Process for forming a semiconductor device and a static-random-access memory cell

• US 5,721,167 A
• Filed: 02/10/1997
• Issued: 02/24/1998
• Est. Priority Date: 02/10/1997
• Status: Expired due to Fees

• Current Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Denning, Dean, Subramanian, Chitra, Adetutu, Olubunmi, Sitaram, Arkalgud R., Hayden, James D.
• Primary Examiner(s): TSAI, H JEY
• Application Number:
  US08/797,142
• Time in Patent Office: 379 Days
• Field of Search: 438/238, 438/241, 438/258, 438/266, 438/279, 257/903-904
• US Class Current: 438/238
• CPC Class Codes: H10B 10/00 Static random access memory [SRAM] devices

Abstract

A semiconductor device (10) is formed having an SRAM array with a plurality of SRAM cells. In forming the access and latch transistors, two different gate electrode compositions are used to form the access and latch transistors. More specifically, a dielectric layer (22) is formed between two conductive layers (26 and 28) within the gate electrode (52) for the access transistors while the dielectric layer is not formed between the two conductive layers (26 and 28) for the latch transistors. This structure allows an increase in the beta ratio for the SRAM cell thereby making a more stable SRAM cell without having to use diffused resistors between the access transistors in storage nodes or by having to form a differential thickness between the gate dielectric layers for the latch transistors and the access transistors.

Claims

1. A process for forming a semiconductor device comprising the steps of:

forming a first conductive layer over a substrate having a first region and a second region;

forming a first dielectric layer over the first conductive layer;

selectively etching the first dielectric layer to form a patterned first dielectric layer, wherein;

a first portion of the first dielectric layer is removed over the first region of the substrate; and

a second portion of the first dielectric layer remains over the second region of the first conductive layer;

forming a second conductive layer over the patterned first dielectric layer and the first conductive layer; and

selectively etching the first conductive layer, the first dielectric layer, and the second conductive layer to form a first gate electrode and a second gate electrode, wherein;

the first gate electrode overlies the first region of the substrate and includes the first conductive layer and the second conductive layer; and

the second gate electrode overlies the second region of the substrate and includes the first conductive layer, the second portion of the first dielectric layer, and the second conductive layer.

2. The process of claim 1, wherein the second gate electrode is a gate electrode for an access transistor of an SRAM cell.

3. The process of claim 1, wherein the first gate electrode is a gate electrode for a latch transistor of an SRAM cell.

4. The process of claim 1, further comprising a step of forming a first gate dielectric portion and a second gate dielectric portion before the step of forming the first conductive layer, wherein:

the first gate dielectric portion overlies the first region of the substrate;

the second gate dielectric portion overlies the second region of the substrate; and

the first and second gate dielectric portions have substantially a same thickness.

5. The process of claim 1, further comprising steps of:

forming a first gate dielectric film over the first and second regions of the substrate;

etching the first gate dielectric film away from the second region of the substrate; and

forming a second gate dielectric film over the second region of the substrate before the step of forming the first conductive layer.

6. The process of claim 1, wherein the step of forming the first conductive layer comprises a step of depositing a layer including a semiconductor material.

7. The process of claim 1, further comprising a step of forming an antireflective coating over the second conductive layer.

8. The process of claim 7, further comprising a step of forming a semiconductive layer comprising silicon between the second conductive layer and the antireflective coating.

9. The process of claim 1, wherein the step of forming the first dielectric layer comprises a step of thermally oxidizing the first conductive layer.

10. The process of claim 1, wherein the step of forming the first dielectric layer comprises a step of forming the first dielectric layer having a dielectric constant greater than five.

11. The process of claim 1, wherein the step of forming the first dielectric layer comprises a step of forming the first dielectric layer having a thickness in a range of approximately 30 to 150 angstroms.

12. The process of claim 1, wherein the step of forming the second conductive layer comprises a step of forming a silicide layer.

13. The process of claim 1, further comprising steps of:

forming interconnects to the first and second gate electrodes; and

forming a passivation layer over the interconnects.