All-silicon monolithic motion sensor with integrated conditioning circuit

• US 5,721,162 A
• Filed: 11/03/1995
• Issued: 02/24/1998
• Est. Priority Date: 11/03/1995
• Status: Expired due to Term

• Current Assignee: Google Inc. (Alphabet Inc.)
• Original Assignee: Delco Electronics Corporation (Motors Liquidation Co. GUC Trust)
• Inventors: Schubert, Peter James, Staller, Steven Edward, Chilcott, Dan Wesley, Kearney, Mark Billings
• Primary Examiner(s): Niebling, John
• Assistant Examiner(s): MULPURI, SAVITRI
• Application Number:
  US08/552,401
• Time in Patent Office: 844 Days
• Field of Search: 438/50, 438/52, 438/53, 438/739, 438/455, 438/456, 438/700, 438/712, 438/977, 438/719, 438/740, 438/459, 438/510, 73/514.32, 73/514.36
• US Class Current: 438/52
• CPC Class Codes: B81C 1/00246 Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
• CPC Class Codes: G01P 15/0802 Details

Abstract

A motion sensor including a sensing wafer with a bulk micromachined sensing element, and a capping wafer on which is formed the conditioning circuitry for the sensor. The sensing and capping wafers are configured such that, when bonded together, the capping wafer encloses the sensing element to form a monolithic sensor. The capping wafer is further configured to expose bond pads on the sensing wafer, and to enable singulation of the two-wafer stack into individual dies. Wire bonds can be made to both wafers, such that the sensor can be packaged in essentially any way desired.

Claims

1. A method for forming a monolithic motion sensor, the method comprising the steps of:

providing a first semiconductor wafer characterized by a first electrical conductivity type;

forming a doped region of a second electrical conductivity type in a surface of the first semiconductor wafer;

selectively etching a trench in the doped region so as to form a micromachined motion sensing element therein;

forming conditioning circuitry for the micromachined motion sensing element on a second semiconductor wafer;

etching a recess in a surface of the second semiconductor wafer;

bonding the second semiconductor wafer to the first semiconductor wafer such that the recess encases the trench and forms an enclosure for the micromachined motion sensing element, and such that a portion of the second semiconductor wafer is disposed above bond pads on the surface of the first semiconductor wafer; and

removing the portion of the second semiconductor wafer so as to expose the bond pads on the surface of the first semiconductor wafer.

2. A method as recited in claim 1 wherein the first semiconductor wafer is formed to include an oxide region located below a surface of the first semiconductor wafer, and wherein the step of forming the doped region in the first semiconductor wafer results in the doped region extending to the oxide region, the method further comprising the step of selectively etching the oxide region so as to undercut and free the micromachined motion sensing element.

3. A method as recited in claim 2 wherein the first semiconductor wafer is a bulk silicon wafer and the oxide region is an internal oxide layer of the bulk silicon wafer.

4. A method as recited in claim 2 wherein the first semiconductor wafer comprises an epitaxial layer grown on a bulk silicon wafer, and wherein the oxide region is formed on the bulk silicon wafer and buried by the epitaxial layer.

5. A method as recited in claim 4 wherein the oxide region includes a dopant of the second electrical conductivity type, the dopant diffusing into the first semiconductor wafer during the step of forming the doped region so as to yield a buried interconnect beneath the micromachined motion sensing element.

6. A method as recited in claim 1 wherein the step of selectively etching the trench yields a plurality of micromachined motion sensing elements.

7. A method as recited in claim 1 wherein the micromachined motion sensing element is a cantilevered beam.

8. A method as recited in claim 1 wherein the micromachined motion sensing element forms a capacitive element with a portion of the doped region.

9. A method as recited in claim 1 wherein the first semiconductor wafer is composed of upper and lower wafers of the first electrical conductivity type, the first semiconductor wafer being formed by the steps of:

providing a recess in a surface of the lower wafer;

doping a wall of the recess to have a second electrical conductivity type;

bonding the upper wafer to the lower wafer such that the recess is encased by the upper wafer and the upper and lower wafers form a monolithic wafer;

wherein the doped region is formed in the upper wafer to extend through the upper wafer to the wall of the recess such that the wall forms a buried interconnect, and wherein the trench is selectively etched in the doped region and through the upper wafer to the recess.

10. A method as recited in claim 1 further comprising the step of forming a bipolar junction transistor on the first semiconductor wafer so as to reduce the effects of parasitic capacitances between the first and second semiconductor wafers.

11. A method as recited in claim 1 wherein the step of etching a recess in the surface of the second semiconductor wafer yields a bonding surface between two recesses, a first of the two recesses encasing the trench and a second of the two recesses forming the portion of the second semiconductor above the bond pads, the bonding surface being bonded to the first semiconductor wafer during the bonding step.

12. A method for forming a monolithic motion sensor, the method comprising the steps of:

providing an oxide region located below a surface of a first semiconductor wafer characterized by a first electrical conductivity type;

forming a doped region of a second electrical conductivity type in the first semiconductor wafer, the doped region extending from the surface to the oxide region;

selectively etching a trench in the doped region, the trench extending from the surface to the oxide region so as to yield a structural feature within the trench, such that the structural feature is formed by a portion of the doped region and is contiguous with the oxide region;

selectively etching the oxide region so as to free the structural feature and thereby yield a micromachined motion sensing element;

forming conditioning circuitry for the micromachined motion sensing element on a second semiconductor wafer;

etching a recess in a surface of the second semiconductor wafer;

bonding the second semiconductor wafer to the first semiconductor wafer such that the recess encases the trench and forms an enclosure for the micromachined motion sensing element, and such that a portion of the second semiconductor wafer is disposed above bond pads on the surface of the first semiconductor wafer; and

removing the portion of the second semiconductor wafer so as to expose the bond pads on the surface of the first semiconductor wafer.

