Liquid crystal display device having storage capacitors of increased capacitance and fabrication method therefor
First Claim
1. A method for forming a storage capacitor in a liquid crystal display (LCD) device, said device having a pixel electrode situated on a protective layer, comprising the steps of:
- first forming a first capacitor electrode upon a substrate;
second forming, in sequence, an insulating layer, an amorphous silicon layer and the protective layer above said first capacitor electrode, said amorphous silicon layer being an etch stop layer;
etching said protective and amorphous silicon layers so as to form etched layers; and
third forming a conductive layer, over said etched layers, as a second capacitor electrode so as to form the storage capacitor and connecting the second capacitor electrode to the pixel electrode.
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Accused Products
Abstract
A liquid crystal display (LCD) device includes: a plurality of gate lines and a plurality of data lines arranged in the form of a matrix; a plurality of transistors each having a gate, a source and a drain, and each disposed at an intersecting point of the lines; a plurality of pixel electrodes connected to the drain electrodes of the respective transistors; and a plurality of capacitors formed on the pixel electrodes. The capacitor includes a capacitor electrode, a gate insulating layer, a semiconductor layer and a protective insulating layer. The semiconductor layer of the capacitor is composed of the same material as that of a semiconductor region of the transistor. An etch stop layer is used for protecting a gate insulating layer during etching a protective insulating layer situated above the gate insulating layer. For the etch stop layer, an amorphous silicon layer or a metal layer are used. By virtue of using the etch stop layer, the capacitor electrodes can be spaced closer together than in conventional LCD devices, thereby advantageously resulting in increased storage capacitance and improved displayed image quality.
107 Citations
24 Claims
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1. A method for forming a storage capacitor in a liquid crystal display (LCD) device, said device having a pixel electrode situated on a protective layer, comprising the steps of:
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first forming a first capacitor electrode upon a substrate; second forming, in sequence, an insulating layer, an amorphous silicon layer and the protective layer above said first capacitor electrode, said amorphous silicon layer being an etch stop layer; etching said protective and amorphous silicon layers so as to form etched layers; and third forming a conductive layer, over said etched layers, as a second capacitor electrode so as to form the storage capacitor and connecting the second capacitor electrode to the pixel electrode. - View Dependent Claims (2, 3, 4)
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5. A method for forming a storage capacitor in a liquid crystal display (LCD) device, said device having a pixel electrode situated on a protective layer, comprising the steps of:
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forming a first capacitor electrode upon a substrate; forming, in sequence, an insulating layer, an amorphous silicon layer and the protective layer above said first capacitor electrode;
said amorphous silicon layer being an etch stop layer;etching said protective layer so as to form an etched layer; and forming a conductive layer, over said etched layer, as a second capacitor electrode so as to form the storage capacitor and connecting the second capacitor electrode to the pixel electrode. - View Dependent Claims (6, 7, 8)
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9. A method for forming a storage capacitor in a liquid crystal display (LCD) device, said device having a pixel electrode situated on a protective layer, comprising the steps of:
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first forming a first capacitor electrode upon a substrate; second forming, in sequence, an insulating layer, a first conductive layer as an etch stop layer, and the protective layer above said first capacitor electrode; etching said protective layer so as to form an etched layer; and third forming a second conductive layer, over said etched layer and connected to the first conductive layer, as a second capacitor electrode so as to form the storage capacitor and connecting said second capacitor electrode to the pixel electrode. - View Dependent Claims (10, 11, 12)
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13. A liquid crystal display (LCD) device having a storage capacitor connected to a pixel electrode formed on a protective layer, the storage capacitor having a first electrode situated on a substrate, the capacitor comprising:
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an insulating layer, an amorphous silicon layer and the protective layer which are successively formed above said first capacitor electrode, wherein the amorphous silicon layer is an etch stop layer; the protective and amorphous silicon layers are etched so as to form etched layers; and a conductive layer is formed, over the etched layers, as a second capacitor electrode of the storage capacitor and connected to the pixel electrode. - View Dependent Claims (14, 15, 16)
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17. A liquid crystal display (LCD) device having a storage capacitor connected to a pixel electrode formed on a protective layer, the storage capacitor having a first electrode situated on a substrate, the capacitor comprising:
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an insulating layer, an amorphous silicon layer and the protective layer which are successively formed above said first capacitor electrode, wherein the amorphous silicon layer is an etch stop layer; the protective layer is etched so as to form an etched layer; and a conductive layer is formed, over the etched layer, as a second capacitor electrode of the storage capacitor and connected to the pixel electrode. - View Dependent Claims (18, 19, 20)
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21. A liquid crystal display (LCD) device having a storage capacitor connected to a pixel electrode formed on a protective layer, the storage capacitor having a first electrode situated on a substrate, the capacitor comprising:
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an insulating layer, a first conductive layer as an etch stop layer, and the protective layer successively formed above said first capacitor electrode; the protective layer being etched so as to form an etched layer; and a second conductive layer being formed, over the etched layer, as a second capacitor electrode of the storage capacitor and connected to the pixel electrode. - View Dependent Claims (22, 23, 24)
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Specification