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Spatial light modulator with superstructure light shield

  • US 5,719,695 A
  • Filed: 12/05/1996
  • Issued: 02/17/1998
  • Est. Priority Date: 03/31/1995
  • Status: Expired due to Fees
First Claim
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1. A spatial light modulator, comprising;

  • a) a substrate;

    b) addressing circuitry formed on said substrate;

    c) a support structure fixedly formed upon said substrate;

    d) an array of deflectable pixels supported by said fixed support structure over said addressing circuitry; and

    e) shield means fabricated upon and over said fixed support structure for shielding said support structure associated with at least two adjacent said pixels from incident light illuminating said spatial light modulator said shield means having a light absorbing upper surface.

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