Micro mechanical component and production process thereof

• US 5,729,074 A
• Filed: 03/20/1995
• Issued: 03/17/1998
• Est. Priority Date: 03/24/1994
• Status: Expired due to Term

• Current Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Original Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Inventors: Nishibayashi, Yoshiki, Shiomi, Hiromu, Shikata, Shin-ichi
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US08/407,155
• Time in Patent Office: 1,093 Days
• Field of Search: 324/686, 310/309
• US Class Current: 310/309
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2201/034 Electrical rotating micromachines
• CPC Class Codes: B81B 2201/035 Microgears
• CPC Class Codes: B81B 2201/054 Microvalves
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: B81C 1/0015 Cantilevers switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244
• CPC Class Codes: B81C 1/00682 Treatments for improving mechanical properties, not provided for in B81C1/00658 - B81C1/0065
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: G01H 11/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
• CPC Class Codes: G01H 11/06 by electric means
• CPC Class Codes: G01H 3/08 Analysing frequencies present in complex vibrations, e.g. comparing harmonics present acoustic presence detection G01V1/001
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends

Abstract

A micro mechanical component of the present invention comprises a base, and at least one drive portion supported on the base and relatively driving to the base, in which the drive portion is formed from a diamond layer. Thus, because the drive portion has excellent mechanical strength and modulus of elasticity, the operational performance can be greatly improved as a micro mechanical component processed in a fine shape, from the conventional level. Further, because the drive portion exhibits excellent device characteristics under severe circumstances, the range of applications as a micro mechanical component can be widely expanded from the conventional range.

Claims

1. A micro mechanical component comprising:

a base including a diamond layer; and

at least one drive portion supported on said diamond layer of said base and driven relative to said base, said drive portion including a diamond layer;

a thin film made of a ceramic material containing carbide and sandwiched between said diamond layer of said base and said diamond layer of said drive portion, said base and said drive portion being joined through said thin film to be integrally formed.

2. A micro mechanical component comprising:

a base including a diamond layer; and

at least one drive portion supported on said diamond layer of said base and driven relative to said base, said drive portion including a diamond layer;

a thin film made of a metal carbide and sandwiched between said diamond layer of said base and said diamond layer of said base and said diamond layer of said drive portion, said base and said drive portion being joined through said thin film to be integrally formed.

3. A micro mechanical component comprising:

a base including a first diamond layer with high resistance which has thickness not more than 1 mm;

at least one drive portion supported on said first diamond layer of said base in the form of a cantilever and driven relative to said base, said drive portion including a second diamond layer with electrically conductive property and a thickness of said second diamond layer being not more than 1 mm and;

an electrode layer located as opposed to a distal end region of a beam of said cantilever, thereby constituting an acceleration sensor for detecting a capacitance between said beam and said electrode layer as changing depending upon an external stress loaded on said base.

4. A micro mechanical component according to claim 3, wherein said drive portion is formed as a plurality of said cantilevers having mutually different beam thicknesses and beam lengths, said, base is formed as comprising a plurality of said electrode layers located as opposed to distal end regions of beams of said plurality of cantilever beams, thereby constituting a frequency analyzer for detecting capacitances between said plurality of beams and said plurality of electrode layers as respectively changing according to a frequency component in said external stress which depends upon a shape of each of said plurality of beams.