Electrically tunable optical filter utilizing a deformable multi-layer mirror
First Claim
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1. An electrically tunable optical filter comprising:
- a laterally-extending base comprising an optically-transparent semiconductor material;
a first laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air;
a second laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air;
said first laterally-extending mirror being fixedly mounted to said laterally-extending base;
said second laterally-extending mirror being movably mounted to said laterally-extending base such that an air gap extends between said first laterally-extending mirror and said second laterally-extending mirror;
a first electrode electrically connected to said first laterally-extending mirror; and
a second electrode electrically connected to said second laterally-extending mirror;
whereby when a voltage difference is applied across said first and second electrodes, the electrically tunable optical filter will change its spectral response.
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Abstract
An electrically tunable optical filter utilizing a deformable multi-layer mirror construction.
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Citations
6 Claims
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1. An electrically tunable optical filter comprising:
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a laterally-extending base comprising an optically-transparent semiconductor material; a first laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air; a second laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air; said first laterally-extending mirror being fixedly mounted to said laterally-extending base; said second laterally-extending mirror being movably mounted to said laterally-extending base such that an air gap extends between said first laterally-extending mirror and said second laterally-extending mirror; a first electrode electrically connected to said first laterally-extending mirror; and a second electrode electrically connected to said second laterally-extending mirror; whereby when a voltage difference is applied across said first and second electrodes, the electrically tunable optical filter will change its spectral response. - View Dependent Claims (2, 3)
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4. An electrically tunable optical filter comprising:
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a laterally-extending base comprising an optically-transparent semiconductor material; a first laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) an oxide material; a second laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) an oxide material; said first laterally-extending mirror being fixedly mounted to said laterally-extending base; said second laterally-extending mirror being movably mounted to said laterally-extending base such that an air gap extends between said first laterally-extending mirror and said second laterally-extending mirror; a first electrode electrically connected to said first laterally-extending mirror; and a second electrode electrically connected to said second laterally-extending mirror; whereby when a voltage difference is applied across said first and second electrodes, the electrically tunable optical filter will change its spectral response. - View Dependent Claims (5, 6)
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Specification