High frequency microelectronics package

• US 5,736,783 A
• Filed: 05/14/1996
• Issued: 04/07/1998
• Est. Priority Date: 10/08/1993
• Status: Expired due to Term

• Current Assignee: StratEdge Corp (StratEdge Corp. /Management/)
• Original Assignee: StratEdge Corp (StratEdge Corp. /Management/)
• Inventors: Anderson, Paul M., Goetz, Martin, Babiarz, Joseph, Wein, Deborah S., Going, Timothy, Lindner, Alan W.
• Primary Examiner(s): Saadat, Mahshid D.
• Assistant Examiner(s): CLARK, SHEILA V
• Application Number:
  US08/645,848
• Time in Patent Office: 693 Days
• Field of Search: 257/691, 257/710, 257/700, 257/728, 257/664, 257/649, 257/703, 333/246, 333/247
• US Class Current: 257/691
• CPC Class Codes: H01L 21/67121 Apparatus for making assemblies not otherwise provided for, e.g. package constructions
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/16152 Cap comprising a cavity for hosting the device, e.g. U-shaped cap
• CPC Class Codes: H01L 2924/3011 Impedance

Abstract

A high frequency microelectronic package suitable for high-frequency microelectronic devices includes a base which is at least partially conductive and attached to an RF substrate with a cavity formed at its center. The base may be metal or ceramic with a metal layer deposited thereon. A pattern of conductive paths for providing interconnection from the inside to the outside of the package are formed on the surface of the RF substrate. These conductive patterns are designed to have a constant impedance when uncovered, regardless of the dielectric property of the material used to cover the conductive patterns. Namely, a sealing cap or a lid, made from a variety of dielectric materials, may be attached to the RF substrate by a non-conductive adhesive, such as a polymer adhesive or low temperature seal glass, to seal the package once the microelectronic device has been mounted inside.

Claims

1. A microelectronic package suitable for high-frequency electronic devices, comprising:

a base having a top and a bottom, at least a portion of each of said top and said bottom of said base being conductive;

an RF substrate having a top surface, a bottom surface, and a first cavity;

a plurality of conductive patterns deposited on said top surface of said RF substrate, each said conductive pattern having a transition segment having a predetermined constant impedance when uncovered;

first means for attaching said RF substrate to said top of said base;

a ceramic seal ring substrate having a second cavity larger than said first cavity;

second means for attaching said ceramic seal ring substrate to said ceramic circuit substrate, said second attaching means being non-conductive;

a ceramic lid attached to said ceramic seal ring substrate; and

third means for attaching said ceramic seal ring substrate to said ceramic lid;

wherein said base acts as a single ground plane and said ceramic lid is electrically isolated from said single ground plane.

2. The microelectronic package recited in claim 1 wherein the base comprises a conductive metal.

3. The microelectronic package recited in claim 1 wherein the base comprises a ceramic material and said top of said base is partially metallized.

4. The microelectronic package recited in claim 1 wherein the base comprises a polymer material and said top of said base is partially metallized.

5. The microelectronic package recited in claim 1 wherein the predetermined constant impedance is selected to match termination impedances of the high-frequency electronic devices.

6. The microelectronic package recited in claim 1, further comprising a plurality of conductive leads, each said lead electrically attached to a respective said conductive pattern deposited on said top surface of said RF substrate, wherein each said lead extends away from said package for connection to another electrical device.

7. A microelectronic package suitable for high-frequency electronic devices, comprising:

a base having a top and a bottom, at least a portion of said base being electrically conductive;

an RF substrate having a top surface, a bottom surface, and a first cavity;

a first means for attaching said bottom surface of said RF substrate to said top of said base;

a plurality of conductive patterns deposited on said top surface of said RF substrate, each said conductive pattern having a transition segment having a predetermined constant impedance when uncovered;

a sealing cap having a chamber, said chamber being larger than said first cavity;

a second means for attaching said sealing cap to said RF substrate, said second attaching means being non-conductive;

wherein said base acts as a single ground plane and said sealing cap is electrically isolated from said single ground plane.

8. The microelectronic package recited in claim 7 wherein the base comprises a conductive metal.

9. The microelectronic package recited in claim 7 wherein the base comprises a ceramic material and said top of said base is partially metallized.

10. The microelectronic package recited in claim 7 wherein the base comprises a polymer material and said top of said base is partially metallized.

11. The microelectronic package recited in claim 7 wherein the sealing cap is formed such that the plurality of conductive patterns deposited on said top surface of the RF substrate are partially exposed.

12. The microelectronic package recited in claim 7, further comprising a plurality of conductive leads, each said lead electrically attached to a respective said conductive pattern deposited on said top surface of said RF substrate, wherein each said lead extends away from said package for connection to another electrical device.

13. The microelectronic package recited in claim 7 wherein the sealing cap is made of a ceramic material.

14. The microelectronic package recited in claim 7 wherein the sealing cap is made of a plastic material.

15. The microelectronic package recited in claim 7 wherein the RF substrate is made of a plastic material.

16. The microelectronic package recited in claim 15, wherein said plastic material is filled.

17. The microelectronic package recited in claim 7, further comprising a plurality of conductive leads, each said lead electrically attached to a respective said conductive pattern deposited on a surface of said RF substrate, wherein each said lead extends away from said package for connection to another electrical device.

18. The microelectronic package recited in claim 7 wherein the predetermined constant impedance is selected to match termination impedances of the high-frequency electronic devices.

19. In a microelectronic package suitable for high-frequency electronic devices, said package comprising a base having a top and an bottom, at least a portion of each of said top and said bottom of said base being conductive, an RF substrate having a top surface, a bottom surface, and a first cavity, a plurality of conductive patterns deposited on said top surface of said RF substrate a first means for attaching said RF substrate to said top of said base, a ceramic seal ring substrate having a second cavity larger than said first cavity, a second means for attaching said ceramic seal ring substrate to said ceramic circuit substrate, said second attaching means being non-conductive, a ceramic lid attached to said ceramic seal ring substrate;

and a third means for attaching said ceramic seal ring substrate to said ceramic lid, wherein said base acts as a single ground plane and said ceramic lid is electrically isolated from said single ground plane, the improvement comprising;

each said conductive pattern having a transition segment including a feedthrough where said ceramic seal ring contacts said conductive pattern, said transition segment having a predetermined constant impedance matched to an impedance of at least one of a high frequency integrated circuit disposed within said package and a high frequency device disposed external to the package.

20. In a microelectronic package suitable for high-frequency electronic devices, said package comprising a base having a top and a bottom, at least a portion of said base being electrically conductive, an RF substrate having a top surface, a bottom surface, and a first cavity, a first means for attaching said bottom surface of said RF substrate to said top of said base, a plurality of conductive patterns deposited on said top surface of said RF substrate, a sealing cap having a chamber, said chamber being larger than said first cavity, a second means for attaching said sealing cap to said RF substrate, said second attaching means being non-conductive, wherein said base acts as a single ground plane and said sealing cap is electrically isolated from said single ground plane, the improvement comprising:

each said conductive pattern having a transition segment including a feedthrough where said sealing cap contacts said conductive pattern, said transition segment having a predetermined constant impedance matched to an impedance of at least one of a high frequency integrated circuit disposed within said package and a high frequency device disposed external to the package.