Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
First Claim
Patent Images
1. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
- a first projection optical system for forming a real-size erect image of said first object on said second object, which is telecentric at least on an image side;
a second projection optical system for forming a real-size erect image of said first object on said second object, which is telecentric at least on the image side and which is disposed next to said first projection optical system;
a first field stop for limiting an exposure region to be formed on said second object by said first projection optical system, within a certain shape; and
a second field stop for limiting an exposure region to be formed on said second object by said second projection optical system, within a certain shape;
wherein a sum of a length along said moving direction, of the first exposure region limited by said first field stop and a length along said moving direction, of the second exposure region limited by said second field stop is constant over a direction perpendicular to said moving direction.
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Abstract
There is disclosed an exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of the first object onto the second object.
143 Citations
74 Claims
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1. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
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a first projection optical system for forming a real-size erect image of said first object on said second object, which is telecentric at least on an image side; a second projection optical system for forming a real-size erect image of said first object on said second object, which is telecentric at least on the image side and which is disposed next to said first projection optical system; a first field stop for limiting an exposure region to be formed on said second object by said first projection optical system, within a certain shape; and a second field stop for limiting an exposure region to be formed on said second object by said second projection optical system, within a certain shape; wherein a sum of a length along said moving direction, of the first exposure region limited by said first field stop and a length along said moving direction, of the second exposure region limited by said second field stop is constant over a direction perpendicular to said moving direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
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a first projection optical system having unit magnification and forming an erect image of said first object onto a first exposure region on said second object, said first projection optical system is telecentric at least on an image side; and a second projection optical system having unit magnification and forming an erect image of said first object onto a second exposure region on said second object, said second projection optical system is telecentric at least on the image side; wherein said first exposure region is separated from said second exposure region in said moving direction. - View Dependent Claims (70, 71, 72, 73, 74)
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17. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
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a first projection optical system for forming a real-size erect image of said first object on said second object, which is both-side telecentric; and a second projection optical system for forming a real-size erect image of said first object on said second object, which is both-side telecentric and which is disposed next to said first projection optical system; wherein each of said first and second projection optical systems has a refractive optical system of a positive refractive power and a plane reflective surface for reflecting light from said refractive optical system back to said refractive optical system. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
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a first projection optical system for forming an erect image of said first object on said second object; and a second projection optical system for forming an erect image of said first object on said second object, which is disposed next to said first projection optical system; wherein each of said first and second projection optical systems has; a first image-forming optical system arranged so that one of two conjugate points is located on said first object; and a second image-forming optical system arranged so that one of two conjugate points is coincident with the other conjugate point of said first image-forming optical system and so that the other of said two conjugate points is located on said second object; wherein either one of said first image-forming optical system and second image-forming optical system is an Offner optical system having a concave reflective mirror and a convex reflective mirror and arranged to guide light from one conjugate point to the other conjugate point while reflecting the light by said concave reflective mirror, said convex reflective mirror, and said concave reflective mirror in the named order; and wherein the other of said first and second image-forming optical systems is a Dyson optical system having first and second reflective prisms, a lens group of a positive of a positive refractive power, and a concave reflective mirror with a concave surface to said lens group and arranged to guide light from one conjugate point to the other conjugate point via said first reflective prism, said lens group, said concave reflective mirror, said lens group, and said second reflective prism in the named order. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36)
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37. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
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a first projection optical system for forming an image of a first field region on said first object, in a first exposure region on said second object; and a second projection optical system for forming an image of a second field region on said first object, different from said first exposure region, in a second exposure region on said second object; wherein each of said first and second projection optical systems comprises; an optical system having an optical axis and at least one reflective surface coaxial with said optical axis; first light splitting means disposed in an optical path between said optical system and said first object; and second light splitting means disposed in an optical path between said optical system and said second object; wherein a light beam passing said second light splitting means is transferred in a direction traversing said optical axis to be guided to said first light splitting means. - View Dependent Claims (38, 39, 40, 41, 42, 43)
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44. In a projection optical system for forming an image of a first object on a second object, a projection optical apparatus comprising:
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an optical system having an optical axis and at least one reflective surface coaxial with said optical axis; first light splitting means disposed in an optical path between said optical system and said first object; and second light splitting means disposed in an optical path between said optical system and said second object; wherein a light beam passing said second light splitting means is transferred along a direction traversing said optical axis to be guided to said first light splitting means. - View Dependent Claims (45, 46, 47, 48, 49, 50)
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51. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
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a first reflective surface for deflecting light coming from said first object; an image-forming optical system for forming an intermediate image of said first object, based on light coming from the first reflective surface; a beam transferring member for transferring the light of from said first reflective surface and then through said image-forming optical system, along a direction traversing an optical axis of said image-forming optical system to guide the thus transferred light again to said image-forming optical system; and a second reflective surface for deflecting the light of from said beam transferring member and then through said image-forming optical system, to said second object. - View Dependent Claims (54, 55, 56, 57, 58, 59)
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52. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of said first object onto said second object, comprising:
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a first projection optical system for forming an erect image of said first object on said second object; and a second projection optical system for forming an erect image of said first object on said second object, which is disposed next to the first projection optical system; wherein each of said first and second projection optical systems comprises; a first reflective surface for deflecting light from said first object; an image-forming optical system having an optical axis and two conjugate points, said image-forming optical system being disposed so that said first reflective surface is positioned on a side of one conjugate point out of said two conjugate points, and said image-forming optical system being for forming an intermediate image of said first object, based on light coming from said first reflective surface; a beam transferring member for transferring the light of from said first reflective surface and then through said image-forming optical system, along a direction traversing the optical axis of said image-forming optical system to guide the thus transferred light again to said image-forming optical system; and a second reflective surface for deflecting the light of from said beam transferring member and then through said image-forming optical system, to said second object. - View Dependent Claims (53, 60)
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61. A projection optical apparatus comprising:
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an image-forming optical system having an optical axis and two conjugate points; a field splitting member disposed on a side of one conjugate point of said projection optical system, for splitting a field of said projection optical system; and a beam transferring member disposed on a side of the other conjugate point of said projection optical system, for transferring light passing via said field splitting member and said projection optical system in the named order, along a direction traversing said optical axis of said projection optical system. - View Dependent Claims (62)
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63. An exposure apparatus for, while moving a first object and a second object in a certain moving direction, illuminating said first object by an illumination optical system and effecting projection exposure of an image of said first object onto said second object by a projection optical system a position of which is fixed relative to said illumination optical system:
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wherein said illumination optical system comprises; a first illumination optical system for forming a first illumination region on said first object; and a second illumination optical system for forming a second illumination region different from said first illumination region on said first object; wherein said projection optical system comprises; a first projection optical system for forming an erect image of said first object illuminated by said first illumination optical system on said second object; and a second projection optical system for forming an erect image of said first object illuminated by said second illumination optical system on said second object; wherein said first illumination optical system comprises first illumination region moving means for moving the first illumination region on said first object relative to said first projection optical system; and wherein said second illumination optical system comprises second illumination region moving means for moving the second illumination region on said first object relative to said second projection optical system. - View Dependent Claims (64, 65, 66, 67, 68, 69)
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Specification