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Optical scanning measurement of dimensions with a double-concave mirror

  • US 5,742,068 A
  • Filed: 11/08/1995
  • Issued: 04/21/1998
  • Est. Priority Date: 05/13/1993
  • Status: Expired due to Term
First Claim
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1. An apparatus for measuring the distance to one or more areas of an object in order to determine one or more dimensions of the object, comprising means for directing a light beam towards the object, means for registering the light beams that are reflected from the object, means for calculating the time it takes for the beams to travel to and from the object, and means for causing the light beam to sweep across the object perpendicular in relation to a fixed reference plane during the entire sweeping operation, and with relative movement between the apparatus and the object which is to be measured, said light which is reflected by the object returning back to the light registration means via said light beam sweeping means, and said light beam sweeping means including a stationary mirror which is arced in its longitudinal direction, and also rotatable mirror means, comprisinga first mirror,a second, plane mirror,a third plane mirror which forms and angle of 90°

  • with the second mirror,said rotatable mirror means being made of a rotating polygonal mirror unit having a rotor means, in that the light beam which is emitted from a light generator has a path of movement via the first mirror, thence via the polygonal mirror unit, thence towards the second mirror, thence to the third mirror, thence to the stationary mirror, thence towards the object, the light beam reflected from the object having a path of movement back to the light registration means via the stationary mirror, said third and second mirrors, and the polygonal mirror unit, said stationary mirror in the longitudinal direction having an arced cross section so that the mirror forms a double concave mirror surface, the radius of curvature of the arc changing along the length of the stationary mirror and being greatest at the ends of said mirror.

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