Method of producing and arrangement containing self-amplifying dynamic MOS transistor memory cells
First Claim
1. A method of producing an arrangement containing self-amplifying dynamic MOS transistor memory cells, comprising the steps of;
- providing a silicon substrate with a vertical sequence of doped zones which comprises at least a first doped zone a second doped zone disposed thereon and a third doped zone disposed thereon for a source zone, a channel zone and a drain zone of vertical MOS transistors,etching a first trench and a second trench down into the first zone and which traverse the second zone and the third zone,providing a surface of the first trench with a first gate dielectric and a surface of the second trench with a second gate dielectric,forming a first gate electrode in the first trench and forming a second gate electrode in the second trench,producing a third trench which cuts through the first doped zone, the second doped zone and the third doped zone between the first trench and the second trench,providing the third trench with a first isolation structure at least in a region of the first doped zone and of the second doped zone,electrically interconnecting parts of the third doped zone that are separated by the third trench by an interconnect structure, andproducing a diode structure whose one terminal is connected in an electrically conducting manner to the third doped zone and whose other terminal is connected in an electrically conducting manner to that of the second gate electrode.
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Accused Products
Abstract
To produce an arrangement containing self-amplifying dynamic MOS transistor memory cells which each comprise a selection transistor, a memory transistor and a diode structure, the selection transistor and the memory transistor being connected in series via a common nodal point and the diode structure being connected between the common nodal point and the gate electrode (10) of the memory transistor, the selection transistor and the memory transistor are formed as vertical MOS transistors. For this purpose a vertical sequence of suitably doped zones (2, 3, 4) in which trenches (5, 6) are produced and which are provided with gate dielectric (7, 8) and gate electrode (9, 10) is produced, in particular, by LPCVD epitaxy or by molecular-beam epitaxy.
150 Citations
10 Claims
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1. A method of producing an arrangement containing self-amplifying dynamic MOS transistor memory cells, comprising the steps of;
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providing a silicon substrate with a vertical sequence of doped zones which comprises at least a first doped zone a second doped zone disposed thereon and a third doped zone disposed thereon for a source zone, a channel zone and a drain zone of vertical MOS transistors, etching a first trench and a second trench down into the first zone and which traverse the second zone and the third zone, providing a surface of the first trench with a first gate dielectric and a surface of the second trench with a second gate dielectric, forming a first gate electrode in the first trench and forming a second gate electrode in the second trench, producing a third trench which cuts through the first doped zone, the second doped zone and the third doped zone between the first trench and the second trench, providing the third trench with a first isolation structure at least in a region of the first doped zone and of the second doped zone, electrically interconnecting parts of the third doped zone that are separated by the third trench by an interconnect structure, and producing a diode structure whose one terminal is connected in an electrically conducting manner to the third doped zone and whose other terminal is connected in an electrically conducting manner to that of the second gate electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification