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Monocrystalline accelerometer and angular rate sensor and methods for making and using same

  • US 5,723,790 A
  • Filed: 06/02/1995
  • Issued: 03/03/1998
  • Est. Priority Date: 02/27/1995
  • Status: Expired due to Term
First Claim
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1. A semiconductor device formed from a monocrystalline semiconductor substrate having a substantially planar main surface, for measuring force components, said semiconductor device comprising:

  • at least one cantilever beam formed in said monocrystalline semiconductor substrate, said at least one cantilever beam having a surface inclined non-parallel, non-perpendicular to the main substrate plane of said monocrystalline semiconductor substrate wherein inclination of the at least one cantilever beam to the main surface of said monocrystalline semiconductor substrate is achieved through etching of the monocrystalline semiconductor substrate and said surface of said at least one cantilever beam being defined by one crystal plane of said monocrystalline semiconductor substrate inclined non-parallel, non-perpendicular with respect to the main surface of said monocrystalline semiconductor substrate and that bending of each of the at least one cantilever beams occurs substantially along an axis perpendicular to said inclined surface; and

    at least one mass of inertia, coupled to a corresponding one of said at least one cantilever beam.

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