Semiconductor structures having electrically insulating and conducting portions formed from an AlSb-alloy layer

• US 5,726,462 A
• Filed: 02/07/1996
• Issued: 03/10/1998
• Est. Priority Date: 02/07/1996
• Status: Expired due to Term

• Current Assignee: United States Department of Energy (Government of the United States of America)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Spahn, Olga B., Lear, Kevin L.
• Primary Examiner(s): Crane, Sara W.
• Assistant Examiner(s): WILLE, DOUGLAS A
• Application Number:
  US08/597,730
• Time in Patent Office: 762 Days
• Field of Search: 257/22, 257/76, 257/77, 257/88, 257/192
• US Class Current: 257/76
• CPC Class Codes: H01L 21/7605 between components manufactured in an active substrate comprising AIII BV compounds
• CPC Class Codes: H01L 31/0304 including, apart from doping materials or other impurities, only AIIIBV compounds
• CPC Class Codes: H01L 33/30 containing only elements of Group III and Group V of the Periodic Table
• CPC Class Codes: H01S 5/2214 based on oxides or nitrides
• CPC Class Codes: H01S 5/2231 with inner confining structure only between the active layer and the upper electrode
• CPC Class Codes: Y02E 10/544 Solar cells from Group III-V materials

Abstract

A semiconductor structure. The semiconductor structure comprises a plurality of semiconductor layers formed on a substrate including at least one layer of a III-V compound semiconductor alloy comprising aluminum (Al) and antimony (Sb), with at least a part of the AlSb-alloy layer being chemically converted by an oxidation process to form superposed electrically insulating and electrically conducting portions. The electrically insulating portion formed from the AlSb-alloy layer comprises an oxide of aluminum (e.g. Al₂ O₃), while the electrically conducting portion comprises Sb. A lateral oxidation process allows formation of the superposed insulating and conducting portions below monocrystalline semiconductor layers for forming many different types of semiconductor structures having particular utility for optoelectronic devices such as light-emitting diodes, edge-emitting lasers, vertical-cavity surface-emitting lasers, photodetectors and optical modulators (waveguide and surface normal), and for electronic devices such as heterojunction bipolar transistors, field-effect transistors and quantum-effect devices. The invention is expected to be particularly useful for forming light-emitting devices for use in the 1.3-1.6 μm wavelength range, with the AlSb-alloy layer acting to define an active region of the device and to effectively channel an electrical current therein for efficient light generation.

Claims

1. A semiconductor structure comprising a plurality of semiconductor layers formed on a substrate including at least one layer of a III-V compound-semiconductor alloy comprising aluminum (Al) and antimony (Sb) buried below a patterned overlayer, with at least a part of the AlSb-alloy layer being converted to form an electrically conducting portion comprising Sb overlying an electrically insulating portion comprising an oxide of aluminum.

2. The semiconductor structure of claim 1 further including at least one etched access region formed in the semiconductor layers and extending downward at least to the AlSb-alloy layer, each etched access region having a sidewall wherefrom the electrically insulating and electrically conducting portions extend inward into the AlSb-alloy layer.

3. The semiconductor structure of claim 1 wherein the AlSb-alloy layer comprises an AlSb alloy selected from the group consisting of AlSb, AlAsSb, AlPSb, AlGaSb, AlGaAsSb, AlInAsSb, and AlGaPSb;

and the substrate is selected from the group consisting of InP, GaAs, GaSb and InAs.

4. The semiconductor structure of claim 1 wherein the AlSb-alloy layer comprises AlAs_x Sb_1-x with 0≦

x≦

1; and

the substrate is selected from the group consisting of InP, InAs and GaSb.

5. The semiconductor structure of claim 1 wherein the AlSb-alloy layer comprises AlAs_x Sb_1-x with x being about 0.56;

and the substrate is InP.

6. The semiconductor structure of claim 1 wherein the AlSb-alloy layer comprises AlPSb;

and the substrate is GaAs.

7. The semiconductor structure of claim 1 wherein the AlSb-alloy layer comprises an alloy including gallium (Ga);

and the substrate is GaSb or InAs.

8. The semiconductor structure of claim 1 wherein the AlSb alloy is substantially lattice matched to the substrate.

9. The semiconductor structure of claim 1 wherein the plurality of semiconductor layers further includes an active region sandwiched between the substrate and the AlSb-alloy layer, and a semiconductor junction about the active region to form an optoelectronic device.

10. The semiconductor structure of claim 9 wherein the AlSb-alloy layer forms a control layer for channeling a flow of an electrical current through an as-grown portion of the AlSb-alloy layer.

