Nitride cap formation in a DRAM trench capacitor

• US 5,717,628 A
• Filed: 03/04/1996
• Issued: 02/10/1998
• Est. Priority Date: 03/04/1996
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc., Infineon Technologies AG
• Original Assignee: International Business Machines Corporation, Siemens AG
• Inventors: Ho, Herb Lei, Hammerl, Erwin
• Primary Examiner(s): Nguyen, Viet Q.
• Application Number:
  US08/606,469
• Time in Patent Office: 708 Days
• Field of Search: 365/149, 257/302, 257/306, 437/43, 437/60, 437/52
• US Class Current: 365/149
• CPC Class Codes: H10B 12/038 the capacitor being in a trench in the substrate

Abstract

A method for forming an oxygen-impervious barrier on the oxide collar of a trench capacitor in a DRAM cell. The process consists of etching a shallow trench into the oxide collar which surrounds the polysilicon trench fill and isolating it from the single crystal semiconducting substrate material of the DRAM cell to a depth which is at least equal to or larger than the width of the oxide collar. A nitride layer with a thickness equal to or thicker than half of the width of the oxide collar is then deposited on the top surface of the freshly excavated oxide collar such that the aforementioned trench is completely filled with this nitride layer, and the entire surfaces of the substrate and polysilicon trench fill are completely covered. The newly formed nitride layer is then selectively overetched in order to completely remove it from the substrate and polysilicon trench fill surfaces, while still maintaining a sufficient thickness of this layer disposed on the oxide collar sufficient to prevent oxygen diffusion into the oxide collar. Alternatively, the nitride layer may be deposited as a thin layer sandwiched between the original oxide collar and an additional thermally deposited oxide layer.

Claims

1. A DRAM cell of a type including a semiconductor substrate of a first conductivity and a trench formed in said substrate, said trench being filled with a semiconducting material of a second conductivity, a plurality of functional elements formed on and in said semiconductor substrate, and an isolating collar for isolating said functional elements, said isolating collar disposed within said trench and encircling said semiconducting material of said second conductivity;

the improvement therewith comprising;

oxygen barrier means disposed within said trench and on said isolating collar for preventing the diffusion of oxygen from the surface of said substrate into said isolating collar.

2. The DRAM cell according to claim 1, wherein said isolating collar is an oxide collar.

3. The DRAM cell according to claim 2, wherein said oxygen barrier means disposed on said oxide collar comprises a layer of silicon nitride.

4. The DRAM cell according to claim 3, wherein the thickness of said silicon nitride is 10-20 nm.

5. The DRAM cell according to claim 1, wherein the deposition of said oxygen barrier means results in a dramatic reduction in vertical parasitic leakage.

6. The DRAM cell according to claim 1, wherein said improvement further comprises:

an oxide layer disposed between said isolating collar and said oxygen barrier means, said oxide layer operating to minimize stress build-up in said semiconductor substrate.