Structure for providing an electrical connection between circuit members
First Claim
1. An electrical connection structure for connecting a first circuit member to a second circuit member, the first circuit member including a semiconductor substrate, the electrical connection structure comprising:
- a cantilever formed in the semiconductor substrate, the cantilever having an end remote from the semiconductor substrate;
a conductive needle at the end of the cantilever, the conductive needle being electrically connected to the first circuit member;
a terminal pad located on the second circuit member opposite the conductive needle when the first circuit member and the second circuit member are juxtaposed, the terminal pad being electrically connected to the second circuit member; and
fixing means for fixing the first circuit member juxtaposed to the second circuit member in a way that stresses the cantilever to apply a contact force between the conductive needle and the terminal pad.
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Accused Products
Abstract
An electrical connection structure interconnects a first circuit member and a second circuit member and comprises a cantilever, a conductive needle, a terminal pad and a fixing element. The cantilever is formed in the semiconductor substrate and has an end remote from the semiconductor substrate. The conductive needle is at the end of the cantilever and is electrically connected to the first circuit member. The terminal pad is located on the second circuit member opposite the conductive needle tip when the first circuit member and the second circuit member are juxtaposed. The terminal pad is electrically connected to the second circuit member. The fixing element fixes the first circuit member juxtaposed to the second circuit member in a way that stresses the cantilever to apply a contact force between the conductive needle and the terminal pad.
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Citations
20 Claims
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1. An electrical connection structure for connecting a first circuit member to a second circuit member, the first circuit member including a semiconductor substrate, the electrical connection structure comprising:
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a cantilever formed in the semiconductor substrate, the cantilever having an end remote from the semiconductor substrate; a conductive needle at the end of the cantilever, the conductive needle being electrically connected to the first circuit member; a terminal pad located on the second circuit member opposite the conductive needle when the first circuit member and the second circuit member are juxtaposed, the terminal pad being electrically connected to the second circuit member; and fixing means for fixing the first circuit member juxtaposed to the second circuit member in a way that stresses the cantilever to apply a contact force between the conductive needle and the terminal pad. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An electrical connection structure for connecting a first circuit member to a second circuit member, the electrical connection structure comprising:
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a single-crystal substrate in the first circuit member; a cantilever formed from the single-crystal substrate of the first circuit member by micromachining, the cantilever having an end remote from the semiconductor substrate; a conductive needle at the end of the cantilever, the conductive needle being electrically connected to the first circuit member; a terminal pad located on the second circuit member opposite the conductive needle when the first circuit member and the second circuit member are juxtaposed, the terminal pad being electrically connected to the second circuit member; positioning means, located on at least one of the first circuit member and the second circuit member, for defining a relative positioning between the first circuit member and the second circuit member a direction perpendicular to the substrate of the first circuit member; and fixing means for fixing the first circuit member juxtaposed to the second circuit member in a way that stresses the cantilever to apply a contact force between the conductive needle and the terminal pad. - View Dependent Claims (19)
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20. An electrical connection structure for connecting a first circuit member to a second circuit member, the electrical connection structure comprising:
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a single-crystal substrate in the first circuit member; a cantilever formed in the single-crystal substrate of the first circuit member, the cantilever having an end remote from the semiconductor substrate; a conductive needle at the end of the cantilever, the conductive needle being electrically connected to the first circuit member; a terminal pad located on the second circuit member opposite the conductive needle when the first circuit member and the second circuit member are juxtaposed, the terminal pad being electrically connected to the second circuit member; fixing means for fixing the first circuit member juxtaposed to the second circuit member in a way that stresses the cantilever to apply a contact force between the conductive needle and the terminal pad, and electrostatic electrode means, attached to the cantilever and at least one of the first circuit member and the second circuit member, for applying flexural stress to the cantilever in response to a voltage.
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Specification