Neutral density (ND) filter

• US 5,715,103 A
• Filed: 05/22/1996
• Issued: 02/03/1998
• Est. Priority Date: 08/26/1993
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Amano, Sayoko, Abe, Susumu, Sawamura, Mitsuharu
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): CHANG, AUDREY Y
• Application Number:
  US08/651,512
• Time in Patent Office: 622 Days
• Field of Search: 359/885, 359/888, 359/890, 359/891, 359/892, 359/585, 359/586, 359/588, 359/589, 428/426
• US Class Current: 359/888
• CPC Class Codes: G02B 5/205 Neutral density filters

Abstract

A thin-film-type ND filter which attenuates the amount of light transmission is formed on a transparent substrate by using two or more types of metallic oxide having a refractive index n and an attenuation coefficient k which are in the range of 1.0 to 3.0 in the wavelength region of the visible region, making it possible to obtain flat transmittance characteristics.

Claims

1. A neutral density filter, comprising:

a transparent substrate; and

a thin film coated on the surface of said substrate, said thin film containing,

a first unsaturated oxide, wherein a refractive index and an attenuation coefficient of said first unsaturated oxide increase as wavelength increases, and a magnitude relation concerning the difference between the refractive index and the attenuation coefficient of said first unsaturated oxide is maintained as the wavelength increases, so that transmittance of said first unsaturated oxide increases as the wavelength increases, and

a second unsaturated oxide, wherein a refractive index and an attenuation coefficient of said second unsaturated oxide increase as wavelength increases, and a magnitude relation concerning the difference between the refractive index and the attenuation coefficient of said second unsaturated oxide is reversed as the/wavelength increases, so that transmittance of said second unsaturated oxide decreases as the wavelength increases.

2. A neutral density filter according to claim 1, wherein said first and second unsaturated oxides are each a metallic oxide.

3. A neutral density filter according to claim 2, wherein said metallic oxide is a titanium oxide.

4. A neutral density filter according to claim 1, wherein said filter further comprises an outermost layer made of an MgF₂ material.

5. A neutral density filter according to claim 1, wherein the refractive index and the attenuation coefficient of each of said first and second substances over the visible region are in the range of 1.0 to 3.

6. A method of manufacturing an ND filter, comprising the steps of:

forming on a transparent substrate a thin film, said thin film containing, a first unsaturated oxide, wherein a refractive index and an attenuation coefficient of said first unsaturated oxide increase as wavelength increases, and a magnitude relation concerning the difference between the refractive index and the attenuation coefficient of said first unsaturated oxide is maintained as the wavelength increases, so that transmittance of said first unsaturated oxide increases as the wavelength increases, and a second unsaturated oxide, wherein a refractive index and an attenuation coefficient of said second unsaturated oxide increase as the wavelength increases, and a magnitude relation concerning the difference between the refractive index and the attenuation coefficient of said second unsaturated oxide is reversed as the wavelength increases, so that the transmittance of said second unsaturated oxide decreases as the wavelength increases; and

forming a layer of an MgF₂ material in a portion in contact with air in a state in which a temperature of the transparent substrate is maintained at 150°

C. or above.