Semiconductor laser
First Claim
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1. A semiconductor laser exhibiting an oscillation wavelength of 450 nm or less and comprising:
- a substrate;
a lower clad layer formed on or above said substrate and mainly composed of a III-V Group compound semiconductor;
an active layer formed directly on said lower clad layer and mainly composed of a III-V Group compound semiconductor; and
an upper p-type clad layer formed directly on said active layer and mainly composed of a III-V Group compound semiconductor;
said upper p-type clad layer containing Mg, Si and one or more impurities for compensating residual donors.
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Abstract
A semiconductor laser exhibiting an oscillation wavelength of 450 nm or less and comprising a substrate, a lower clad layer formed on or above the substrate and mainly composed of a III-V Group compound semiconductor, an active layer formed directly on the lower clad layer and mainly composed of a III-V Group compound semiconductor, and an upper p-type clad layer formed directly on the active layer and mainly composed of a III-V Group compound semiconductor. This semiconductor laser is characterized in that the upper p-type clad layer contains Mg, Si and at least one impurities for compensating residual donors.
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Citations
22 Claims
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1. A semiconductor laser exhibiting an oscillation wavelength of 450 nm or less and comprising:
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a substrate; a lower clad layer formed on or above said substrate and mainly composed of a III-V Group compound semiconductor; an active layer formed directly on said lower clad layer and mainly composed of a III-V Group compound semiconductor; and an upper p-type clad layer formed directly on said active layer and mainly composed of a III-V Group compound semiconductor; said upper p-type clad layer containing Mg, Si and one or more impurities for compensating residual donors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A semiconductor laser exhibiting an oscillation wavelength of 450 nm or less and comprising:
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a substrate; a lower clad layer formed on or above said substrate and mainly composed of a III-V Group compound semiconductor; an active layer formed directly on said lower clad layer and mainly composed of a III-V Group compound semiconductor; and an upper p-type clad layer formed directly on said active layer and mainly composed of a III-V Group compound semiconductor; said upper p-type clad layer containing Mg and one or more acceptor impurities for Compensating residual donors. - View Dependent Claims (10)
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11. A III-V Group compound semiconductor light-emitting element having a p-n junction and being capable of emitting light through a recombination of electrons and holes;
a p-type layer containing Mg and C as an acceptor impurity for compensating residual donors, the concentration of said carbon atom being 8×
1017 /cm3 or more.- View Dependent Claims (12, 13, 14, 15)
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16. A semiconductor laser comprising:
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a substrate comprising a p-type compound semiconductor; a p-type GaN-based semiconductor layer formed on or above said p-type compound semiconductor substrate; a light-emitting layer formed directly on said p-type GaN-based semiconductor layer and composed of a GaN-based semiconductor; and an n-type GaN-based semiconductor layer formed directly on said light-emitting layer; said p-type GaN-based semiconductor layer containing Mg, Si and one or more impurities for compensating residual donors. - View Dependent Claims (17, 18, 19, 20, 21, 22)
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Specification