Polishing apparatus including cloth cartridge connected to turntable

• US 5,704,827 A
• Filed: 10/18/1995
• Issued: 01/06/1998
• Est. Priority Date: 10/19/1994
• Status: Expired due to Fees

• Current Assignee: Ebara Corporation, Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Ebara Corporation, Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Nishimura, Takanobu, Takahashi, Tamami, Tsujimura, Manabu, Aoki, Riichiro, Nishi, Toyomi, Imoto, Yukio, Yajima, Hiromi, Kodama, Shoichi, Kouno, Gisuke, Himukai, Kazuaki
• Primary Examiner(s): Morgan, Eileen P.
• Application Number:
  US08/544,534
• Time in Patent Office: 811 Days
• Field of Search: 451/41, 451/285, 451/287, 451/288, 451/289, 451/451, 15/102, 15/97.1
• US Class Current: 451/285
• CPC Class Codes: B24B 37/12 Lapping plates for working plane surfaces

Abstract

A polishing apparatus includes a detachable light weight cloth cartridge which shows little deformation under uneven loading during a polishing operation. Either mechanical or non-mechanical fixation of the cloth cartridge to a turntable is achieved. Mechanical fixation involves attaching the cloth cartridge to the turntable at peripheral and center sections of the cloth cartridge. Non-mechanical fixation involves attaching the cloth cartridge to the turntable by a vacuum arrangement. The assembly of the cloth cartridge and the turntable not only produces excellent flatness on polished semiconductor wafers by maintaining a level polishing surface, but also improves the production yield by preventing breakage of wafers during the polishing process.

Claims

1. A polishing apparatus for polishing a surface of an object to a flat and mirror finish, said apparatus comprising:

a rotatable turntable;

a cloth cartridge including a base member and a polishing cloth bonded to said base member;

said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable;

supply means for delivering a polishing solution to a polishing surface of said polishing cloth; and

pressing means for pressing an object to be polished onto said polishing surface of said polishing cloth.

2. An apparatus as claimed in claim 1, wherein said peripheral section and said central section of said cloth cartridge comprise peripheral and central portions, respectively, of said base member.

3. An apparatus as claimed in claim 2, further comprising bolts detachably connecting said peripheral and central portions to said peripheral and central sections, respectively, of said turntable.

4. An apparatus as claimed in claim 1, wherein said cloth cartridge is disc-shaped and has a ratio t/d of thickness t to diameter d in a range of from 0.005 to 0.05.

5. An apparatus as claimed in claim 1, wherein said cloth cartridge and said turntable have interfitting structure operable to prevent slipping of said cloth cartridge relative to said turntable during rotation thereof.

6. An apparatus as claimed in claim 5, wherein said interfitting structure comprises a groove formed in one of said base member and said turntable and a protrusion extending from the other of said base member and said turntable, said protrusion fitting into said groove.

7. An apparatus as claimed in claim 6, wherein said groove and said protrusion extend peripherally of said base member and said turntable.

8. An apparatus as claimed in claim 1, further comprising a cover member positionable on said base member to entirely cover said polishing cloth when not in use for polishing operation.

9. An apparatus as claimed in claim 1, wherein said cloth cartridge has a handle to facilitate detachment and transportation thereof.

10. An apparatus as claimed in claim 1, wherein said base member is made of a material selected from the group consisting of steel alloys, aluminum alloys and plastic materials.

11. An assembly to be used as part of a polishing apparatus for polishing a surface of an object to a flat and mirror finish, said assembly comprising:

a rotatable turntable;

a cloth cartridge including a base member and a polishing cloth bonded to said base member; and

said cloth cartridge having a peripheral section and a central section detachably connected directly at a peripheral section and at a central section, respectively, of said turntable, such that said cloth cartridge is rotatable with said turntable.

12. An assembly as claimed in claim 11, wherein said peripheral section and said central section of said cloth cartridge comprise peripheral and central portions, respectively, of said base member.

13. An assembly as claimed in claim 12, further comprising bolts detachably connecting said peripheral and central portions to said peripheral and central sections, respectively, of said turntable.

14. An assembly as claimed in claim 11, wherein said cloth cartridge is disc-shaped and has a ratio t/d of thickness t to diameter d in a range of from 0.005 to 0.05.

15. An assembly as claimed in claim 11, wherein said cloth cartridge and said turntable have interfitting structure operable to prevent slipping of said cloth cartridge relative to said turntable during rotation thereof.

16. An assembly as claimed in claim 15, wherein said interfitting structure comprises a groove formed in one of said base member and said turntable and a protrusion extending from the other of said base member and said turntable, said protrusion fitting into said groove.

17. An assembly as claimed in claim 16, wherein said groove and said protrusion extend peripherally of said base member and said turntable.

18. An assembly as claimed in claim 11, further comprising a cover member positionable on said base member to entirely cover said polishing cloth when not in use for polishing operation.

19. An assembly as claimed in claim 11, wherein said cloth cartridge has a handle to facilitate detachment and transportation thereof.

20. An assembly as claimed in claim 11, wherein said base member is made of a material selected from the group consisting of steel alloys, aluminum alloys and plastic materials.