Non-linear hinge for micro-mechanical device

• US 5,739,941 A
• Filed: 07/20/1995
• Issued: 04/14/1998
• Est. Priority Date: 07/20/1995
• Status: Expired due to Fees

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Webb, Douglas A., Knipe, Richard L.
• Primary Examiner(s): SPRUILL, ROBERT
• Assistant Examiner(s): Gurley, Donald M.
• Application Number:
  US08/504,861
• Time in Patent Office: 999 Days
• Field of Search: 16/308, 16/225, 16/227, 350/269, 350/320, 359/224, 359/225, 359/290
• US Class Current: 359/224.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A non-linear torsion hinge (12, 22) for a micro-mechanical device (10, 20) having a hinged movable element (11, 21). Each hinge (22) is comprised of two hinge strips (22a) spaced apart in the same plane, such that the axis of rotation of at least one of the hinge strips (22a) is different from the axis of rotation of the movable element (21). As a result, the hinge strip (22a) must elongate as it twists, thereby providing a greater restoring torque.

Claims

1. An improved micro-mechanical device having at least one rotating element that is supported by a hinge, such that said rotating element may rotate about an axis of rotation, wherein said improvement comprises:

said hinge being comprised of at least two hinge strips, said hinge strips being parallel and laterally spaced apart in the same plane, such that the axis of rotation of at least one of said hinge strips is parallel to, but offset from, the axis of rotation of said rotating element, and wherein said hinges strips have dimensions of width relative to length such that edges of said hinge undergo a non-linear elongation strain when said rotating element rotates.

2. The improved micro-mechanical device of claim 1, wherein said hinge strips are substantially parallel.

3. The improved micro-mechanical device of claim 1, wherein said hinge strips each have a width of approximately 1 micrometer.

4. The improved micro-mechanical device of claim 1, wherein said hinge strips are spaced approximately 1 micrometer apart.

5. The improved micro-mechanical device of claim 1, wherein said hinge strips each have a ratio of width to length of approximately 1:

4.

6. An improved micro-mechanical device having at least one rotating element that is supported by a hinge, such that said rotating element may rotate about an axis of rotation, wherein said improvement comprises:

said hinge being comprised of at least two hinge strips, said hinge strips being spaced apart in the same plane at one end of said strips which connect to said element, and connected together at the opposite end of said hinge strips, such that said hinge strips substantially form a V-shape and wherein said hinge strips have dimensions of width relative to length such that edges of said hinge undergo a non-linear elongation strain when said rotating element rotates.

7. A digital micro-mirror device (DMD), comprising:

a substrate upon which the following elements are fabricated;

at least one landing electrode, a support post, at least one hinge extending from said support post, a mirror attached to said hinge, wherein said at least one hinge is deformable so as to permit said mirror to move toward said landing electrode upon being subjected to an applied force; and

said hinge being comprised of at least two hinge strips, said hinge strips being parallel and laterally spaced apart in the same plane, such that an axis of rotation of at least one of said hinge strips is parallel to, but offset from, an axis of rotation of said mirror, and wherein said hinge strips have dimensions of width relative to length such that edges of said hinge undergo a non-linear elongation strain when said mirror rotates.

8. The device of claim 7, wherein said hinge strips are substantially parallel.

9. The device of claim 7, wherein said hinge strips each have a width of approximately 1 micrometer.

10. The device of claim 7, wherein said hinge strips are spaced approximately 1 micrometer apart.

11. The device of claim 7, wherein said hinge strips each have a ratio of width to length of approximately 1:

4.