Polishing pad contour indicator for mechanical or chemical-mechanical planarization

• US 5,736,427 A
• Filed: 10/08/1996
• Issued: 04/07/1998
• Est. Priority Date: 10/08/1996
• Status: Expired due to Term

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Henderson, Gary O.
• Primary Examiner(s): POWELL, WILLIAM A
• Application Number:
  US08/727,021
• Time in Patent Office: 546 Days
• Field of Search: 216/38, 216/84, 216/85, 216/88, 216/89, 216/90, 216/91, 156/345 LC, 156/345 LP, 438/8, 438/14, 438/691, 438/692, 438/693, 438/747
• US Class Current: 438/14
• CPC Class Codes: B24B 37/20 Lapping pads for working plane surfaces
• CPC Class Codes: B24B 37/26 characterised by the shape of the lapping pad surface, e.g. grooved

Abstract

A contour indicator that visually indicates non-uniformities in the planarity of the planarizing surface of a polishing pad. In one embodiment of the invention, a polishing pad has a polishing body with a planarizing surface facing the wafer and a contour indicator embedded in the polishing body. The contour indicator is preferably the material of the polishing body dyed to a color or shade that is visually distinguishable from the polishing body. The contour indicator preferably has first and second sidewalls spaced apart from one another at the planarizing surface of the polishing body, and the contour indicator also has a cross-sectional shape so that the distance between the first and second sidewalls changes with increasing the depth within the pad. In operation, the distance between the first and second sidewalls of the contour indicator changes as material is removed from the planarizing surface, and the distance between the first and second sidewalls at the planarizing surface indicates the contour of the planarizing surface.

Claims

1. A polishing pad for planarizing a surface of a substrate, comprising:

a polishing body having a planarizing surface facing the substrate; and

a contour indicator embedded in the polishing body and extending across at least a portion of the polishing body, the contour indicator being visually distinguishable from the polishing body, and the contour indicator having first and second sidewalls spaced apart from one another within the polishing body to define a cross-sectional shape in which a width between the first and second sidewalls changes with respect to the depth of the pad, wherein the planarizing surface changes as the pad is conditioned and the width between the sidewalls at the planarizing surface indicates a contour of the planarizing surface of the polishing pad.

2. The polishing pad of claim 1 wherein the first and second sidewalls of the contour indicator extend to a depth within the polishing body corresponding to a useful life of the polishing pad.

3. The polishing pad of claim 1 wherein first and second sidewalls of the contour indicator are spaced apart at the planarizing surface of the polishing body and extend convergently towards one another to a depth within the polishing body.

4. The polishing pad of claim 3 wherein the cross-sectional shape of the contour indicator is triangular.

5. The polishing pad of claim 3 wherein the cross-sectional shape of the contour indicator is an equilateral triangle with a apex at a depth within the polishing body corresponding to a useful life of the polishing pad.

6. The polishing pad of claim 5 wherein an angle between one of the first and second sidewalls and the planarizing surface is between approximately 60°

and 15°

.

7. The polishing pad of claim 3 wherein the cross-sectional shape of the contour indicator is trapezoidal.

8. The polishing pad of claim 3 wherein the cross-sectional shape of the contour indicator is a symmetrical curve with an apex at a lowermost point within the polishing body, and wherein the first sidewall defines one-half of the symmetrical curve from the apex to the planarizing surface and the second sidewall defines another one-half of the symmetrical curve from the apex to the planarizing surface.

9. The polishing pad of claim 1 wherein the first and second sidewalls of the contour indicator extend divergently from the planarizing surface to a depth within the polishing body.

10. The polishing pad of claim 9 wherein the cross-sectional shape of the contour indicator is triangular.

11. The polishing pad of claim 9 wherein the cross-sectional shape of the polishing pad is trapezoidal.

12. The polishing pad of claim 9 wherein the cross-sectional shape of the polishing pad is a symmetrical curve.

13. The polishing pad of claim 1 wherein the polishing body has a circular planarizing surface and the contour indicator extends across a diameter of the polishing body.

14. The polishing pad of claim 13 wherein the polishing body has a circular planarization surface and the contour indicator extends across a plurality of diameters of the polishing body.

15. The polishing body of claim 1 wherein the polishing body has a circular planarizing surface and the contour indicator extends across a radius of the polishing body.

16. The polishing body of claim 1 wherein the polishing body has a circular planarizing surface and the contour indicator extends across a plurality of radii of the polishing body.

