Continuously rotatable multiple link robot arm mechanism

• US 5,741,113 A
• Filed: 07/10/1995
• Issued: 04/21/1998
• Est. Priority Date: 07/10/1995
• Status: Expired due to Fees

• Current Assignee: Kensington Laboratories, LLC
• Original Assignee: Kensington Laboratories, Inc. (MKS Instruments Incorporated)
• Inventors: Filipski, Paul S., Bacchi, Paul
• Primary Examiner(s): Merritt, Karen B.
• Assistant Examiner(s): MORSE, GREGORY ALLAN
• Application Number:
  US08/499,963
• Time in Patent Office: 1,016 Days
• Field of Search: 414/935, 414/744.1, 414/744.4, 414/744.5, 414/744.6, 901/17
• US Class Current: 414/744.5
• CPC Class Codes: B25J 9/042 comprising an articulated arm
• CPC Class Codes: B25J 9/104 with cables, chains or ribbons
• CPC Class Codes: B25J 9/106 with articulated links
• CPC Class Codes: Y10S 414/135 Associated with semiconductor wafer handling

Abstract

A multiple link robot arm mechanism uses first and second motors capable of synchronized operation to permit movement of the robot arm hand along a curvilinear path as the extension of the hand changes. A motor controller controls the first and second motors in two preferred operational states to enable the robot arm mechanism to perform two principal motion sequences. The first operational state maintains the position of the first motor and rotates the second motor so that the mechanical linkage causes linear displacement (i.e., extension or retraction) of the hand. The second operational state rotates the first and second motors so that a mechanical linkage causes angular displacement of the hand about a shoulder axis. The second operational state can provide an indefinite number of travel paths for the hand, depending on coordination of the control of the first and second motors. An alternative preferred embodiment of the robot arm mechanism substitutes for the hand an end effector structure that has two oppositely extending hands and rotates about a wrist axis. All rotary joints of either embodiment are preferably fitted with rotary fluid slip rings or multiple fluid-passageway spools that permit continuous rotation about any of three axes.

Claims

1. A robot arm mechanism, comprising:

an upper arm supporting a forearm and a hand and operable for rotation about a shoulder axis;

the forearm having a first end that is supported by the upper arm for rotation about an elbow axis and having a second end that supports the hand for rotation about a wrist axis;

the upper arm, forearm, and hand constituting link elements through which a fluid pressure conduit passes to deliver vacuum pressure to releasably secure a specimen to the hand; and

the shoulder axis, elbow axis, and wrist axis defining rotary joints through which the fluid pressure conduit passes;

a rotary fluid slip ring fitted into least one of the rotary joints, the rotary fluid slip ring having a central aperture through which vacuum pressure is delivered and having first and second surfaces that form a vacuum pressure seal at an interface between the link elements forming the rotary joint into which the slip ring is fitted;

a first motor for rotatably positioning the forearm about the elbow axis;

a second motor for rotatably positioning the upper arm about the shoulder axis;

a mechanical linkage operatively connecting the upper arm and the forearm, the mechanical linkage forming an active drive link between the first motor and the forearm to cause the forearm to rotate about the elbow axis in response to operation of the first motor and a passive drive link between the forearm and the hand to cause the hand to rotate about the wrist axis in response to rotation of the forearm about the elbow axis; and

a controller coordinating the operation of the first and second motors in first and second states, the first state characterized by operating the second motor and holding stationary the first motor so that the mechanical linkage causes linear displacement of the hand and the second state characterized by operating the first and second motors so that the mechanical linkage causes angular displacement of the hand about the shoulder axis.

2. The robot arm mechanism of claim 1 in which the controller in the second state coordinates the operation of the first and second motors to provide essentially equal and opposite offsetting angular displacements of the upper arm about the shoulder axis and the forearm about the elbow axis that cause angular displacement of the hand about the shoulder axis but essentially no angular displacement of the hand about the wrist axis.

