×

Substrate handling and processing system for flat panel displays

  • US 5,738,767 A
  • Filed: 11/23/1994
  • Issued: 04/14/1998
  • Est. Priority Date: 01/11/1994
  • Status: Expired due to Term
First Claim
Patent Images

1. A vacuum processing system comprising:

  • a load lock for loading substrates into the system;

    a plurality of processing chambers for processing said substrates;

    an unload lock for unloading said substrates from the system;

    a central buffer chamber coupled to said load lock, to each of said processing chambers and to said unload lock through gate valves, said buffer chamber containing a turntable that is rotatable about a vertical axis;

    means for vacuum pumping said load lock, said processing chambers, said unload lock and said central buffer chamber;

    rotation means for rotating said turntable about said vertical axis;

    two or more substrate carriers, each of which supports a substrate in a vertical orientation as it is transported within the system and each of which supports the substrate in a vertical orientation within a selected one of said processing chambers independently of said turntable and said buffer chamber as the substrate is processed;

    transport means for transporting said substrate carriers horizontally to and between said load lock and said turntable, to and between said turntable and said selected one of said processing chambers, and to and between said turntable and said unload lock; and

    control means for controlling said rotation means and said transport means such that each of said substrate carriers follows a selected path through said system, whereby two or more substrates can be transported through the system and processed concurrently and independently.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×