Axial flow particle sensor
First Claim
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1. An axial-flow particle sensor comprising:
- a sensor element comprising a vibrating portion having a sufficient mass for responding to the collision of a solid particle in a fluid and a converter for detecting the vibration of said vibrating portion and converting the vibration to electric signals;
a housing for fixing said sensor element;
an inlet of fluid; and
an outlet of fluid;
wherein said outlet is located in the opposite side of said inlet relative to said sensor element, a throughhole is opened in at least a part of the circumference of said vibrating portion, and said vibrating portion of said sensor element is located at the extension of fluid flow formed at said inlet so that the fluid entering from said inlet flows through said throughhole and flows out from said outlet.
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Abstract
An axial-flow particle sensor has a sensor element and a housing. The outlet of fluid is placed at the opposite side of the inlet of the fluid, throughholes are formed at the circumference of the vibrating portion of the sensor element, and the vibrating portion of the sensor element is placed on the extension of the flow of the fluid so that the fluid entering from the inlet flows through the throughholes and flows out from the outlet. Two or more throughholes may be formed symmetrically with the axis. The throughhole may be formed on a ceramic substrate, or may be a gap between the ceramic substrate and the housing.
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Citations
11 Claims
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1. An axial-flow particle sensor comprising:
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a sensor element comprising a vibrating portion having a sufficient mass for responding to the collision of a solid particle in a fluid and a converter for detecting the vibration of said vibrating portion and converting the vibration to electric signals; a housing for fixing said sensor element; an inlet of fluid; and an outlet of fluid; wherein said outlet is located in the opposite side of said inlet relative to said sensor element, a throughhole is opened in at least a part of the circumference of said vibrating portion, and said vibrating portion of said sensor element is located at the extension of fluid flow formed at said inlet so that the fluid entering from said inlet flows through said throughhole and flows out from said outlet. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification