Automatic temperature controlling system

• US 5,724,825 A
• Filed: 09/11/1996
• Issued: 03/10/1998
• Est. Priority Date: 09/11/1996
• Status: Expired due to Fees

• Current Assignee: ProMOS Technologies, Inc.
• Original Assignee: Mosel Vitelic Incorporated
• Inventors: Chang, Simon, Lee, Wen Hong, Chang, Thomas
• Primary Examiner(s): Bennett, Henry A.
• Assistant Examiner(s): Tinker, Susanne C.
• Application Number:
  US08/712,523
• Time in Patent Office: 545 Days
• Field of Search: 62/175, 62/185, 62/126, 62/201, 62/259.2
• US Class Current: 62/185
• CPC Class Codes: H01L 21/67098 Apparatus for thermal treatment

Abstract

The present invention relates to an automatic temperature controlling system for semiconductor process, when one of the chillers in the temperature controlling system is out of order, then another chiller will automatically take over the function of the broken one by using the second temperature controlling path. The automatic temperature controlling system includes: at least two chambers used for performing a process having first temperature controlling paths for providing coolant circulations while the system is in normal condition, and having a second temperature controlling path for providing at least one coolant circulation while the system is in abnormal condition; at least two chillers are respectively connected to the chambers for controlling the temperature of the chambers; a plurality of first normal-on valves are used to control the condition of the first temperature controlling paths; a plurality of second normal-on valves are used to control the condition of the first temperature controlling paths; and a plurality of pairs of normal-off valves are used to control the condition of the second temperature controlling paths.

Claims

1. An automatic temperature controlling system, said system comprising:

at least two chambers having first temperature controlling paths operable simultaneously for providing coolant circulations while said system is in normal condition, and having second temperature controlling paths operable one at a time for providing at least one coolant circulation while said system is in an abnormal condition;

at least two chillers connected to said chambers for controlling the temperature of said chambers by circulating coolant respectively;

a pair of first normal-on valves responsive to said chillers for controlling the condition of said first temperature controlling paths respectively, each said first normal-on valve is located between each said chiller and said chamber in the flow direction of the coolant;

a pair of second normal-on valves responsive to said chillers for controlling the condition of said first temperature controlling paths respectively, each said second normal-on valve is located between each said chamber and said chiller in the flow direction of the coolant; and

a pair of normal-off valves responsive to said chillers for controlling the condition of said second temperature controlling paths respectively, said pair of normal-off valves are located between said first temperature controlling paths.

2. The system of claim 1, wherein said system further comprises detecting means responsive to said chambers to detect whether said chambers are in a normal or abnormal condition.

3. The system of claim 2, wherein said pair of first normal-on valves are solenoid valves.

4. The system of claim 2, wherein said pair of second normal-on valves are solenoid valves.

5. The system of claim 2, wherein said pair of normal-off valves are solenoid valves.

6. The system of claim 3, wherein a current is generated by said detecting means to change the condition of said first normal-on valve.

7. The system of claim 4, wherein a current is generated by detecting means to change the condition of said second normal-on valve.

8. The system of claim 4, wherein a current is generated by detecting means to change the condition of said normal-off valve.

9. An automatic temperature controlling system, said system comprising:

a pair of first temperature control paths, each of said first temperature control paths comprising;

a chiller;

a first normal-on valve connected to the chiller on one side thereof;

a chamber connected to the first normal-on valve, such that said first normal-on valve is between said chiller and said chamber; and

a second normal-on valve connected to the chiller on the other side thereof,

said second normal-on valve also connected to said chamber such that said chiller, said first normal-on valve, said chamber and said second normal-on valve form a loop;

a pair of normal-off valves connecting said first temperature control paths to each other, a first of said normal-off valves connecting the first temperature control paths at corresponding points between the first normal-on valve and the chamber to which said first normal-on valve is connected, and a second normal-off valve connecting the temperature control paths at corresponding points between the chamber and the second normal-on valve to which said chamber is connected;

wherein

said normal-off valves are closed and said normal-on valves in both of said first temperature control paths are open, thereby allowing a coolant to circulate through said pair of first temperature control paths, when said system is in a normal condition, and

said normal-off valves are open and said first and second normal-on valves in one of said pair of first temperature control paths are closed, thereby allowing said coolant to circulate through the chambers of both of said pair of first temperature control paths and the chiller of the other of said pair of first temperature control paths, when said system is in an abnormal condition.