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Structure for providing an electrical connection between circuit members

  • US 5,723,894 A
  • Filed: 07/03/1996
  • Issued: 03/03/1998
  • Est. Priority Date: 07/07/1995
  • Status: Expired due to Term
First Claim
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1. An electrical connection structure for connecting a first circuit member to a second circuit member, the first circuit member including a semiconductor substrate, the electrical connection structure comprising:

  • a cantilever formed in the semiconductor substrate, the cantilever having an end remote from the semiconductor substrate;

    a conductive needle at the end of the cantilever, the conductive needle being electrically connected to the first circuit member;

    a terminal pad located on the second circuit member opposite the conductive needle when the first circuit member and the second circuit member are juxtaposed, the terminal pad being electrically connected to the second circuit member; and

    fixing means for fixing the first circuit member juxtaposed to the second circuit member in a way that stresses the cantilever to apply a contact force between the conductive needle and the terminal pad.

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