Ferroelectric cold cathode
First Claim
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1. A ferroelectric cold cathode comprising;
- a ferroelectric layer formed of a ferroelectric material and having an emitter which is a projection having a sharp tip portion on a first surface of the ferroelectric layer;
a first electrode layer formed on said first surface of the ferroelectric layer and having an opening allowing said sharp tip portion of the emitter to be exposed therethrough; and
a second electrode layer formed on a second surface of the ferroelectric layer, wherein said second surface is opposite said first surface.
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Abstract
A ferroelectric cold cathode comprising a ferroelectric layer formed of a ferroelectric material and provided on its one surface with an emitter which is a projection having a sharp tip portion, a first electrode layer formed on one surface of the ferroelectric layer and having an opening allowing the sharp tip portion of the emitter to be exposed therethrough, and a second electrode layer formed on the other surface of the ferroelectric layer. When a voltage is applied between the first electrode and the second electrode, a dielectric polarization is reversed in the ferroelectric layer, resulting in the emission of electrons from the sharp tip portion of the emitter.
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Citations
20 Claims
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1. A ferroelectric cold cathode comprising;
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a ferroelectric layer formed of a ferroelectric material and having an emitter which is a projection having a sharp tip portion on a first surface of the ferroelectric layer; a first electrode layer formed on said first surface of the ferroelectric layer and having an opening allowing said sharp tip portion of the emitter to be exposed therethrough; and a second electrode layer formed on a second surface of the ferroelectric layer, wherein said second surface is opposite said first surface. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A ferroelectric cold cathode comprising;
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a ferroelectric layer formed of a ferroelectric material and having an emitter which is a projection having a sharp tip portion on a first surface of the ferroelectric layer; a first electrode layer formed on said first surface of the ferroelectric layer and having an opening allowing said sharp tip portion of the emitter to be exposed therethrough; a first insulating film formed on said first electrode layer and having an opening allowing said sharp tip portion of the emitter to be exposed therethrough; an auxiliary electrode formed on said first insulating film and having an opening allowing said sharp tip portion of the emitter to be exposed therethrough; and a second electrode layer formed on a second surface of the ferroelectric layer, wherein said second surface is opposite said first surface. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An electronic device comprising a ferroelectric cold cathode and an anode disposed to face to said ferroelectric cold cathode, wherein said ferroelectric cold cathode comprises;
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a ferroelectric layer formed of a ferroelectric material and having an emitter which is a projection having a sharp tip portion on a first surface of the ferroelectric layer; a first electrode layer formed on said first surface of the ferroelectric layer and having an opening allowing said sharp tip portion of the emitter to be exposed therethrough; a second electrode layer formed on a second surface of the ferroelectric layer wherein said second surface is opposite said first surface; and a voltage-applying means adapted to apply a voltage between said first electrode and said second electrode thereby to reverse a dielectric polarization in said ferroelectric layer and thereby allowing electrons to be emitted from the sharp tip portion of said emitter and then to reach to said anode. - View Dependent Claims (16, 17, 18, 19)
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20. A method of manufacturing a ferroelectric cold cathode which comprises the steps of;
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forming a depression in a substrate; depositing a ferroelectric material over a surface of the substrate including said depression thereby forming a ferroelectric layer; removing said substrate to expose said ferroelectric material deposited in said depression thereby to form an emitter which is a projection having a sharp tip portion on a first surface of the ferroelectric layer; forming a first electrode layer on said first surface of said ferroelectric layer where said emitter is disposed in such a manner as to allow said sharp tip portion of the emitter to be exposed therethrough; and forming a second electrode layer on a second surface of said ferroelectric layer, wherein said second surface is opposite said first surface.
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Specification