×

Micromechanical memory sensor

  • US 5,712,609 A
  • Filed: 06/10/1994
  • Issued: 01/27/1998
  • Est. Priority Date: 06/10/1994
  • Status: Expired due to Fees
First Claim
Patent Images

1. A micromechanical memory sensor comprising:

  • a first beam supported at a first end thereof by a substrate and having a second end; and

    ,a second beam supported at a first end thereof by a substrate and having a second end having flexibility greater than the first beam, the first and second beam being disposed in a first arrangement so that the second end of the second beam engages a first surface of the first beam at the second end of the first beam,an increase in ambient temperature facilitating a first deflection in the first beam and a second deflection, greater than the first deflection, in the second beam in accordance with the difference in the flexibility of the first and second beams,a decrease in the ambient temperature facilitating movement of the first and second beams to a second arrangement, the second beam engaging a second surface of the first beam in the second arrangement so that the second beam is latched on the first beam, and,the first beam comprising a heating resistor which, when having an electric current supplied thereto, facilitates a third deflection in the first beam, the third deflection being greater than the first deflection, to disengage the second surface from the second beam to cause the electric current to terminate and cause the first and second beams to return to the first arrangement.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×