11. The semiconductor structure of claim 1 in the form of a heterojunction bipolar transistor wherein an unoxidized portion of the AlSb-alloy layer forms an emitter layer of the transistor, with a base layer being formed above the emitter from one of the plurality of semiconductor layers, and with a collector layer being formed above the base layer from another of the plurality of semiconductor layers, the emitter and collector layers being doped with a first dopant type and the base layer being doped with a second dopant type opposite the first dopant type.

47. The semiconductor structure of claim 1 wherein the overlayer is selected from the group consisting of semiconductor layers, dielectric layers and metal layers.

48. The semiconductor structure of claim 1 wherein the overlayer comprises a removable masking layer.

49. The semiconductor structure of claim 1 in the form of a field-effect transistor wherein one of the plurality of semiconductor layers above the AlSb-alloy layer comprises a transistor-forming layer having a lateral current channel with a source formed on one side of the current channel and a drain formed on the other side of the current channel, and further including a gate formed above the current channel.

50. The semiconductor structure of claim 1 in the form of a quantum-effect device wherein a layer thickness of the electrically conducting portion is tapered laterally inward from a pair of opposing sidewalls to define a quantum wire in one of the plurality of semiconductor layers above the electrically conducting portion, and a gate is provided proximate to the quantum wire to control a flow of carriers therein.

12. A semiconductor structure comprising:

(a) a substrate;

(b) a plurality of semiconductor layers epitaxially grown on the substrate including at least one buried layer of an AlSb semiconductor alloy; and

(c) a mesa formed within the semiconductor layers and extending downward at least to the buried AlSb-alloy layer, the mesa having at least one sidewall wherefrom superposed electrically insulating and electrically conducting portions formed from the AlSb-alloy layer extend laterally inward.

13. The semiconductor structure of claim 12 wherein the electrically insulating portion comprises an oxide of aluminum, and the electrically conducting portion comprises antimony (Sb).

14. The semiconductor structure of claim 12 wherein the superposed electrically insulating and electrically conducting portions of the AlSb-alloy layer form a control layer for channeling a flow of an electrical current through an as-grown portion of the AlSb-alloy layer.

15. The semiconductor structure of claim 12 wherein a first group of the semiconductor layers is doped n-type and a second group of the semiconductor layers is doped p-type forming a semiconductor junction.

16. The semiconductor structure of claim 15 wherein the semiconductor layers include an active region centered about the semiconductor junction and proximate to the AlSb-alloy layer.

17. The semiconductor structure of claim 16 wherein the active region includes at least one quantum-well layer sandwiched between a pair of cladding layers.

18. The semiconductor structure of claim 16 further including a pair of distributed Bragg reflector (DBR) mirrors comprising a plurality of pairs of alternating one-quarter-wavelength thick layers of high and low energy bandgaps or refractive indices with at least one DBR mirror being formed from the plurality of semiconductor layers, the pair of DBR mirrors forming a resonant optical cavity about the active region.

19. The semiconductor structure of claim 18 wherein a first DBR mirror below the active region is formed from the plurality of semiconductor layers, and a second DBR mirror above the active region comprises a plurality of deposited dielectric layers.

20. The semiconductor structure of claim 18 wherein each DBR mirror is formed from the plurality of semiconductor layers.

21. The semiconductor structure of claim 18 wherein the DBR mirrors and active region have layer thicknesses and compositions matched to a wavelength of light in the range of about 1.3 to about 1.6 μ

m.

22. The semiconductor structure of claim 19 wherein the substrate is InP;

and the AlSb-alloy layer is AlAs_x Sb_1-x with 0≦

x≦

1.

23. The semiconductor structure of claim 20 wherein x is about 0.56.

24. The semiconductor structure of claim 18 further including electrodes above the electrically conducting portion formed from the AlSb-alloy layer and below the substrate to provide a flow of an electrical current through an unoxidized portion of the AlSb-alloy layer and into the active layer to generate light therein.

25. A semiconductor structure comprising:

(a) a substrate;

(b) at least one layer of a III-V compound-semiconductor alloy including aluminum (Al) and antimony (Sb) epitaxially grown on the substrate, with the AlSb-alloy layer having a layer thickness greater than about 5 nanometers and being chemically converted, at least in part, to form superposed electrically insulating and electrically conducting portions; and

(c) an overlayer covering at least a part of the superposed electrically insulating and conducting portions formed from the AlSb-alloy layer.

26. The semiconductor structure of claim 25 wherein the overlayer comprises a substantially monocrystalline semiconductor layer epitaxially grown above the AlSb-alloy layer.

