Discharge excitation type pulse laser apparatus

• US 5,708,676 A
• Filed: 10/17/1995
• Issued: 01/13/1998
• Est. Priority Date: 11/04/1994
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Minamitani, Yasushi, Nakatani, Hajime
• Primary Examiner(s): Bovernick, Rodney B.
• Assistant Examiner(s): Wise, Robert E.
• Application Number:
  US08/543,987
• Time in Patent Office: 819 Days
• Field of Search: 372/38, 372/86
• US Class Current: 372/86
• CPC Class Codes: H01S 3/0384 Auxiliary electrodes, e.g. for pre-ionisation or triggering, or particular adaptations therefor
• CPC Class Codes: H01S 3/09713 with auxiliary ionisation, e.g. double discharge excitation
• CPC Class Codes: H01S 3/225 comprising an excimer or exciplex

Abstract

A discharge excitation type pulse laser apparatus includes main discharge electrodes and and an auxiliary discharge electrode. In order to make a voltage pulse applied to the auxiliary discharge electrode rise up steeply without incurring any appreciable time lag, a reactor connected in series to a first charging capacitor is constituted by a first saturable reactor 19 with a second saturable reactor being additionally inserted in series to a second charging capacitor. After stray inductance and resistance components of a switch become minimum, inductance of the saturable reactor is first decreased, which is then followed by decreasing of inductance of the first saturable reactor. Degree of steepness of the voltage rise-up for corona and main discharges can set at high values, respectively, whereby preionization is accelerated to allow the main discharge to occur uniformly. The energy injected into the main discharge is increased. Laser output power and oscillation efficiency are enhanced.

Claims

1. A discharge excitation type pulse laser apparatus, comprising:

a pair of first and second main discharge electrodes disposed in opposition to each other for generating a main discharge therebetween;

an auxiliary discharge electrode disposed in the vicinity of said second main discharge electrode for generating a corona discharge between said second main discharge electrode and said auxiliary discharge electrode;

a first pulse generating circuit connected to said first and second main discharge electrodes for applying a pulse-like voltage for generating the main discharge between said first and second main discharge electrodes;

a second pulse generating circuit connected to said second main discharge electrode and said auxiliary discharge electrode for applying a pulse-like voltage for generating the corona discharge between said second main discharge electrode and said auxiliary discharge electrode;

switching means for controlling application and interruption of the voltage applied to said first and second main discharge electrodes from said first pulse generating circuit and the voltage applied to said second main discharge electrode and said auxiliary discharge electrode from said second pulse generating circuit;

a first saturable reactor connected between said switching means and said first pulse generating circuit; and

a second saturable reactor connected between said switching means and said second pulse generating circuit.

2. A discharge excitation type pulse laser apparatus according to claim 1,

said first pulse generating circuit including a first charging capacitor for the main discharge which is connected in series to and between said first main discharge electrode and said first saturable reactor, and a parallel connection of a first charging circuit element and a peaking capacitor connected between said first main discharge electrode and said second main discharge electrode;

said second pulse generating circuit including a second charging capacitor connected between said auxiliary discharge electrode and said second saturable reactor;

said apparatus further comprising a second charging circuit element connected between said second main discharge electrode and said auxiliary discharge electrode;

wherein said first and second charging capacitors are first charged in an opened state of said switching means, which is then followed by closing of said switching means for decreasing inductance of said second saturable reactor to thereby allow a voltage applied across said auxiliary discharge electrode and said second main discharge electrode to rise up for causing a corona discharge to take place between said auxiliary discharge electrode and said second main discharge electrode for thereby bringing about preionization in a space existing between said first main discharge electrode and said second main discharge electrode, and thereafter said switching means is closed fully to allow the inductance of said first saturable reactor to decrease so that a main discharge can take place between said first main discharge electrode and said second main discharge electrode.

3. A discharge excitation type pulse laser apparatus according to claim 2,

wherein said second pulse generating circuit further including a delay circuit connected in series between said second charging capacitor and said auxiliary discharge electrode for causing a timing at which a pulse-like voltage applied across said auxiliary discharge electrode and said second main discharge electrode rises up to coincide substantially with a timing at which a pulse-like voltage applied across said first and second main discharge electrodes rises up.

4. A discharge excitation type pulse laser apparatus according to claim 1,

wherein said second pulse generating circuit includes:

a second charging capacitor inserted in series between said second saturable reactor and said auxiliary discharge electrode;

a third saturable reactor connected between said auxiliary discharge electrode and a series connection of said second saturable reactor and said second charging capacitor;

a third charging circuit element inserted between said auxiliary discharge electrode and said second main discharge electrode; and

a parallel connection of a first charge transfer capacitor and a second charging circuit element, said first charge transfer capacitor having one end connected to a junction between said series connection of said second saturable reactor and said second charging capacitor and said third saturable reactor, the other end of said first charge transfer capacitor being connected to said second main discharge electrode.

5. A discharge excitation type pulse laser apparatus according to claim 4,

wherein said second pulse generating circuit further including a delay circuit connected in series between said third saturable reactor and said auxiliary discharge electrode for causing a timing at which a pulse-like voltage applied across said auxiliary discharge electrode and said second main discharge electrode rises up to coincide substantially with a timing at which a pulse-like voltage applied across said first and second main discharge electrodes rises up.