3. The robot arm mechanism of claim 2 in which the first and second motors rotate in the same direction.

4. The robot arm mechanism of claim 1 in which the controller in the first state causes a change in the linear extension of the hand by actuating the second motor to rotate the upper arm and thereby impart rotational motion to the forearm about the elbow axis and to the hand about the wrist axis to effect a straight line movement of the hand and in the second state causes angular displacement of the hand about the shoulder axis by actuating the second motor to rotate the upper arm and the first motor to rotate the forearm about the elbow axis so that the straight line movement imparted to the hand by the rotation of the upper arm is at least partly offset by straight line movement imparted to the hand by the rotation of the forearm.

5. The robot arm mechanism of claim 4 in which the first and second motors are coordinated to move in equal amounts so that the linear motions imparted to the hand by the rotations of the upper arm and the forearm are essentially completely offset.

6. The robot arm mechanism of claim 1 in which the controller in the second state coordinates the operation of the first and second motors to provide dissimilar angular displacements of the upper arm about the shoulder axis and of the forearm about the elbow axis that cause angular displacements of the hand about the shoulder and wrist axes and thereby describe a nonradial, straight line path of travel for the hand.

7. The robot arm mechanism of claim 1 in which the hand comprises one of two oppositely extending hands of an end effector structure that is operable for rotation about the wrist axis.

8. The robot arm mechanism of claim 1 in which the first motor includes a first spindle and the second motor includes a second spindle and in which the first and second motors are positioned in concentric relation such that their respective first and second spindles rotate about a common axis.

9. The robot arm mechanism of claim 8 in which the common axis constitutes the shoulder axis.

10. The robot arm mechanism of claim 8 in which the hand comprises one of two oppositely extending hands of an end effector structure that is operable for rotation about the wrist axis.

11. The robot arm mechanism of claim 1 in which the second motor includes a second spindle and is positioned so that the second spindle rotates about the shoulder axis, the second spindle being directly mechanically connected to the upper arm.

12. A robot arm mechanism, comprising:

an upper arm supporting a forearm and a hand and operable for rotation about a shoulder axis, the forearm having a first end that is supported by the upper arm for rotation about an elbow axis and having a second end that supports the hand for rotation about a wrist axis, and the shoulder axis, elbow axis, and wrist axis defining rotary joints for, respectively, the upper arm, the upper arm and forearm, and the forearm and hand;

a fluid pressure conduit passing through the upper arm, forearm, and hand to deliver vacuum pressure to releasably secure a specimen to the hand;

a first motor including a first spindle for rotatably positioning the forearm about the elbow axis and a second motor including a second spindle for rotatably positioning the upper arm about the shoulder axis, the first and second motors being positioned in concentric relation such that their respective first and second spindles rotate about a common axis;

a mechanical linkage operatively connecting the upper arm and the forearm, the mechanical linkage forming an active drive link between the first motor and the forearm to cause the forearm to rotate about the elbow axis in response to operation of the first motor and a passive drive link between the forearm and the hand to cause the hand to rotate about the wrist axis in response to rotation of the forearm about the elbow axis;

a rotary fluid slip ring fitted within the rotary joint defined by the elbow axis, the slip ring having a central aperture through which vacuum pressure is delivered and first and second surfaces that form a vacuum pressure seal between the upper arm and the forearm; and

a controller coordinating the operation of the first and second motors so that the mechanical linkage causes linear displacement of the hand and angular displacement of the hand about the shoulder axis.

13. The robot arm mechanism of claim 12 in which the common axis constitutes the shoulder axis.

14. The robot arm mechanism of claim 12 in which the second spindle is directly mechanically connected to the upper arm.

15. The robot arm mechanism of claim 12 in which the hand comprises one of two oppositely extending hands of an end effector structure that is operable for rotation about the wrist axis.

16. The robot arm mechanism of claim 12 in which the upper arm is operatively connected to a base housing through which the shoulder axis passes and further comprising two additional rotary fluid slip rings, one of the two rotary fluid slip rings fitted within the rotary joint defined by the shoulder axis to form a vacuum seal between the base housing and the upper arm and the other rotary fluid slip ring fitted within the rotary joint defined by the wrist axis to form a vacuum seal between the forearm and the hand.