Optical proximity correction method and apparatus

• US 5,723,233 A
• Filed: 02/27/1996
• Issued: 03/03/1998
• Est. Priority Date: 02/27/1996
• Status: Expired due to Term

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: LSI Logic Corporation (Broadcom, Inc.)
• Inventors: Eib, Nicholas K., Garza, Mario, Chao, Keith K.
• Primary Examiner(s): Rosasco, S.
• Application Number:
  US08/607,365
• Time in Patent Office: 735 Days
• Field of Search: 430/5, 430/22, 430/311, 382/144, 382/145, 382/147
• US Class Current: 430/5
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
• CPC Class Codes: G03F 7/70441 Optical proximity correction [OPC]

Abstract

A photolithography optical proximity correction method for mask layouts (e.g., reticle masks) is disclosed. The method includes performing pattern recognition on a layout design to identify locations of feature edges with respect to other feature edges in the layout design. The method further includes obtaining an optical proximity correction for at least one of the feature edges by evaluating one or more non-linear mathematical expressions for optical proximity correction at the location of that edge with respect to other feature edges.

Claims

1. An optical proximity correction method for preparing reticle designs to be used in photolithography, the method comprising the following steps:

(a) performing pattern recognition on an integrated circuit layout design to identify a location of a selected feature edge in the layout design;

(b) obtaining an optical proximity correction value for said selected feature edge by evaluating one or more non-linear mathematical expressions for optical proximity correction at the location of the selected feature edge, the one or more non-linear mathematical expression defining a curve that non-linearly increases an amount of optical proximity correction for said selected feature edge; and

(c) incorporating said optical proximity correction value into said layout design to form said reticle design.

2. The optical proximity correction method of claim 1, further comprising the following steps:

repeating steps (a) through (c) for multiple feature edges in said layout design;

for each feature edge located in step (a), determining whether the selected feature edge is associated with a feature having a critical dimension above a pre-selected value;

for any feature edge found to be associated with a feature having a critical dimension above said pre-selected value, skipping steps (b) and (c).

3. The optical proximity correction method of claim 2 wherein the pre-selected value is about 0.5 μ

m or greater.

4. The optical proximity correction method of claim 1, wherein said step of obtaining an optical proximity correction includes a step of evaluating said one of said non-linear mathematical expressions by directly solving said expression.

5. The optical proximity correction method of claim 1, wherein said step of obtaining an optical proximity correction includes a step of evaluating said one of said non-linear mathematical expressions by employing a look-up table of discreet optical proximity correction values generated from said non-linear mathematical expression.

6. The optical proximity correction method of claim 1, wherein the one or more non-linear mathematical expressions are evaluated at locations of the selected feature edges, which locations are provided as combinations of at least (i) one value representing the width of a light transmitting region adjacent to the selected feature edge, and (ii) a second value representing a width of a light blocking region adjacent to the selected feature edge.

7. The optical proximity correction method of claim 1, further comprising a step of confirming the optical proximity correction value obtained in step (b) against one or more predetermined rules.

8. An apparatus for performing optical proximity correction on layout designs to be used in photolithography, the apparatus comprising:

(a) means for performing pattern recognition on an integrated circuit layout design to identify locations of selected feature edges in the layout design; and

(b) means for obtaining an optical proximity correction value for at least one of said selected feature edges by evaluating one or more non-linear mathematical expressions for optical proximity correction at the location of said at least one selected feature edge, the one or more non-linear mathematical expression defining a curve that non-linearly increases an amount of optical proximity correction for said at least one of said selected feature edges.

9. The apparatus for performing optical proximity correction of claim 8, further comprising means for determining whether the selected feature edges are associated with features having a critical dimension of at most about a predefined value, wherein when said means for determining finds that a particular feature edge is associated with a feature having a critical dimension greater than said predefined value, an optical proximity correction value is not obtained.

10. The apparatus for performing optical proximity correction of claim 8, wherein said means for obtaining an optical proximity correction value evaluates one of said non-linear mathematical expressions by directly solving said expression.

11. The apparatus for performing optical proximity correction of claim 8, wherein said means for obtaining an optical proximity correction evaluates said one of said non-linear mathematical expressions by employing a look up table of discreet optical proximity correction values generated from said non-linear mathematical expression.

12. The apparatus for performing optical proximity correction of claim 8, wherein the locations of the feature edges are provided as at least (i) one value representing a width of a light transmitting region adjacent to the selected feature edge, and (ii) a second value representing a width of a light blocking region adjacent to the selected feature edge.

13. The apparatus for performing optical proximity correction of claim 8, wherein the means for obtaining an optical proximity correction confirms the optical proximity correction value it obtains against one or more of predetermined rules.

14. A reticle design for use in photolithography, the reticle design having a pattern of light transmitting and light blocking regions specified at least in part by a non-linear proximity correction method comprising the following steps:

(a) performing pattern recognition on an integrated circuit layout design to identify a location of a selected feature edge in the layout design;

(b) obtaining an optical proximity correction value for said selected feature edge by evaluating one or more non-linear mathematical expressions for optical proximity correction at the location of the selected feature edge, the one or more non-linear mathematical expression defining a curve that non-linearly increases an amount of optical proximity correction for the selected feature edge; and

(c) incorporating said optical proximity correction value into said layout design to form said reticle design.

15. The reticle design of claim 14, wherein the method of preparing the reticle design further comprises the following steps:

repeating steps (a) through (c) for multiple feature edges in said layout design;

for each feature edge located in step (a), determining whether the selected feature edge is associated with a feature having a critical dimension above a pre-selected value;

for any feature edge found to be associated with a feature having a critical dimension above said pre-selected value, skipping steps (b) and (c).

16. The reticle design of claim 14, wherein the one or more non-linear mathematical expressions are evaluated at locations of the selected feature edges, which locations are provided as combinations of at least (i) one value representing the width of a light transmitting region adjacent to the selected feature edge, and (ii) a second value representing a width of a light blocking region adjacent to the selected feature edge.

17. The reticle design of claim 14, wherein the method of preparing the reticle design further comprises a step of confirming the optical proximity correction value obtained in step (b) against one or more predetermined rules.