27. The semiconductor structure of claim 25 wherein the overlayer comprises a material selected from the group consisting of dielectric materials and metals deposited above the AlSb-alloy layer.

28. The semiconductor structure of claim 25 wherein the electrically insulating portion comprises an oxide of aluminum;

and the electrically conducting portion comprises Sb.

29. The semiconductor structure of claim 25 wherein the AlSb-alloy layer comprises an AlSb alloy selected from the group consisting of AlSb, AlAsSb, AlPSb, AlGaSb, AlGaAsSb, AlInAsSb, and AlGaPSb;

and the substrate is selected from the group consisting of InP, GaAs, GaSb and InAs.

30. The semiconductor structure of claim 25 wherein the AlSb alloy is AlAs_x Sb_1-x with 0≦

x≦

1; and

the substrate is selected from the group consisting of InP, InAs, and GaSb.

31. The semiconductor structure of claim 25 wherein the AlSb alloy is AlAs_x Sb_1-x with x being about 0.56;

and the substrate is InP.

32. The semiconductor structure of claim 25 further including an active region epitaxially grown on the substrate proximate to the AlSb-alloy layer.

33. The semiconductor structure of claim 32 further including a semiconductor junction formed about the active region.

34. The semiconductor structure of claim 33 wherein the AlSb-layer forms a control layer for channeling a flow of an electrical current into the active region.

35. The semiconductor structure of claim 33 further including electrodes above and below the active region to form an optoelectronic device.

36. The semiconductor structure of claim 33 further including a pair of distributed Bragg reflector (DBR) mirrors comprising a plurality of pairs of alternating one-quarter-wavelength thick layers of high and low energy bandgaps or refractive indices and forming a resonant optical cavity about the active region.

37. The semiconductor structure of claim 36 wherein a first DBR mirror below the active region is formed from a plurality of epitaxially-grown semiconductor layers, and a second DBR mirror above the active region comprises a plurality of deposited dielectric layers.

38. The semiconductor structure of claim 36 wherein the DBR mirrors comprise alternating high-bandgap semiconductor layers and low-bandgap semiconductor layers, with the layers each being about one-quarter wavelength thick.

39. The semiconductor structure of claim 36 further including electrodes above the electrically conducting portion formed from the AlSb-alloy layer and below the substrate to electrically activate the semiconductor structure to generate, to detect or to modulate light.

40. The semiconductor structure of claim 39 wherein the DBR mirrors and active region have layer thicknesses and compositions matched to a wavelength of light in the range of about 1.3 to about 1.6 μ

m.

41. The semiconductor structure of claim 25 in the form of a heterojunction bipolar transistor wherein an unoxidized portion of the AlSb-alloy layer forms an emitter layer of the transistor, with a base layer being formed above the emitter from one of the plurality of semiconductor layers, and with a collector layer being formed above the base layer from another of the plurality of semiconductor layers, the emitter and collector layers being doped with a first dopant type and the base layer being doped with a second dopant type opposite the first dopant type.

51. The semiconductor structure of claim 25 in the form of a field-effect transistor wherein one of the plurality of semiconductor layers above the AlSb-alloy layer comprises a transistor-forming layer having a lateral current channel with a source formed on one side of the current channel and a drain formed on the other side of the current channel, and further including a gate formed above the current channel.

52. The semiconductor structure of claim 25 in the form of a quantum-effect device wherein a layer thickness of the electrically conducting portion is tapered laterally inward from a pair of opposing sidewalls to define a quantum wire in one of the plurality of semiconductor layers above the electrically conducting portion, and a gate is provided proximate to the quantum wire to control a flow of carriers therein.

42. A semiconductor structure comprising:

(a) an AlSb-alloy layer epitaxially grown above a substrate, the AlSb-alloy layer being at least 5 nanometers thick and having at least a portion thereof chemically converted to form superposed electrically-insulating and electrically-conducting layers; and

(b) an overlayer above the converted portion of the AlSb-alloy layer during formation of the converted portion.

43. The semiconductor structure of claim 42 wherein the overlayer comprises a material selected from the group consisting of a semiconductor, a dielectric and a metal.

44. The semiconductor structure of claim 42 wherein the AlSb-alloy layer comprises an AlSb alloy selected from the group consisting of AlSb, AlAsSb, AlPSb, AlGaSb, AlGaAsSb, AlInAsSb, and AlGaPSb.

46. The semiconductor structure of claim 42 wherein the AlSb-alloy layer comprises AlAs_x Sb_1-x with 0≦

x≦

1.

45. The semiconductor structure of claim 45 wherein the substrate comprises a semiconductor alloy selected from the group consisting of InP, GaAs, GaSb and InAs.