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Photovoltaic element and fabrication process thereof

  • US 5,720,826 A
  • Filed: 05/29/1996
  • Issued: 02/24/1998
  • Est. Priority Date: 05/30/1995
  • Status: Expired due to Term
First Claim
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1. A photovoltaic element having stacked films of non-single-crystal semiconductors, comprising a first conductivity type semiconductor layer, an i-type semiconductor layer on said first conductivity type semiconductor layer and a second conductivity type semiconductor layer on said i-type semiconductor layer, wherein said second conductivity type semiconductor layer has a first layer A formed by exposing the surface of the i-type semiconductor layer to a plasma containing a valence electron controlling agent and a layer B deposited on said layer A by a CVD process using at least a valence electron controlling agent and the main constituent element(s) of said i-type semiconductor layer.

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