Apparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the process

• US 5,743,784 A
• Filed: 12/19/1995
• Issued: 04/28/1998
• Est. Priority Date: 12/19/1995
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Birang, Manoocher, Prince, John
• Primary Examiner(s): Rose, Robert A.
• Application Number:
  US08/574,501
• Time in Patent Office: 861 Days
• Field of Search: 451/21, 451/443, 451/444, 451/56, 451/72
• US Class Current: 451/21
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: B24B 49/02 according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent B24B49/12 takes precedence

Abstract

An apparatus and method for detecting the roughness of a CMP pad surface, in situ, during pad conditioning by measuring and making use of surface friction effects. The effect is advantageously exploited to determine an endpoint for the pad conditioning process i.e. when the surface roughness of the pad is within a desired range, to facilitate the qualification of conditioning process parameter changes by determining their effect on the conditioning process, and to optimize these parameters. Also, the effect is employed to measure non-uniformities in the pad'"'"'s surface roughness, and to guide corrective measures. Generally, these objectives are accomplished using an apparatus which includes a floating head having its bottom surface in contact with the top surface of a rotating CMP pad undergoing a CMP pad conditioning process. A bracket is employed to restrain the floating head so as to prevent the head from moving along with the rotating CMP pad. A force sensing device is used to sense a restraining force exerted by the bracket on the floating head and to output a signal indicative of the restraining force. This restraining force is indicative of the friction between the floating head and the pad, and can be used to determine the coefficient of friction. The coefficient of friction is directly related to the surface roughness of the pad.

Claims

1. An apparatus for controlling a chemical mechanical polishing (CMP) pad conditioning device, comprising:

(a) a disk-shaped body having a bottom surface in contact with a top surface of a rotating CMP pad undergoing a CMP pad conditioning process;

(b) a bracket for restraining the disk-shaped body so as to prevent the disk-shaped body from moving along with the rotating CMP pad;

(c) force sensing means for sensing a restraining force which is exerted by the bracket on the disk-shaped body and which is substantially parallel to the top surface of the CMP pad, the force sensing means generating an output signal indicative of the restraining force; and

(d) means for causing the CMP pad conditioning device to terminate the CMP pad conditioning process whenever the output signal from the force sensing means indicates a prescribed threshold has been exceeded.

2. The apparatus of claim 1, wherein the restraining force is indicative of a frictional force produced by an interaction of the bottom surface of the disk-shaped body and the top surface of the rotating CMP pad and the prescribed threshold corresponds to a frictional force expected to be exhibited whenever the top surface of the CMP pad has been conditioned to a desired surface roughness.

3. The apparatus of claim 1, wherein:

(a) the bracket comprises a right angle portion having a first arm and a second arm which form an interior corner facing against the direction of rotation of the CMP pad, the disk-shaped body being disposed within the interior corner and restrained by the arms; and

(b) the force sensing means comprises a first load cell and a second load cell, the first load cell being attached to the first arm of the bracket at a position coincident with a first point of contact of the disk-shaped body and the second load cell being attached to the second arm of the bracket at a position coincident with a second point of contact of the disk-shaped body.

4. The apparatus of claim 3, wherein the bracket is oriented such that a velocity vector associated with the rotating CMP pad as viewed from a center of the disk-shaped body bisects an angle formed by the interior corner of the bracket.

5. The apparatus of claim 1, further comprising:

(a) means for computing a coefficient of friction between the bottom surface of the disk-shaped body and the top surface of the rotating CMP pad using the output signal from the force sensing means; and

wherein

(d) the prescribed threshold corresponds to an expected coefficient of friction which is expected to be exhibited whenever the top surface of the CMP pad has been conditioned to a desired surface roughness.

6. The apparatus of claim 5, wherein the disk-shaped body comprises a floating head structure including a semiconductor wafer and the bottom surface of the disk-shaped body corresponds to an exterior facing surface of the wafer.

7. The apparatus of claim 6, wherein the expected coefficient of friction is within a range of 0.4 and 0.5.

8. The apparatus of claim 1, further comprising:

(a) means for analyzing the output signal to determine if desired CMP pad conditioning process attributes are exhibited.

9. The apparatus of claim 8, further comprising means for modifying CMP pad conditioning process parameters to produce the desired process attributes whenever the analyzing means indicates the desired process attributes are not exhibited.

10. The apparatus of claim 9, wherein the modifying means modifies the process parameters during the CMP pad conditioning process.

11. The apparatus of claim 1, wherein:

(a) the force sensing means comprises a first tension sensor and a second tension sensor, each tension sensor being attached to the bracket and having a filament extending therefrom; and

wherein

(b) each filament is attached at a distal end to the disk-shaped body and the disk-shaped body is spaced from the bracket by the filaments in the direction of the rotation of the CMP pad.

12. The apparatus of claim 11, wherein:

(a) each filament is of equal length;

(b) the filament associated with the first tension sensor is attached to a top of the disk-shaped body at a point on a periphery thereof and the filament associated with the second tension sensor is attached to the top of the disk-shaped body at a point on the periphery thereof opposite the attachment point of the filament associated with the first tension sensor; and

(c) the filaments are equally spaced from each other over their entire lengths.

13. The apparatus of claim 11, wherein the output signal indicative of the restraining force is generated by summing tension forces sensed by the first and second tension sensors.

14. The apparatus of claim 3, further comprising:

a translation arm connected to the bracket for moving the bracket and the disk-shaped body across the top surface of the CMP pad in a generally radial direction.

15. The apparatus of claim 14, wherein the translation arm maintains the bracket in an orientation such that a velocity vector associated with the rotating CMP pad at a center of the disk-shaped body continuously bisects an angle formed by the interior corner of the bracket.