17. The polishing body of claim 1 wherein the polishing body and the contour indicator are the same material, the contour indicator being dyed to a color different than that of the polishing body.

18. The polishing body of claim 1 wherein the polishing body and the contour indicator are the same material, the contour indicator being dyed to a shade of color different than that of the polishing body.

19. A polishing pad for planarizing a surface of a substrate, comprising:

a polishing body having a planarizing surface facing the substrate; and

a visually distinguishable filler section embedded in the polishing body, the filler section having a top surface coplanar with a portion of the planarizing surface of the polishing body and a bottom surface extending to at least an intermediate depth within the polishing body, the top surface and the bottom surface defining a cross-sectional shape having a contour indicating dimension that changes with increasing depth within the filler section in a manner in which a shape of an exposed surface of the filler section indicates the contour of the planarizing surface.

20. The polishing body of claim 19 wherein the filler section has first and second sidewalls extending to a depth within the polishing body.

21. The polishing body of claim 20 wherein the first and second sidewalls are spaced apart at the planarizing surface of the polishing body and extend convergently to a depth within the polishing body corresponding to a useful life of the pad.

22. The polishing body of claim 20 wherein the first and second sidewalls extend divergently frown the planarizing surface to a depth within the body.

23. The polishing body of claim 19 wherein the contour indicating dimension has spaced apart parallel first and second edges along uniformly planar portions of the planarizing surface, and wherein a non-planar change of the planarizing surface produces a non-parallel orientation between the first and second edges.

31. The polishing body of claim 20 wherein the secondary section has first and second sidewalls extending to a depth within the primary section.

32. The polishing body of claim 31 wherein the first and second sidewalls are spaced apart at the planarizing surface of the primary section and extend convergently to a depth within the primary section.

33. The polishing body of claim 31 wherein the first and second sidewalls extend divergently from the planarizing surface to a depth within the primary section corresponding to a useful life of the polishing pad.

24. A polishing pad for planarizing a surface of a substrate, comprising a primary section and a secondary section embedded in the primary section, the secondary section being visually distinguishable from the primary section, and the secondary section having a contour indicating dimension of a first size at a top surface substantially coplanar with a planarizing surface of the primary section and a cross-sectional shape in which the contour indicating dimension changes with increasing depth within the pad to a second size at a plane extending through the secondary section substantially parallel the top surface at an intermediated depth, wherein an exposed surface of the secondary section at the intermediate depth in which the contour indicating dimension has a size different than the second size indicates a non-uniform contour of the planarizing surface of the polishing pad.

25. The polishing body of claim 24 wherein the secondary section has first and second sidewalls extending to a depth within the primary section.

26. The polishing body of claim 25 wherein the first and second sidewalls are spaced apart at the planarizing surface of the primary section and extend convergently to a depth within the primary section.

27. The polishing body of claim 25 wherein the first and second sidewalls extend divergently from the planarizing surface to a depth within the primary section corresponding to a useful life of the polishing pad.

28. The polishing body of claim 24 wherein the top surface has a shape in which the contour indicating dimension is defined by spaced apart parallel first and second edges along uniformly planar portions of the planarizing surface, and wherein a non-planar change of the planarizing surface produces a non-parallel orientation between the first and second edges.

29. The polishing pad of claim 24 wherein the primary section has a circular planarizing surface and the secondary section extends across a diameter of the primary section.

30. A planarizing machine for chemical-mechanical planarization of a semiconductor wafer, comprising:

a platen mounted to a support structure;

a polishing pad including a polishing body with a primary section and a secondary section embedded in the primary section, the secondary section being visually distinguishable from the primary section, and the secondary section having a top surface substantially coplanar with a planarizing surface of the primary section and a cross-sectional shape having a contour indicating dimension that changes with increasing depth within the secondary section in a manner in which a shape of an exposed surface of the secondary section indicates the contour of the planarizing surface; and

a wafer carrier to which the wafer may be mounted, the wafer carrier being positionable over the planarizing surface of the polishing pad and adapted to engage the wafer with the planarizing surface of the polishing pad, wherein at least one of the platen and the wafer carrier moves with respect to the other to impart relative motion between the wafer and the polishing pad.

34. The polishing body of claim 30 wherein the top surface has a shape in which the contour indicating dimension is defined by spaced apart parallel first and second edges along uniformly planar portions of the planarizing surface, and wherein a non-planar change of the planarizing surface produces a non-parallel orientation between the first and second edges.

