Photovoltaic element and fabrication process thereof
First Claim
1. A photovoltaic element having stacked films of non-single-crystal semiconductors, comprising a first conductivity type semiconductor layer, an i-type semiconductor layer on said first conductivity type semiconductor layer and a second conductivity type semiconductor layer on said i-type semiconductor layer, wherein said second conductivity type semiconductor layer has a first layer A formed by exposing the surface of the i-type semiconductor layer to a plasma containing a valence electron controlling agent and a layer B deposited on said layer A by a CVD process using at least a valence electron controlling agent and the main constituent element(s) of said i-type semiconductor layer.
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Abstract
Provided are a photovoltaic element suitable for practical use, low in cost, high in reliability, and high in photoelectric conversion efficiency, and a fabrication process thereof. In the photovoltaic element having stacked layers of non-single-crystal semiconductors, at least an i-type semiconductor layer and a second conductivity type semiconductor layer are stacked on a first conductivity type semiconductor layer, and the second conduction type semiconductor layer has a layer A formed by exposing the surface of the i-type semiconductor layer to a plasma containing a valence electron controlling agent and a layer B deposited on the layer A by a CVD process using at least the valence electron controlling agent and the main constituent elements of the i-type semiconductor layer.
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Citations
42 Claims
- 1. A photovoltaic element having stacked films of non-single-crystal semiconductors, comprising a first conductivity type semiconductor layer, an i-type semiconductor layer on said first conductivity type semiconductor layer and a second conductivity type semiconductor layer on said i-type semiconductor layer, wherein said second conductivity type semiconductor layer has a first layer A formed by exposing the surface of the i-type semiconductor layer to a plasma containing a valence electron controlling agent and a layer B deposited on said layer A by a CVD process using at least a valence electron controlling agent and the main constituent element(s) of said i-type semiconductor layer.
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32. A process for fabricating a photovoltaic element, comprising:
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a step of depositing a first conductivity type semiconductor; a step of depositing an i-type semiconductor on said first conductivity type semiconductor; a step of exposing a surface region of said i-type semiconductor layer to a plasma atmosphere containing a valence electron controlling agent, thereby forming from said surface region a layer A of a second conductivity type semiconductor; and a step of depositing a second conductivity type semiconductor containing a valence electron controlling agent on said layer A, thereby forming a layer B. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40, 41, 42)
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Specification