16. The apparatus of claim 14, wherein the translation arm limits movement of the disk-shaped body in the generally radial direction such that a peripheral edge of the disk-shaped body never overlaps a center of the CMP pad and never extends past an outer edge of the CMP pad.

17. An apparatus for controlling a chemical mechanical polishing (CMP) pad conditioning device, comprising:

(a) a body having a bottom surface positionable in contact with a top surface of a rotating CMP pad during a CMP pad conditioning process;

(b) a bracket for restraining the body so as to prevent it from moving along with the rotating CMP pad;

(c) a sensor to measure a restraining force which is exerted by the bracket on the body and which is substantially parallel to the top surface of the CMP pad, the sensor generating an output signal indicative of the restraining force; and

(d) circuitry configured to cause the CMP pad conditioning device to terminate the CMP pad conditioning process whenever the output signal from the sensor exceeds a prescribed threshold.

18. The apparatus of claim 17 wherein the circuitry comprises a programmed processor.

19. The apparatus of claim 17, wherein the circuitry is configured to compute a coefficient of friction between the bottom surface of the body and the top surface of the rotating CMP pad using the output signal from the sensor, and wherein the prescribed threshold corresponds to a coefficient of friction which is expected to be exhibited whenever the top surface of the CMP pad has been conditioned to a desired surface roughness.

20. The apparatus of claim 19, wherein the body comprises a floating head structure including a semiconductor wafer and the bottom surface of the body corresponds to an exterior facing surface of the wafer.

30. The apparatus of claim 19, wherein:

(a) each filament is of equal length;

(b) the filament associated with the first tension sensor is attached to a top of the body at a point on a periphery thereof and the filament associated with the second tension sensor is attached to the top of the body at a point on the periphery thereof opposite the attachment point of the filament associated with the first tension sensor; and

(c) the filaments are equally spaced from each other over their entire lengths.

21. An apparatus for controlling a chemical mechanical polishing (CMP) pad conditioning device, comprising:

(a) a body having a bottom surface positionable in contact with a top surface of a rotating CMP pad during a CMP pad conditioning process;

(b) a bracket for restraining the body so as to prevent it from moving along with the rotating CMP pad, the bracket including a right angle portion having a first arm and a second arm which form an interior corner to face against the direction of rotation of the CMP pad, the body being disposed within the interior corner and restrained by the arms;

(c) a sensor to measure a restraining force which is exerted by the bracket on the body and generating an output signal indicative of the restraining force, the sensor comprising a first load cell and a second load cell, the first load cell being attached to the first arm of the bracket at a position coincident with a first point of contact of the body and the second load cell being attached to the second arm of the bracket at a position coincident with a second point of contact of the body; and

(d) circuitry configured to cause the CMP pad conditioning device to terminate the CMP pad conditioning process if the output signal from the sensor indicates a prescribed threshold has been exceeded.

22. The apparatus of claim 21, wherein the bracket is oriented such that a velocity vector associated with the rotating CMP pad at a center of the body bisects an angle formed by the interior corner of the bracket.

23. The apparatus of claim 21, further comprising:

a translation arm connected to the bracket for moving the bracket and the body across the top surface of the CMP pad in a generally radial direction.

24. The apparatus of claim 23, wherein the translation arm maintains the bracket in an orientation such that a velocity vector associated with the rotating CMP pad at a center of the body continuously bisects an angle formed by the interior corner of the bracket.

25. The apparatus of claim 23, wherein the translation arm limits movement of the body in the generally radial direction such that a peripheral edge of the body never overlaps a center of the CMP pad and never extends past an outer edge of the CMP pad.

27. The apparatus of claim 24, wherein the body comprises a floating head structure including a semiconductor wafer and the bottom surface of the body corresponds to an exterior facing surface of the wafer.

28. The apparatus of claim 27, wherein the expected coefficient of friction is within a range of 0.4 and 0.5.

26. An apparatus for controlling a chemical mechanical polishing (CMP) pad conditioning device, comprising:

(a) a body having a bottom surface positionable in contact with a top surface of a rotating CMP pad during a CMP pad conditioning process;

(b) a bracket for restraining the body so as to prevent it from moving along with the rotating CMP pad;

(c) a sensor to measure a restraining force which is exerted by the bracket on the body and generating an output signal indicative of the restraining force; and

(d) circuitry configured to compute a coefficient of friction between the bottom surface of the body and the top surface of the rotating CMP pad using the output signal from the sensor, and to cause the CMP pad conditioning device to terminate the CMP pad conditioning process if the output signal from the sensor indicates a prescribed threshold has been exceeded, wherein the prescribed threshold corresponds to an expected coefficient of friction which is expected to be exhibited whenever the top surface of the CMP pad has been conditioned to a desired surface roughness.

29. An apparatus for controlling a chemical mechanical polishing (CMP) pad conditioning device, comprising:

(a) a body having a bottom surface positionable in contact with a top surface of a rotating CMP pad during a CMP pad conditioning process;

(b) a bracket for restraining the body so as to prevent it from moving along with the rotating CMP pad;

(c) a sensor to measure a restraining force which is exerted by the bracket on the body and generating an output signal indicative of the restraining force, the sensor including a first tension sensor and a second tension sensor, each tension sensor being attached to the bracket and having a filament extending therefrom which is attached at a distal end to the body so that the body is spaced from the bracket by the filaments in the direction of the rotation of the CMP pad; and

(d) circuitry configured to cause the CMP pad conditioning device to terminate the CMP pad conditioning process if the output signal from the force sensing means indicates a prescribed threshold has been exceeded output signal from the sensor exceeds a prescribed threshold.

31. The apparatus of claim 29, wherein the output signal indicative of the restraining force is generated by summing tension forces sensed by the first and second tension sensors.