Optimized waveguide structure

• US 5,719,976 A
• Filed: 10/24/1995
• Issued: 02/17/1998
• Est. Priority Date: 10/24/1995
• Status: Expired due to Term

• Current Assignee: Avago Technologies General IP PTE Limited (Broadcom, Inc.)
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Yaffe, Henry Howard, Li, Yuan P., Laskowski, Edward John, Henry, Charles Howard
• Primary Examiner(s): Bovernick, Rodney B.
• Assistant Examiner(s): Song, Yisun
• Application Number:
  US08/547,767
• Time in Patent Office: 847 Days
• Field of Search: 385/28, 385/27, 385/43, 385/50, 385/42, 385/16, 385/46, 372/6
• US Class Current: 385/50
• CPC Class Codes: G02B 2006/12119 Bend
• CPC Class Codes: G02B 2006/12169 Annealing
• CPC Class Codes: G02B 6/12004 Combinations of two or more optical elements
• CPC Class Codes: G02B 6/12009 comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305

Abstract

An optimized waveguide structure enables the functional integration of various passive optic components on a single substrate. The optimized waveguide structure is characterized by a thicker core layer than used for square core waveguides and a core width that changes according to different functional regions of the optic circuit within which it is incorporated. The height (H) of the waveguide core is determined by the thickness of the core layer defined during the fabrication process and is ideally uniform across the circuit. The width (W) of the core, however, is changed between functional regions by the photo-lithographic mask and the chemical etching during the fabrication process. By way of example, an optimized waveguide structure for a P-doped silica planar waveguide with a Δ approximately 0.6% for wavelength λ=1.2-1.7 μm, has a single uniform height of H=6.7 μm and a width that changes between W=4 μm in a coupler region, W=5.5 μm in a bend region, W=9 μm in a fiber coupling region, and W=10 μm in a phase grating region of a Dragone router. Adiabatic tapers are used as transition regions between regions of different core widths.

Claims

1. A planar optical waveguide device, comprising:

a substrate;

a first waveguide formed on said substrate, said waveguide having a uniform height and a first width that varies;

a second waveguide formed on said substrate, said second waveguide having said uniform height and a second width that varies;

wherein said first and second waveguides are single mode;

wherein said first and second waveguides are optically coupled in a region of said substrate so as to form a coupler, said first and second widths are reduced in said region to substantially uniform widths so that the optical coupling is substantially insensitive to fabrication error in said first and second widths and said uniform height; and

wherein an aspect ratio of height to width for each of said first and second waveguides in said region is greater than 1.2.

10. The device of claim 1, wherein said first and second widths are equal in said region.

2. A planar optical waveguide device, comprising:

a substrate;

a lower cladding deposited on said substrate;

a core having a uniform height (H) and a variable width (W), and formed on said lower cladding;

an upper cladding deposited on said core and said lower cladding so as to encapsulate said core between said upper cladding and said lower cladding; and

wherein at a single-mode region said waveguide device has an aspect ratio of H/W>

1.2, at a bend region said waveguide device has an aspect ratio of 0.8<

W/H<

1.1, and at a waveguide-fiber coupling region said waveguide device has an aspect ratio of W/H>

1.2.

3. The device of claim 2, wherein said height of said waveguide is greater than 6 μ

m.

4. A planar optical waveguide device, comprising:

a substrate;

a lower cladding deposited on said substrate;

a core having a uniform height (H) and a variable width (W), and formed on said lower cladding;

an upper cladding deposited on said core and said lower cladding so as to encapsulate said core between said upper cladding and said lower cladding;

wherein at a single-mode region said waveguide device has an aspect ratio of H/W>

1.2, at a bend region said waveguide device has an aspect ratio of 0.8<

W/H<

1.1, and at a waveguide-fiber coupling region said waveguide device has an aspect ratio of W/H>

1.2; and

a second waveguide comprising a second core encapsulated between said lower and upper cladding, said second waveguide being configured so as to optically interact with said waveguide, and said second core having a height substantially equal to said height of said core and a variable width.

5. The device of claim 4, wherein said waveguide and said second waveguide are optically coupled in a coupling region, said coupling region having a coupling length that is substantially independent of manufacturing variations in said widths of said core and second core.

6. A planar optical waveguide device, comprising:

a substrate;

a lower cladding deposited on said substrate;

a core having a uniform height (H) and a variable width (W) , and formed on said lower cladding;

an upper cladding deposited on said core and said lower cladding so as to encapsulate said core between said upper Cladding and said lower cladding;

wherein at a single-mode region said waveguide device has an aspect ratio of H/W>

1.2, at a bend reaction said waveguide device has an aspect ratio of 0.8<

W/H<

1.1, and at a waveguide-fiber coupling region said waveguide device has an aspect ratio of W/H>

1.2; and

wherein said width of said waveguide in a bend region of said waveguide is increased to a predetermined uniform width throughout said bend section such that said waveguide guides multi-modes resulting in reduced bend loss.

7. A planar optical waveguide device comprising at least two waveguides on a substrate which are optically interactive at various regions, each said waveguide having a height and a width, said waveguide device comprising the following regions:

a coupling region in which said waveguides are optically coupled and wherein said width of each said waveguide is reduced such that each said width is substantially equal in said coupling region and a ratio of said height to said width for each said waveguide in said coupling region is greater than 1.2 in order to minimize the effect of manufacturing variations in said width with regard to coupling efficiency; and

an interface region in which said waveguides are interfaced with respective optical fibers and wherein said width of each said waveguide at said interface region is increased to greater than 120% of said height for each respective said waveguide in order to reduce mode-field mismatch between said waveguides and the optical fibers.

8. The device of claim 7, further including a bend region in which each said waveguide bends and wherein said widths of each said waveguide is increased to a uniform width in said bend region in order to reduce bend loss.

9. A planar optical waveguide device, comprising:

a plurality of unequal length waveguides having respective first and second ends, each said unequal length waveguide having a ratio of core width to core height of greater than 1.15;

a single-mode region having an aspect ratio of H/W>

1.2 at respective said first and said second ends of each said unequal length waveguide; and

whereby the phase difference between said unequal length waveguides is stabilized against fabrication errors in core width.