13. A method as recited in claim 12 wherein the first semiconductor wafer is a bulk silicon wafer and the oxide region is an internal oxide layer of the bulk silicon wafer.

14. A method as recited in claim 12 wherein the step of selectively etching the trench yields a plurality of structural features within the trench and contiguous with the oxide region, and wherein the step of selectively etching the oxide region frees each of the plurality of structural features so as to yield a plurality of micromachined motion sensing elements.

15. A method as recited in claim 12 wherein the micromachined motion sensing element is a cantilevered beam.

16. A method as recited in claim 12 wherein the micromachined motion sensing element forms a capacitive element with a second portion of the doped region.

17. A method as recited in claim 12 wherein the first semiconductor wafer comprises an epitaxial layer grown on a bulk silicon wafer, and wherein the oxide region is formed on the bulk silicon wafer and buried by the epitaxial layer.

18. A method as recited in claim 17 wherein the oxide region includes a dopant of the second electrical conductivity type, and wherein the dopant diffuses into the first semiconductor wafer during the step of forming the doped region in the first semiconductor wafer so as to yield a buried interconnect beneath the micromachined motion sensing element.

19. A method as recited in claim 12 wherein the first semiconductor wafer is composed of upper and lower wafers of the first electrical conductivity type, the first semiconductor wafer being formed by the steps of:

providing a recess in a surface of the lower wafer;

doping a wall of the recess to be of the second electrical conductivity type;

bonding the upper wafer to the lower wafer such that the recess is encased by the upper wafer and the upper and lower wafers form a monolithic wafer;

wherein the doped region is formed in the upper wafer to extend through the upper wafer to the wall of the recess such that the wall forms a buried interconnect, and wherein the trench is selectively etched in the doped region and through the upper wafer to the recess.

20. A method as recited in claim 12 wherein the step of etching a recess in the surface of the second semiconductor wafer yields a bonding surface between two recesses, the bonding surface being bonded to the first semiconductor wafer during the bonding step.

21. A method as recited in claim 20 further comprising the step of forming a bipolar junction transistor on the first semiconductor wafer so as to reduce the effects of parasitic capacitances between the first and second semiconductor wafers.

22. A method as recited in claim 21 wherein the bipolar junction transistor is disposed beneath the bonding surface of the second semiconductor wafer following the bonding step.

23. A method as recited in claim 21 wherein the bipolar junction transistor is formed by the steps of:

forming a base region of the second electrical conductivity type in the first semiconductor wafer, the base region forming a conductive region between the bond pads and the doped region in the first semiconductor wafer;

forming an emitter region of the first electrical conductivity type in the base region; and

forming a collector region of the second electrical conductivity type in the first semiconductor wafer adjacent the base region.

24. A method for forming a monolithic motion sensor, the method comprising the steps of:

providing a recess in a surface of a first semiconductor wafer characterized by a first electrical conductivity type;

doping a wall of the recess to have a second electrical conductivity type;

bonding a second semiconductor wafer to the first semiconductor wafer such that the recess is encased by the second semiconductor wafer and the first and second semiconductor wafers form a monolithic sensing wafer;

forming a doped region of the second electrical conductivity type in the second semiconductor wafer, the doped region extending through the second semiconductor wafer to the wall of the recess such that the wall forms a buried interconnect;

selectively etching a trench in the doped region, the trench extending through the second semiconductor wafer to the recess so as to yield a micromachined motion sensing element within the trench and above the buried interconnect;

forming conditioning circuitry for the micromachined motion sensing element on a third semiconductor wafer;

etching a recess in a surface of the third semiconductor wafer;

bonding the third semiconductor wafer to the monolithic sensing wafer such that the recess encases the trench and forms an enclosure for the micromachined motion sensing element, and such that a portion of the third semiconductor wafer is disposed above bond pads on the surface of the monolithic sensing wafer; and

removing the portion of the third semiconductor wafer so as to expose the bond pads on the surface of the monolithic sensing wafer.

25. A method as recited in claim 24 wherein the micromachined motion sensing element is a cantilevered beam.

26. A method as recited in claim 24 wherein the micromachined motion sensing element forms a capacitive element with a second portion of the doped region.

27. A method as recited in claim 24 wherein the step of etching a recess in the surface of the third semiconductor wafer yields a bonding surface between two recesses, the bonding surface being bonded to the monolithic sensing wafer during the bonding step.

28. A method as recited in claim 27 further comprising the step of forming a bipolar junction transistor on the monolithic sensing wafer so as to reduce the effects of parasitic capacitances between the third semiconductor wafer and the monolithic sensing wafer.

29. A method as recited in claim 28 wherein the bipolar junction transistor is disposed beneath the bonding surface of the third semiconductor wafer following the bonding step.

30. A method as recited in claim 28 wherein the bipolar junction transistor is formed by the steps of:

forming a base region of the second electrical conductivity type in the second semiconductor wafer, the base region forming a conductive region between the bond pads and the doped region in the second semiconductor wafer;

forming an emitter region of the first electrical conductivity type in the base region; and

forming a collector region of the second electrical conductivity type in the second semiconductor wafer adjacent the base region.