Spatial light modulator with superstructure light shield
First Claim
1. A spatial light modulator, comprising;
- a) a substrate;
b) addressing circuitry formed on said substrate;
c) a support structure fixedly formed upon said substrate;
d) an array of deflectable pixels supported by said fixed support structure over said addressing circuitry; and
e) shield means fabricated upon and over said fixed support structure for shielding said support structure associated with at least two adjacent said pixels from incident light illuminating said spatial light modulator said shield means having a light absorbing upper surface.
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Accused Products
Abstract
A high contrast spatial light modulator (40) formed of micro-mechanical pixels (10). The supporting superstructure comprising the posts (12) and hinges (16) of the pixels (10) are shielded by an umbrella-like elevated light shield (42) extending over the hinge and posts. These light shields (42) are generally square in shape, and have edges arranged at approximately 45° with respect to the incident light to minimize diffraction of light therefrom into projection optics. The upper surfaces of the shields may be anodized to achieve a non-reflective, black surface when viewed through darkfield optics. The shields (42) are fabricated using conventional semiconductor processes, which are a natural extension of the baseline process.
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Citations
13 Claims
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1. A spatial light modulator, comprising;
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a) a substrate; b) addressing circuitry formed on said substrate; c) a support structure fixedly formed upon said substrate; d) an array of deflectable pixels supported by said fixed support structure over said addressing circuitry; and e) shield means fabricated upon and over said fixed support structure for shielding said support structure associated with at least two adjacent said pixels from incident light illuminating said spatial light modulator said shield means having a light absorbing upper surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification