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Method for the non-contact rapid and accurate acquisition of the surface topology of objects

  • US 5,706,085 A
  • Filed: 08/09/1995
  • Issued: 01/06/1998
  • Est. Priority Date: 08/03/1995
  • Status: Expired due to Fees
First Claim
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1. A method of profiling a surface of an object, which comprises the steps of:

  • a) placing an object in vicinity of an interferometer having interferometer arms and a translation stage, and transmitting a low coherent light signal from a light source with a mean wavelength λ

    to the object;

    b) varying an optical path in one of the interferometer arms with the translation stage;

    c) receiving a resulting intensity-modulated interferometer signal with a photodetector having low pass characteristics and outputting photodetector output signals;

    d) evaluating the photodetector output signals with an image processing system; and

    e) extracting a depth of modulation of the interferometer signal by intensity-modulating the low coherent light source.

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