Method and device for detecting the end point of plasma process

• US 5,739,051 A
• Filed: 09/18/1996
• Issued: 04/14/1998
• Est. Priority Date: 03/04/1993
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Saito, Susumu
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): ALEJANDRO MULERO, LUZ L
• Application Number:
  US08/715,489
• Time in Patent Office: 573 Days
• Field of Search: 156/626.1, 156/643.1, 156/345, 216/60, 216/67, 204/298.32, 204/298.03, 118/723 R, 118/723 E, 438/7, 438/8, 438/9, 438/16, 438/101, 438/102
• US Class Current: 438/16
• CPC Class Codes: G01N 21/73 using plasma burners or torches
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01J 37/3299 Feedback systems

Abstract

Method and device for detecting the end point of a plasma process, the method and device being capable of making it unnecessary to set a threshold every process or every processed object and also capable of correctly detecting the end point of the plasma process even if process conditions are changed. The method and device can be therefore used for more purposes. According to the end point detecting method realized by the end point detecting device, the emission spectrum of an active species having a specific wavelength and caused when a semiconductor wafer W is processed with plasma P is detected by a photodetector and the end point of the plasma process is detected on the basis of light strength changes of the emission spectrum. More specifically, an average value m and dispersed ones σ² of light strengths I are calculated for a predetermined time period T₁ at the initial process stage by a first arithmetical unit and the differences of light strengths I relative to the average value m are calculated after the lapse of the predetermined time period T₁ by a second arithmetical unit. These differences are compared with the dispersed values σ² by a comparator and the time at which values thus obtained exceed a predetermined reference value is decided to be the end point of the plasma process.

Claims

1. A method of detecting the end point of a plasma process comprising the steps of:

sequentially detecting an emission spectrum of an active species which has a specific wavelength for an initial time period by photodetector means, when an object is processed with a plasma;

obtaining a differential value utilizing a formula such that the differential value represents a relationship between light strengths and time on a basis of information on the emission spectrum of the active species for the initial time period;

obtaining light strengths and corresponding differential values, in a graph wherein the light strengths and the differential values are plotted in X-Y coordinates in which the abscissa shows the light strength and the ordinate shows the differential value, by using information on the emission spectrum of the active species during the process performed after a lapse of the initial time period; and

deciding a time at which a position of an obtained light strength and its differential value has separated from the origin of the graph by a distance which exceeds a reference value to be the end point of the plasma process.

2. The end point detecting method according to claim 1, wherein a point at which a position of an obtained light strength and its differential value in the graph intersect the abscissa is set to be a new origin, and a time at which a distance from the position of the obtained light strength and its differential value to the new origin in the graph exceeds the reference value is decided to be the end point of the plasma process.

3. The end point detecting method according to claim 1, wherein a square root of a sum of squares of the dispersed value of the light strengths for an initial time period and the dispersed value of the differential value is the distance to the origin of the graph.

4. A method of detecting the end point of a plasma process comprising the steps of:

sequentially detecting an emission spectrum of an active species which has a specific wavelength for an initial time period by photodetector means, when an object is processed with a plasma;

obtaining a differential value utilizing a formula such that the differential value represents a relationship between light strengths and time on a basis of information on the emission spectrum of the active species for the initial time period;

obtaining light strengths and corresponding differential values, in a graph wherein the light strengths and the differential values are plotted in X-Y coordinates in which the abscissa shows the light strength and the ordinate shows the differential value, by using information on the emission spectrum of the active species during the process performed after a lapse of the initial time period; and

deciding an end point of the plasma process as a time at which the distance from the abscissa to the obtained light strengths and differential values are smaller than a reference value after a time at which the obtained light strengths and differential values have separated from the origin of the graph and begin approaching the abscissa.

5. A method of detecting the end point of a plasma process comprising the steps of:

sequentially detecting an emission spectrum of an active species which has a specific wavelength by photodetector means, when an object is processed with a plasma;

obtaining a differential value utilizing a formula such that a differential value represents a relationship between light strengths and time, based on information of detected emission spectrum of the active species for an initial time period;

obtaining an average value and a dispersed value for each of the light strengths and the differential values, for the initial time period, and setting a reference area from the dispersed values of the light strengths and the differential value;

obtaining light strengths and corresponding differential values, in a graph in which the light strengths and differential values are plotted in X-Y coordinates in which the abscissa shows the light strength and the ordinate shows the differential value, by using information on the emission spectrum of the active species in the process performed after a lapse of the initial time period; and

deciding a time at which a position of an obtained light strength and its differential value in the graph is outside of the reference area to be the end point of the plasma process.

6. The end point detecting method according to claim 5, further including setting a point at which a position of obtained light strengths and differential values in the graph again intersects the abscissa of the graph as a new origin, and deciding a time at which a distance from a position of obtained light strengths and differential values to a new origin in the graph exceeds a reference value to be the end point of the plasma process.

7. The end point detecting method according to claim 5, wherein a square root of a sum of squares of the dispersed value and the differential value of the light strengths for the initial time period is the distance to the origin of the graph.

8. A method of detecting the end point of a plasma process comprising the steps of:

sequentially detecting an emission spectrum of an active species which has a specific wavelength by photodetector means, when an object is processed with a plasma;

obtaining a differential value utilizing a formula such that the differential value represents a relationship between light strengths and time, based on information of detected emission spectrum of the active species for an initial time period;

obtaining an average value and a dispersed value for each of the light strengths for the initial time period and the differential value, and setting a reference area from the dispersed values of the light strengths and the differential value;

obtaining light strengths and corresponding differential values, in a graph in which the light strengths and differential values are plotted in X-Y coordinates in which the abscissa shows the light strength and the ordinate shows the differential value, by using information on the emission spectrum of the active species in the process performed after a lapse of the initial time period; and

deciding an end point of the plasma process as a time in which a distance from the abscissa to the obtained light strengths and differential values are smaller than a reference value after a time at which the obtained light strengths and differential values have separated from the origin of the graph and begin approaching the abscissa.

9. An apparatus for detecting the end point of a plasma process comprising:

emission spectrum detecting means for detecting an emission spectrum of an active species generated in a plasma, which has a specific wavelengths when a process using the plasma is performed for an object to be processed;

calculating means for calculating a differential value utilizing a formula such that the differential value represents a relationship between a light strength and time, on a basis of information on the emission spectrum of the active species for an initial time period;

coordinates converter means for making a graph in which the light strengths and corresponding differential values are plotted in X-Y coordinates in which the abscissa shows the light strength and the ordinate shows the differential value, based on information obtained from the calculating means; and

decision means for deciding a time at which a distance from the position of the obtained light strengths and its differential value in the graph to an origin of the graph exceeds a reference value to be an end point of the plasma process.

10. The end point detecting apparatus according to claim 9, further comprising:

second decision means for deciding time at which a position of obtained light strengths and differential values in the graph is separated from the origin of the graph and begins approaching the abscissa and in which a distance from the abscissa is smaller than a reference value to be a second end point of the plasma process.

11. The end point detecting apparatus according to claim 9, wherein the calculating means calculates an average value and a dispersed value for each of the light strengths for the initial time period and its differential values, and sets a reference area from the dispersed values of the light strengths and the differential values.