Molding diffractive optical elements
First Claim
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1. A method of fabricating a diffractive optical element comprising the steps of:
- fabricating a negative of a desired diffraction pattern having multiple discrete levels on a molding surface of a master element using photolithography, including repeating said photolithography step in order to form said multiple discrete levels;
assembling the master element with the molding surface as a portion of a mold;
injecting a molding composition into the mold and against the molding surface of the master element to injection mold a diffractive optical element, whereby the optical element has the desired diffraction pattern on its surface; and
compensating for thermal mismatch between the master element and the mold.
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Abstract
A method of fabricating a diffractive optical element includes the steps of: etching a negative of a desired multi-level diffraction pattern onto a molding surface of a quartz master element using photolithography, assembling the master element as a portion of a mold, and injecting a plastic molding composition into the mold and against the molding surface of the master element to injection mold a diffractive optical element, whereby the optical element has the desired diffraction pattern on its surface. The diffraction pattern is preferably formed on the quartz master using VLSI photolithography.
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Citations
25 Claims
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1. A method of fabricating a diffractive optical element comprising the steps of:
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fabricating a negative of a desired diffraction pattern having multiple discrete levels on a molding surface of a master element using photolithography, including repeating said photolithography step in order to form said multiple discrete levels; assembling the master element with the molding surface as a portion of a mold; injecting a molding composition into the mold and against the molding surface of the master element to injection mold a diffractive optical element, whereby the optical element has the desired diffraction pattern on its surface; and compensating for thermal mismatch between the master element and the mold. - View Dependent Claims (2, 3, 16, 22)
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4. A method of fabricating diffractive optical elements comprising the steps of:
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providing a first master element with a mold surface configured with the negative of a desired diffractive pattern and an obverse surface; providing a second master element with a mold surface configured with the negative of a desired diffractive pattern or refractive shape and an obverse surface; aligning the master elements so that their respective mold surfaces face each other in an injection molding machine; injecting suitable substrate material into the injection molding machine to form an injection molded diffractive optical element having a diffraction pattern on one side and a diffraction pattern or refractive shape on the other side, whereby a diffractive optical element or a hybrid diffractive/refractive element can be produced having the characteristics of low cost and high performance; and compensating for thermal mismatch between the master elements and adjacent portions of the injection molding machine. - View Dependent Claims (5, 6, 7, 8, 9, 10, 17, 18, 19, 20)
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11. A method of fabricating a diffractive optical element comprising the steps of:
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assembling a master element with the negative of a desired diffraction pattern on a molding surface as a portion of a mold, the diffraction pattern being a multiple discrete level diffraction pattern; injecting a molding composition into the mold and against the molding surface of the master element to injection mold a diffractive optical element, whereby the optical element has the desired diffraction pattern on its surface; and compensating for thermal mismatch between the master element and adjacent portions of the mold. - View Dependent Claims (12, 13, 14, 21, 23, 24)
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15. A method of fabricating a diffractive optical element comprising the steps of:
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etching a negative of a desired multiple discrete level diffraction pattern onto a molding surface of a quartz master element using photolithography; assembling the master element as a portion of a mold; injecting a plastic molding composition into the mold and against the molding surface of the master element to injection mold a diffractive optical element, whereby the optical element has the desired diffraction pattern on its surface; and compensating for thermal mismatch between the master element and adjacent portions of the mold. - View Dependent Claims (25)
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Specification