Led array fabrication process with improved unformity
First Claim
1. A method of patterning a film for fabricating an LED array, comprising:
- a. creating a photomask comprising transparent areas and opaque areas, said transparent areas and opaque areas having rounded corners;
b. coating said film with a photoresist;
c. illuminating said photoresist through said photomask;
d. developing said photoresist so that parts of said photoresist are removed according to whether or not they were illuminated; and
e. patterning said film by wet etching using remaining parts of said photoresist as an etching mask.
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Accused Products
Abstract
A method of fabricating an LED array includes (a) forming a first insulating film composed of aluminum oxide on a semiconductor substrate of a first conductive type; (b) patterning the first insulating film by photolithography to form a plurality of first windows; (c) diffusing an impurity of a second conductive type through the plurality of first windows into the first insulating film, thereby forming a plurality of diffusion regions of the second conductive type below the plurality of first windows; (d) forming a second insulating film on the first insulating film and the plurality of first windows; (e) patterning the second insulating film by photolithography to remove the second insulating film from the plurality of first windows, using an etchant that does not etch the first insulating film; (f) forming a metal film on the second insulating film and the plurality of first windows; and (g) patterning the metal film by photolithography to form a plurality of electrodes which make electrical contact with respective diffusion regions.
9 Citations
10 Claims
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1. A method of patterning a film for fabricating an LED array, comprising:
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a. creating a photomask comprising transparent areas and opaque areas, said transparent areas and opaque areas having rounded corners; b. coating said film with a photoresist; c. illuminating said photoresist through said photomask; d. developing said photoresist so that parts of said photoresist are removed according to whether or not they were illuminated; and e. patterning said film by wet etching using remaining parts of said photoresist as an etching mask. - View Dependent Claims (2, 3, 4)
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5. A method of patterning a film for fabricating an LED array, comprising:
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a. creating a photomask comprising transparent areas and opaque areas having respective corners, all corners of said transparent areas and opaque areas being formed by line segments that meet at obtuse angles; b. coating said film with a photoresist; c. illuminating said photoresist through said photomask; d. developing said photoresist so that parts of said photoresist are removed according to whether or not they were illuminated; and e. patterning said film by wet etching using remaining parts of said photoresist as an etching mask. - View Dependent Claims (6, 7, 8)
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9. A photomask for use in a photolithography step employing wet etching for fabrication of an LED array, comprising:
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transparent areas having corners; and opaque areas having corners, wherein all corners of said transparent areas and said opaque areas are rounded.
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10. A photomask for use in a photolithography step employing wet etching for fabrication of an LED array, comprising:
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transparent areas having corners; and opaque areas having corners, wherein all corners of said transparent areas and said opaque areas consist of line segments meeting at obtuse angles.
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Specification