Micromachined peristaltic pump
First Claim
1. A miniature pump structure comprising:
- a substrate having a channel therein;
a series of conductive strips separated by insulative barriers formed in said channel, said strips and barriers lying transverse to said channel;
a flexible conductive membrane located over said channel; and
an insulative layer positioned over said conductive strips and between said strips and said membrane.
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Accused Products
Abstract
A micromachined pump including a channel formed in a semiconductor substrate by conventional processes such as chemical etching. A number of insulating barriers are established in the substrate parallel to one another and transverse to the channel. The barriers separate a series of electrically conductive strips. An overlying flexible conductive membrane is applied over the channel and conductive strips with an insulating layer separating the conductive strips from the conductive membrane. Application of a sequential voltage to the series of strips pulls the membrane into the channel portion of each successive strip to achieve a pumping action. A particularly desirable arrangement employs a micromachined push-pull dual channel cavity employing two substrates with a single membrane sandwiched between them.
483 Citations
26 Claims
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1. A miniature pump structure comprising:
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a substrate having a channel therein; a series of conductive strips separated by insulative barriers formed in said channel, said strips and barriers lying transverse to said channel; a flexible conductive membrane located over said channel; and an insulative layer positioned over said conductive strips and between said strips and said membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. The microminiature pump structure comprising:
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a substrate having a channel formed therein; a flexible conductive membrane affixed on said substrate over said channel; and means for attracting said membrane into said channel so as to contact a region of said channel and for causing the region of contact between said channel and said membrane to move down said channel so as to create a pumping action. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A miniature pump comprising:
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first and second substrates, having respective first and second channels formed therein and positioned to lie opposite one another when said first and second substrates are positioned adjacent one another; a first array of conductive actuator elements located on said first substrate, each element traversing said first channel; a second array of conductive actuator elements located on said second substrate, each element traversing said second channel; respective first and second insulation layers formed over said first and second arrays of actuator elements; a flexible electrically conductive membrane; and means for connecting said substrates together such that the first and second channels lie opposite one another with said membrane sandwiched between said first and second insulation layers. - View Dependent Claims (25, 26)
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Specification