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Rotary speed sensor

  • US 5,728,936 A
  • Filed: 08/15/1996
  • Issued: 03/17/1998
  • Est. Priority Date: 08/16/1995
  • Status: Expired due to Term
First Claim
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1. A rotary speed sensor, comprising:

  • at least one oscillator (1) and a substrate (21), wherein the oscillator can be excited to perform oscillations relative to the substrate in a first direction (X direction) and, upon a rotation, can be deflected by incident Coriolis forces in a second direction (Y direction) that is perpendicular to the first direction;

    at least one elastic element (2) coupling the oscillator to at least one detection element (3), wherein the elastic element (2) has a low spring constant in the first direction (X) and a high spring constant in the second direction (Y); and

    at least two deflection springs (9) anchoring the at least one detection element (3) to said substrate (21), wherein the deflection springs (9) have a high spring constant in the first direction (X) and a low spring constant in the second direction (Y).

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