Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof

  • US 5,744,381 A
  • Filed: 03/12/1996
  • Issued: 04/28/1998
  • Est. Priority Date: 03/13/1995
  • Status: Expired due to Term
  • ×

    Create Patent Alert


    *Certain alert events are not available for your current subscription level. Upgrade
  • Save
    ×



    ×

    Thank you for your feedback

    ×
    ×