber probe devices

• US 5,703,979 A
• Filed: 10/26/1995
• Issued: 12/30/1997
• Est. Priority Date: 07/15/1993
• Status: Expired due to Fees

• Current Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Marchman, Herschel Maclyn, Filas, Robert William
• Primary Examiner(s): Palmer, Phan T. H.
• Application Number:
  US08/548,924
• Time in Patent Office: 796 Days
• Field of Search: 385/12, 385/43, 385/117, 385/123, 385/142, 385/902, 65/429, 359/368, 250/216, 250/227.13, 428/392, 428/397, 428/399, 216/11
• US Class Current: 385/43
• CPC Class Codes: C03C 25/68 by etching
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G02B 6/241 Light guide terminations
• CPC Class Codes: G02B 6/245 Removing protective coverings of light guides before coupling
• CPC Class Codes: G02B 6/3624 Fibre head, e.g. fibre probe termination optical details of light guide terminations G02B6/241; reshaping of light guides G02B6/2552; optical details of coupling light into or out of fibre end G02B6/262
• CPC Class Codes: H01J 9/025 of field emission cathodes
• CPC Class Codes: Y10S 977/849 with scanning probe
• CPC Class Codes: Y10S 977/878 Shape/taper

Abstract

This invention involves a fiber probe device and a method of making it. The probe includes a relatively thick upper cylindrical region, typically in the form of a solid right circular cylinder, terminating in a tapered region that terminates in a relatively thin lower cylindrical region (tip), typically also in the form of a solid right circular cylinder, the lower region having a width (diameter) in the approximate range 0.01 μm to 150 μm.

Claims

1. A probe device comprising:

a fiber segment having a relatively thick upper cylindrical region terminating in a tapered region that terminates in a relatively thin right cylindrical lower region;

the lower cylindrical portion having a maximum width in the approximate range of 0.01 μ

m to 150 μ

m and terminating at its bottom extremity in an essentially planar end surface oriented perpendicular to the axis of the thin right cylindrical region.

2. The probe device of claim 1 in which the thin cylindrical region has a height in the approximate range of 0.05 μ

m to 30 μ

m.

3. The probe device of claim 1 in which the thin cylindrical region has a height in the approximate range of 1 μ

m to 10 μ

m.

4. The probe device of claim 1 in which the maximum width of the thin cylindrical region is in the approximate range of 0.05 μ

m to 0.2 μ

m.

5. The probe device of claim 1 in which the maximum width of the thin cylindrical region is in the approximate range of 0.05 μ

m to 0.5 μ

m.

6. The probe device recited in claim 1 further including a metallic layer located on the sidewall of the lower cylindrical region.

7. A metrological method including moving the probe device recited in claims 1, 2, 3, 4, 5, or 6 across a surface of a sample body.

8. A probe device comprising:

a fiber segment having a relatively thick upper cylindrical region terminating in a tapered region that terminates in a relatively thin right cylindrical lower region;

the thin right cylindrical lower region having a maximum width in the approximate range of 0.01 μ

m to 150 μ

m and terminating at its bottom extremity in an essentially planar end surface oriented perpendicular to the axis of the thin right cylindrical lower region,

the fiber segment having at most one other right cylindrical region, said at most one other right cylindrical region being located above the thick upper cylindrical region,

said at most one other right cylindrical region, said thin right cylindrical lower region, and said relatively thick upper cylindrical region having respective maximum widths that are mutually different from each other.

9. The probe device of claim 8 in which the thin cylindrical region has a height in the approximate rnge of 0.05 μ

m to 30 μ

m.

10. The probe device of claim 8 in which the thin cylindrical region has a height in the approximate rnge of 1 μ

m to 10 μ

m.

11. The probe device of claim 8 in which the maximum width of the thin cylindrical regionis in the approximate rnge of 0.05 μ

m to 0.2 μ

m.

12. The probe device of claim 9 in which the maximum width of the thin cylindrical regionis in the approximate rnge of 0.05 μ

m to 0.2 μ

m.

13. The probe device of claim 8 further including a metallic layer located on the sidewall of the lower cylindrical region.

14. A metrological method including moving the probe device recited in claims 8, 9, 10, 11, 12, or 13 across a surface of a sample body.