Method and apparatus for producing integrated circuit devices

• US 5,716,759 A
• Filed: 06/17/1996
• Issued: 02/10/1998
• Est. Priority Date: 09/02/1993
• Status: Expired due to Term

• Current Assignee: Invensas Corporation
• Original Assignee: Shellcase Ltd. (Adeia Inc.)
• Inventors: Badehi, Pierre
• Primary Examiner(s): CHAPMAN, MARK A
• Application Number:
  US08/602,853
• Time in Patent Office: 603 Days
• Field of Search: 430/5, 430/313, 437/80
• US Class Current: 430/313
• CPC Class Codes: G03F 7/24 Curved surfaces G03F7/70 takes precedence
• CPC Class Codes: G03F 7/70058 Mask illumination systems
• CPC Class Codes: G03F 7/70241 Optical aspects of refractive lens systems, i.e. comprising only refractive elements
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/703 Non-planar pattern areas or non-planar masks, e.g. curved masks or substrates
• CPC Class Codes: G03F 7/7035 Proximity or contact printers
• CPC Class Codes: Y10S 438/944 Shadow

Abstract

A method for three dimensional lithography including the steps of providing a substrate (44) having surfaces extending in three dimensions and a light sensitive coating and illuminating the substrate via a mask (40) with light impinging on the surfaces at a non-perpendicular angle with respect thereto.

Claims

1. A method for three dimensional lithography including the steps of:

providing a substrate having surfaces extending in three dimensions and a light sensitive coating; and

illuminating said substrate via a mask with light impinging on said surfaces at a non-perpendicular angle with respect to the mask.

2. A method according to claim 1 and wherein said substrate comprises a plurality of integrated circuit dice having notches formed therebetween.

3. A method according to claim 2 and wherein said notches extend through the substrate and separate the dice.

4. A method according to claim 1 and wherein said substrate comprises an array of mutually spaced integrated circuits.

5. A method according to claim 1 and wherein said illuminating step comprises illuminating said substrate via a plurality of differently patterned masks.

6. A method according to claim 5 and wherein said illuminating step comprises illuminating said substrate sequentially via said plurality of differently patterned masks.

7. A method according to claim 6 and wherein each of said differently patterned masks is employed for simultaneous illumination of a plurality of integrated circuit dice.

8. A method according to claim 7 and wherein each of said differently patterned masks is employed for simultaneous illumination of plural surfaces on each of said plurality of integrated circuit dice.

9. A method according to claim 1 and wherein said illuminating step comprises illuminating said substrate via a patterned mask in a plurality of different orientations relative to said substrate.

10. A method according to claim 9 and wherein said illuminating step comprises illuminating said substrate via a patterned mask sequentially in a plurality of different orientations relative to said substrate.

11. A method according to claim 10 and wherein each of said differently patterned masks is employed for simultaneous illumination of a plurality of integrated circuit dice.

12. A method according to claim 11 and wherein said patterned mask is employed for simultaneous illumination of plural surfaces on each of said plurality of integrated circuit dice.

13. A method according to claim 1 and wherein said mask is located in proximity exposure relationship with the substrate.

14. A method according to claim 1 and wherein said mask is spaced from the substrate and optical elements are located between the mask and the substrate.

15. A method according to claim 1 and wherein said step of illuminating comprises employing a square pyramidal prism reflecting light from a illuminator onto a plurality of mutually spaced mirrors, which in turn reflect light onto edges of the substrate.

26. A method according to any of claims 1-12, 13 and 15 and wherein said step of illuminating comprises employing a plurality of projection lenses to receive light and direct it onto a plurality of folding mirrors which direct it onto edges of said substrate.

16. A method for three dimensional lithography including the steps of:

providing a substrate having surfaces extending in three dimensions and a light sensitive coating; and

illuminating said substrate via a mask non-perpendicularly there-through with light impinging on at least two non-mutually parallel surfaces of said substrate.

17. A method for photolithographic forming of metal areas on an integrated circuit device including the steps of:

providing an integrated circuit device substrate having surfaces extending in three dimensions and a light sensitive coating; and

illuminating said substrate via a mask with light impinging on said surfaces at a non-perpendicular angle with respect to the mask.

18. A method for photolithographic forming of metal areas on an integrated circuit device including the steps of:

providing an integrated circuit device substrate having surfaces extending in three dimensions and a light sensitive coating; and

illuminating said integrated circuit device via a mask with light impinging on said surfaces at a non-perpendicular angle with respect to the mask.

19. Apparatus for three dimensional lithography including:

an illuminator for illuminating a substrate having surfaces extending in three dimensions and a light sensitive coating via a mask with light impinging on said surfaces at a non-perpendicular angle with respect to the mask.

20. Apparatus according to claim 19 and wherein said mask is spaced from the substrate and optical elements are located between the mask and the substrate.

21. Apparatus according to claim 19 and also comprising a camera for viewing the substrate prior to and during illumination thereof.

22. Apparatus according to claim 19 and wherein said illuminator comprises a square pyramidal prism reflecting light from a light generator onto a plurality of mutually spaced mirrors, which in turn reflect light onto edges of the substrate.

23. Apparatus according to claim 19 and wherein said mask comprises a plurality of reticles and said illuminator comprises a plurality of projection lenses receiving light from said plurality of reticles and a plurality of folding mirrors receiving light from said plurality of projection lens and directing it onto edges of said substrate.

25. Apparatus according to either of claims 19 and 24 and wherein said mask is located in proximity exposure relationship with the substrate.

24. Apparatus for photolithographic forming of metal areas on an integrated circuit device including:

an illuminator for illuminating an integrated circuit device substrate having surfaces extending in three dimensions and a light sensitive coating via a mask with light impinging on said surfaces at a non-perpendicular angle with respect to the mask.