Angular velocity sensor with built-in limit stops
First Claim
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1. An angular velocity sensor comprising:
- a multilayer substrate including a top silicon layer, an insulating sacrificial layer arranged below the top silicon layer, and a bottom silicon layer arranged below the insulating sacrificial layer;
at least one resonating bar;
a resonator configured out of the multilayer substrate, the resonator being suspended on the resonating bar;
means for exciting the resonator to vibrate in a first direction;
an acceleration sensor arranged on the resonator; and
at least one limit stop configured out of the multilayer substrate, the limit stop limiting movement of the resonator.
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Abstract
In an angular velocity sensor, an acceleration sensor is arranged on a resonator formed of a multilayer substrate and attached to a resonating bar. The multilayer substrate includes a top silicon layer, an insulating sacrificial layer arranged below the top silicon layer, and a bottom silicon layer arranged below the insulating sacrificial layer. An excitor causes the resonator to vibrate while a limit stop, configured out of the multilayer substrate, limits the movement of the resonator.
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Citations
13 Claims
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1. An angular velocity sensor comprising:
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a multilayer substrate including a top silicon layer, an insulating sacrificial layer arranged below the top silicon layer, and a bottom silicon layer arranged below the insulating sacrificial layer; at least one resonating bar; a resonator configured out of the multilayer substrate, the resonator being suspended on the resonating bar; means for exciting the resonator to vibrate in a first direction; an acceleration sensor arranged on the resonator; and at least one limit stop configured out of the multilayer substrate, the limit stop limiting movement of the resonator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification