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Inspection system and process

  • US 5,734,742 A
  • Filed: 09/15/1995
  • Issued: 03/31/1998
  • Est. Priority Date: 09/19/1994
  • Status: Expired due to Term
First Claim
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1. An inspection process for detecting a defect on an inspected surface of an object to be inspected, said inspection process comprising:

  • an image producing step of moving said inspected surface relative to an imaging area and forming a sequence of electronic pictures of the inspected surface within said imaging area; and

    an image processing step of extracting defect candidate regions from said pictures, of determining a spatial separation from a position of one candidate region extracted from a previous picture which is one of the pictures, to a position of another candidate region extracted from a subsequent picture which is one of the pictures formed after the previous picture in said image producing step, of determining whether said spatial separation is in agreement with a movement of said inspected surface relative to said imaging area, and of judging that there exists a defect in the inspected surface when said spatial separation is in agreement with said movement.

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