Erosion resistant diamond-like nanocomposite coatings for optical components

• US 5,718,976 A
• Filed: 06/07/1995
• Issued: 02/17/1998
• Est. Priority Date: 05/03/1991
• Status: Expired due to Term

• Current Assignee: Sulzer Metaplas GmbH
• Original Assignee: Advanced Refractory Technologies, Inc.
• Inventors: Dorfman, Veniamin F., Bray, Donald J., Goel, Arvind
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US08/476,660
• Time in Patent Office: 986 Days
• Field of Search: 428/408, 428/698, 428/688, 428/697, 428/699, 428/426, 428/446
• US Class Current: 428/408
• CPC Class Codes: A61F 2310/00574 Coating or prosthesis-covering structure made of carbon, e.g. of pyrocarbon
• CPC Class Codes: A61L 27/30 Inorganic materials
• CPC Class Codes: A61L 27/303 Carbon
• CPC Class Codes: A61L 27/306 Other specific inorganic materials not covered by A61L27/303 - A61L27/32
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C04B 41/5002 Diamond
• CPC Class Codes: C04B 41/85 with inorganic materials
• CPC Class Codes: C23C 14/0036 Reactive sputtering
• CPC Class Codes: C23C 14/06 characterised by the coating material C23C14/0021 , C23C14/04 take precedence
• CPC Class Codes: C23C 14/0605 Carbon
• CPC Class Codes: C23C 14/221 Ion beam deposition C23C14/46, C23C14/48 take precedence
• CPC Class Codes: C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
• CPC Class Codes: C23C 16/4483 using a porous body
• CPC Class Codes: C23C 16/4485 by evaporation without using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/45568 Porous nozzles
• CPC Class Codes: C23C 16/503 using dc or ac discharges
• CPC Class Codes: F42B 12/80 Coatings
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G11B 5/8408 protecting the magnetic layer
• CPC Class Codes: Y02T 50/60 Efficient propulsion technologies, e.g. for aircraft
• CPC Class Codes: Y10T 428/30 : Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

An erosion resistant coating for optically transmissive substrates formed from a diamond-like nanocomposite structure which contains interpenetrating networks of a diamond-like carbon matrix stabilized by hydrogen, a silicone glass-like network stabilized by oxygen, and optionally, at least one network formed from elements and compounds from groups 1-7b and 8 of the periodic table.

Claims

1. An erosion resistant material made from an optically transmissive substrate and an erosion resistant coating, said coating made from a class of diamond-like materials formed from interpenetrating networks, said networks comprising a first diamond-like carbon network stabilized by hydrogen, a second silicon network stabilized by oxygen and, optionally, at least one additional network of dopant elements, or compounds containing elements from groups 1-7b and 8 of the periodic table.

2. The material according to claim 1 wherein the carbon, hydrogen, silicon and oxygen are obtained from the decomposition of an organosiloxane having from about 1 to about 10 silicon atoms.

3. The material according to claim 2 wherein the organosiloxane is polyphenylmethylsiloxane.

4. The material according to claim 1 wherein the carbon content is from about 40 wt. % to about 98 wt. %.

5. The material according to claim 1 wherein the carbon content is from about 50 wt. % to about 98 wt. %.

6. The material according to claim 1 wherein the carbon to silicon weight ratio is from about 2:

1 to about 8;

1.

7. The material according to claim 1 wherein the silicon to oxygen weight ration is from about 0.5:

1 to about 3;

1.

8. The material according to claim 1 wherein the dopant elements are selected from the group consisting of B, Li, Na, Si, Ge, Te, 0, Mo, W, Ta, Nb, Pd, Ir, Pt, V, Fe, Co, Mg, Mn, Ni, Ti, Zr, Cr, Re, Hf, Cu, Al, N, Ag, and Au.

9. The material according to claim 1 wherein the carbon content of the solid state material is greater than about 40 atomic % of the coating, the hydrogen content is up to about 40 atomic % of the carbon, and the sum of the silicon, oxygen and dopants together is greater than about 2 atomic % of the coating.