Projection exposure apparatus and device manufacturing method using the same
First Claim
1. A projection exposure apparatus comprising:
- secondary light source forming means having a light entrance surface and a light exit surface, for receiving light from a light source with the light entrance surface and for forming a secondary light source at the light exit surface side;
light projecting means for projecting light from said secondary light source to an object plane;
pattern projecting means for projecting, onto an image plane, a pattern on the object plane irradiated with the light;
secondary light source adjusting means for changing a light intensity distribution of said secondary light source; and
illuminance correcting means for changing an intensity distribution of light from the light source, upon the light entrance surface of said secondary light source forming means, to correct an illuminance distribution, to be formed on the image plane asymmetrically with respect to a center due to a variation in light intensity distribution of said secondary light source, into an illuminance distribution symmetric with respect to the center.
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Accused Products
Abstract
A projection exposure apparatus includes a secondary light source forming device having a light entrance surface and a light exit surface, for receiving light from a light source with the light entrance surface and for forming a secondary light source at the light exit surface side, a light projecting system for projecting light from the secondary light source to an object plane, a pattern projecting system for projecting, onto an image plane, a pattern on the object plane irradiated with the light, a secondary light source adjusting device for changing a light intensity distribution of the secondary light source, and an illuminance correcting device for substantially correcting illuminance non-uniformness, asymmetric with respect to an optical axis, formed or to be formed on the image plane with the change of the light intensity distribution.
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Citations
49 Claims
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1. A projection exposure apparatus comprising:
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secondary light source forming means having a light entrance surface and a light exit surface, for receiving light from a light source with the light entrance surface and for forming a secondary light source at the light exit surface side; light projecting means for projecting light from said secondary light source to an object plane; pattern projecting means for projecting, onto an image plane, a pattern on the object plane irradiated with the light; secondary light source adjusting means for changing a light intensity distribution of said secondary light source; and illuminance correcting means for changing an intensity distribution of light from the light source, upon the light entrance surface of said secondary light source forming means, to correct an illuminance distribution, to be formed on the image plane asymmetrically with respect to a center due to a variation in light intensity distribution of said secondary light source, into an illuminance distribution symmetric with respect to the center. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A projection exposure apparatus, comprising:
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light source image projecting means for projecting an image of a light source; secondary light source forming means having a light entrance surface and a light exit surface, for forming a secondary light source at the light exit surface thereof in response to projection of the light source image on the light entrance surface thereof; light projecting means for projecting light from said secondary light source onto an object plane; pattern projecting means for projecting an image of a pattern, placed on the object plane and irradiated with the light, onto an image plane; and secondary light source adjusting means for changing light intensity distribution of said secondary light source, wherein said light source image projecting means comprises illuminance adjusting means for changing the position of the light source image with respect to a direction of an optical axis, so as to reduce a decrease in a quantity of light from said secondary light source caused by a variation in the light intensity distribution of said secondary light source. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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33. A projection exposure apparatus, comprising:
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light source image projecting means for projecting an image of a light source; secondary light source forming means having a light entrance surface and a light exit surface, for forming a secondary light source on the light exit surface thereof in response to projection of the light source image on the light entrance surface thereof; light projecting means for projecting light from said secondary light source onto an object plane; pattern projecting means for projecting an image of a pattern, placed on the object plane and irradiated with the light, onto an image plane; and secondary light source adjusting means for changing light intensity distribution of said secondary light source, wherein said light source image projecting means comprises illumination adjusting means for changing an intensity distribution of light upon the light entrance surface of said secondary light source forming means, to correct an illuminance distribution, to be formed on the image plane asymmetrically with respect to a center due to a variation in the light intensity distribution of said secondary light source, into an illuminance distribution symmetric with respect to the center, and also for changing the position of the light source image with respect to a direction of an optical axis, so as to reduce a decrease in a quantity of light from said secondary light source caused by a variation in the light intensity distribution of said secondary light source. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46)
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47. A device manufacturing method comprising:
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projecting and transferring a device pattern of a reticle onto a substrate using a projection exposure apparatus, comprising; secondary light source forming means having a light entrance surface and a light exit surface, for receiving light from a light source with the light entrance surface and for forming a secondary light source at the light exit surface side; light projecting means for projecting light from the secondary light source to an object plane; pattern projecting means for projecting, onto an image plane, a pattern on the object plane irradiated with the light; secondary light source adjusting means for changing a light intensity distribution of the secondary light source; and illuminance correcting means for changing an intensity distribution of light from the light source, upon the light entrance surface of the secondary light source forming means, to correct an illuminance distribution, to be formed on the image plane asymmetrically with respect to a center due to a variation in light intensity distribution of the secondary light source, into an illuminance distribution symmetric with respect to the center.
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48. A device manufacturing method comprising:
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projecting and transferring a device pattern of a reticle onto a substrate using a projection exposure apparatus, comprising; light source image projecting means for projecting an image of a light source; secondary light source forming means having a light entrance surface and a light exit surface, for forming a secondary light source at the light exit surface thereof in response to projection of the light source image on the light entrance surface thereof; light projecting means for projecting light from the secondary light source onto an object plane; pattern projecting means for projecting an image of a pattern placed on the object plane and irradiated with the light, onto an image plane; and secondary light source adjusting means for changing a light intensity distribution of the secondary light source, wherein the light source image projecting means comprises illuminance adjusting means for changing the position of the light source image with respect to a direction of an optical axis, so as to reduce a decrease in a quantity of light from the secondary light source caused by a variation in the light intensity distribution of the secondary light source.
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49. A device manufacturing method comprising:
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projecting and transferring a device pattern of a reticle onto a substrate using a projection exposure apparatus, comprising; light source image projecting means for projecting an image of a light source; secondary light source forming means having a light entrance surface and a light exit surface, for forming a secondary light source on the light exit surface thereof in response to projection of the light source image on the light entrance surface thereof; light projecting means for projecting an image of a pattern, placed on the object plane and irradiated with the light, onto an image plane; and secondary light source adjusting means for changing a light intensity distribution of the secondary light source, wherein the light source image projecting means comprises illuminance adjusting means for changing an intensity distribution of light upon the light entrance surface of the secondary light source forming means, to correct an illuminance distribution, to be formed on the image plane asymmetrically with respect to a center due to a variation in the light intensity distribution of the secondary light source, into an illuminance distribution symmetric with respect to the center, and also for changing the position of the light source image with respect to a direction of an optical axis, so as to reduce a decrease in a quantity of light from the secondary light source caused by a variation in the light intensity distribution of the secondary light source.
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Specification