6. A discharge excitation type pulse laser apparatus according to claim 4,

wherein a plurality of saturable reactors are connected in series between said third saturable reactor and said auxiliary discharge electrode;

wherein a same number of charge transfer capacitors as said plurality of saturable reactors are connected between said second main discharge electrode and a junction of said third saturable reactor and one of said plurality of saturable reactors and junctions of said plurality of saturable reactors, respectively.

7. A discharge excitation type pulse laser apparatus according to claim 1,

wherein said auxiliary discharge electrode is implemented in a rod-like configuration coated with an insulation material and disposed at least at one side of said second main discharge electrode in the vicinity thereof and in opposition thereto.

8. A discharge excitation type pulse laser apparatus, comprising:

a pair of first and second main discharge electrodes disposed in opposition to each other for generating a main discharge therebetween;

an auxiliary discharge electrode disposed in the vicinity of said second main discharge electrode for generating a corona discharge between said second main discharge electrode and said auxiliary discharge electrode;

a first pulse generating circuit connected to said first and second main discharge electrodes for applying a pulse-like voltage for generating the main discharge between said first and second main discharge electrodes;

a second pulse generating circuit connected to said second main discharge electrode and said auxiliary discharge electrode for applying a pulse-like voltage for generating the corona discharge between said second main discharge electrode and said auxiliary discharge electrode;

switching means for controlling application and interruption of the voltage applied to said first and second main discharge electrodes from said first pulse generating circuit and the voltage applied to said second main discharge electrode and said auxiliary discharge electrode from said second pulse generating circuit; and

a saturable transformer inserted between said switching means and said first and second pulse generating circuits and having a primary winding connected between said switching means and said first pulse generating circuit and a secondary winding connected to said second pulse generating circuit.

9. A discharge excitation type pulse laser apparatus according to claim 8,

said first pulse generating circuit including a first charging capacitor connected in series between said first main discharge electrode and a primary winding of said saturable transformer and a parallel connection of a first charging circuit element and a peaking capacitor connected between said first main discharge electrode and said second main discharge electrode;

said second pulse generating circuit including a connecting conductor inserted between said auxiliary discharge electrode and said saturable transformer;

wherein after charging said first charging capacitor in an opened state of said switching means, said switching means is closed to allow a corona discharge to take place at first between said auxiliary discharge electrode and said second main discharge electrode for thereby bringing about preionization in a space existing between said first and second main discharge electrodes, and thereafter said switching means is closed fully to allow the inductance of said saturable transformer to decrease so that a main discharge can take place between said first and second main discharge electrodes.

10. A discharge excitation type pulse laser apparatus according to claim 8,

said first pulse generating circuit including a first charging capacitor connected in series between said first main discharge electrode and a primary winding of said saturable transformer, and a first charging circuit element connected between said first and second main discharge electrodes;

said second pulse generating circuit including a delay circuit connected in series between said auxiliary discharge electrode and a secondary winding of said saturable transformer for causing a timing at which a pulse-like voltage applied across said auxiliary discharge electrode and said second main discharge electrode rises up to coincide substantially with a timing at which a pulse-like voltage applied across said first and second main discharge electrodes rises up.

11. A discharge excitation type pulse laser apparatus, comprising:

a pair of first and second main discharge electrodes disposed in opposition to each other for generating a main discharge therebetween;

an auxiliary discharge electrode disposed in the vicinity of said second main discharge electrode for generating a corona discharge between said second main discharge electrode and said auxiliary discharge electrode;

a first pulse generating circuit connected to said first and second main discharge electrodes for applying a pulse-like voltage for the main discharge between said first and second main discharge electrodes;

a second pulse generating circuit connected to said second main discharge electrode and said auxiliary discharge electrode for applying a pulse-like voltage for generating the corona discharge between said second main discharge electrode and said auxiliary discharge electrode;

switching pulse generating means for controlling application and interruption of a voltage applied to said first and second main discharge electrodes from said first pulse generating circuit and a voltage applied to said second main discharge electrode and said auxiliary discharge electrode from said second pulse generating circuit;

a saturable transformer connected between said pulse generating means and said first and second pulse generating circuits; and

a first charging capacitor connected across both ends of said switching pulse generating means.

12. A discharge excitation type pulse laser apparatus according to claim 11,

said first pulse generating circuit including a peaking capacitor having one end connected to a junction between the primary winding of said saturable transformer and said first main discharge electrode, the other end of said peaking capacitor being connected to a junction between said switching pulse generating means and said second main discharge electrode;

said second pulse generating circuit including a second charging capacitor connected between both ends of a secondary winding of said saturable transformer and a saturable reactor connected between said secondary winding of said saturable transformer and said auxiliary discharge electrode;

said apparatus further comprising a charging circuit element connected between said second main discharge electrode and said auxiliary discharge electrode;

wherein after charging said second charging capacitor by way of said first charging capacitor and said saturable transformer in response to a switching pulse-like voltage supplied from said switching pulse generating means, inductance of said saturable transformer and inductance of said saturable reactor are decreased to allow a voltage to rise up between said auxiliary discharge electrode and said second main discharge electrode, while allowing a voltage to rise up between said first main discharge electrode and said second main discharge electrode.