35. The polishing pad of claim 30 wherein the primary section has a circular planarizing surface and the secondary section extend across a diameter of the primary section.

36. A method for detecting a contour of a planarizing surface of a polishing pad used in mechanical or chemical-mechanical planarization of a substrate, the method comprising the steps of:

providing a polishing body and a visually distinctive contour indicator embedded in the polishing body so that a top surface of the contour indicator is substantially coplanar with a planarizing surface of the polishing body and a bottom surface of the contour indicator extends to at least an intermediate depth within the polishing body, wherein the contour indicator has a cross section with a contour indicating dimension that changes with increasing depth within the pad in a manner in which a shape of an exposed surface of the contour indicator indicates the contour of the planarizing surface; and

detecting a shape of a conditioned surface of the contour indicator to determine a relative contour of the planarizing surface of the polishing pad.

37. The method of claim 36 wherein the contour indicating dimension is defined by spaced apart parallel first and second edges along uniformly planar portions of the planarizing surface, and wherein the detecting step comprises denoting a non-parallel change in orientation between the first and second edges.

38. The method of claim 36 wherein contour indicator extends to a depth within the polishing body corresponding to a useful life of the polishing pad, and wherein the method further comprises changing-out the polishing pad when the planarizing surface is below the depth of the contour indicator.

39. A method for selective conditioning of a polishing pad used in mechanical or chemical-mechanical planarization of a substrate, the method comprising the steps of:

providing a polishing body and a visually distinctive contour indicator embedded in the polishing body so that a top surface of the contour indicator is substantially coplanar with a planarizing surface of the polishing body and a bottom surface of the contour indicator extends to at least an intermediate depth within the polishing body, wherein the contour indicator has a cross section with a contour indicating dimension that changes with increasing depth within the pad in a manner in which a shape of an exposed surface of the contour indicator indicates the contour of the planarizing surface;

removing a portion of the planarizing surface from the polishing pad to bring the planarizing surface into a desired state for planarizing the substrate; and

detecting a shape of a conditioned surface of the contour indicator to determine a relative contour of the planarizing surface of the polishing pad.

40. The method of claim 39 wherein the contour indicating dimension is defined by spaced apart parallel first and second edges along uniformly planar portions of the planarizing surface, and wherein the detecting step comprises denoting a non-parallel change in orientation between the first and second edges.

41. The method of claim 40, further comprising repeating the removing step over high areas of the planarizing surface where a non-parallel changes in orientation between the first and second edges indicates the planarizing surface is relatively higher than other areas on the planarizing surface.

42. The method of claim 39 wherein contour indicator extends to a depth within the polishing body corresponding to a useful life of the polishing pad, and wherein the method further comprises changing-out the polishing pad when the planarizing surface is below the depth of the contour indicator.

43. A method for chemical-mechanical planarization of a semiconductor wafer, the method comprising the steps of:

providing a polishing pad including a polishing body and a visually distinctive contour indicator embedded in the polishing body so that a top surface of the contour indicator is substantially coplanar with a planarizing surface of the polishing body and a bottom surface of the contour indicator extends to at least an intermediate depth within the polishing body, wherein the contour indicator has a cross section with a contour indicating dimension that changes with increasing depth within the pad in a manner in which a shape of an exposed surface of the contour indicator indicates the contour of the planarizing surface;

pressing the wafer against the polishing pad; and

moving at least one of the wafer and the polishing pad with respect to the other to impart relative motion therebetween.

44. The method of claim 43 wherein the contour indicating dimension is defined by spaced apart parallel first and second edges along uniformly planar portions of the planarizing surface, and wherein the method further comprises detecting a non-parallel change in orientation between the first and second edges.

45. The method of claim 44, further comprising removing material from high areas of the planarizing surface where a non-parallel change in orientation between the first and second edges indicates the planarizing surface is relatively higher than other areas on the planarizing surface.

46. A polishing pad for planarizing a surface of a substrate, comprising:

a polishing body having a planarizing surface facing the substrate; and

a contour indicator embedded in the polishing body and extending for a length across at least a portion of the polishing body, the contour indicator being visually distinguishable from the polishing body, and the contour indicator having first and second side walls spaced apart from one another within the pad to define a cross-sectional shape in which a contour indicating dimension changes with respect to the depth of the pad, wherein the contour indicating dimension at a uniformly planar exposed surface of the contour indicator is uniform along the length of the contour indicator so that exposed edges of the first and second side walls at the exposed surface are parallel to one another.