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Acceleration sensor

  • US 5,719,333 A
  • Filed: 01/20/1995
  • Issued: 02/17/1998
  • Est. Priority Date: 01/20/1994
  • Status: Expired due to Term
First Claim
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1. An acceleration sensor having a temperature-sensing resistor element and a stationary gas disposed in a closed space with temperature distribution in an equilibrium state, said acceleration sensor detecting temperature at an unbalanced state of said temperature distribution, said unbalanced state being caused in response to acceleration acting on a sensor case, with a change in resistance of said temperature-sensing resistor element, wherein:

  • said temperature-sensing resistor element and a heater are formed on a surface of said sensor case by using a photoengraving process in a semiconductor manufacturing process.

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