Reset switch for a micromachined device

• US 5,748,004 A
• Filed: 03/15/1996
• Issued: 05/05/1998
• Est. Priority Date: 03/15/1996
• Status: Expired due to Term

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Kelly, Thomas W., Memishian, John
• Primary Examiner(s): BROWN, GLENN WARNER
• Application Number:
  US08/616,876
• Time in Patent Office: 781 Days
• Field of Search: 324/658, 324/661, 324/662, 324/676, 324/679, 324/686, 361/277, 361/287, 361/290, 361/292, 361/296, 73/514.16, 73/514.32, 73/862.68
• US Class Current: 324/661
• CPC Class Codes: G01P 15/125 by capacitive pick-up

Abstract

In a circuit for use with a micromachined device having a movable mass that forms an inner electrode of a differential capacitor, oppositely phased square waves are applied to two outer electrodes of the differential capacitor. A reset voltage is applied to the inner electrode synchronously with the square waves to stabilize and control the potential on the inner electrode. The signal on the inner electrode is demodulated by sampling during a first half of the square wave and a second half of the square wave between applications of the reset pulse to obtain a voltage that does not contain noise due to the reset switch.

Claims

1. A device comprising:

first and second electrodes for receiving respective first and second periodic signals having equal amplitude, period T, and 180°

out of phase with respect to each other;

a movable electrode between the first and second electrodes, the first, second, and movable electrodes forming a differential capacitor with the first electrode and the movable electrode forming a first capacitor, and the second electrode and the movable electrode forming a second capacitor, the capacitances of the first and second capacitors changing in response to movement by the movable electrode;

a DC voltage source; and

a reset switch having a first port coupled to the DC voltage source, a second port coupled to the movable electrode, and a control port responsive to a reset signal for periodically closing the reset X switch synchronously with the periodic signals so that the DC voltage source resets the DC voltage on the movable electrode when the reset switch is closed.

2. The device of claim 1, wherein the device is a surface micromachined accelerometer having a movable mass with a beam extending along a sensitive axis and a plurality of movable fingers substantially transverse to the sensitive axis and movable with the movable mass the movable fingers forming a plurality of movable electrodes, the device further including fixed fingers extending along the transverse axis such that each of the plurality of movable fingers extending from the beam is disposed between a pair of fixed fingers, the fixed fingers forming the respective first and second electrodes.

3. The device of claim 1, further comprising a demodulator having an input lead for receiving a signal from the movable electrode, and an output lead for providing a demodulated signal, the demodulator sampling between closings of the reset switch at least once during a first half cycle of the periodic signal and at least once during a second half cycle of the periodic signal.

4. The device of claim 3, further comprising a generator coupled to the first and second electrodes for providing the first and second periodic signals as square waves so that the movable electrode provides a square wave in response to the movement of the movable electrode, the demodulator sampling the output square wave at least once at a high value of the square wave and once at a low value of the square wave.

5. The device of claim 4, further including an amplifier coupled between the movable electrode and the demodulator so that the signal received by the demodulator is amplified.

6. The device of claim 3, further including an amplifier coupled between the movable electrode and the demodulator so that the signal received by the demodulator is amplified.

7. A method for use with a differential capacitor having first and second outer electrodes, and an inner electrode, the method comprising the steps of:

(a) receiving, by the first outer electrode a first periodic signal;

(b) receiving, by the second outer electrode, a second periodic signal, the second periodic signal having approximately the same minimum voltage, maximum voltage, and period T as the first periodic signal and being approximately 180°

out of phase with respect to the first periodic signal; and

(c) receiving by the inner electrode a DC voltage signal to periodically reset the DC voltage of the inner electrode synchronized with the periodic signals.

8. The method of claim 7, wherein steps (a) and (b) include receiving square waves that transition at times t=0, T/2, T, 3T/2, etc.

9. The method of claim 8, wherein step (c) includes receiving a DC voltage that has a magnitude approximately midway between the minimum and maximum voltages of the square waves.

10. The method of claim 7, further comprising the step of:

(d) sampling the amplitude of the signal on the inner electrode at least once during a first half period of the periodic signals and once during a second half period of the periodic signals to obtain a peak-to-peak amplitude.

11. The method of claim 10, wherein at least one sample taken during the first half period and one sample taken during the second half period are taken between successive resets.

12. The method of claim 10, wherein step (c) includes receiving a pulse of short duration relative to T at times t1, t1+nT, t1+2nT, etc., with 0<

t1<

T/2.

13. The method of claim 12, wherein step (d) includes taking a first demodulator reading at times t1, t1+T, t1+2T, etc., and taking a second demodulator reading at times t1+T/2, t1+3T/2, t1+5T/2, etc.

14. The method of claim 7, wherein step (c) includes receiving a pulse of short duration relative to T at times t1, t1+nT, t1+2nT, etc., with 0<

t1<

T/2.

15. A method for use with a surface micromachined sensor having a movable mass elongated along a first direction, with fingers extending transverse to the first direction and away from the mass to form movable electrodes, and a plurality of stationary fingers forming first and second groups of fixed electrodes, wherein each movable electrode is between a fixed finger in the first group and a fixed finger in the second group to form a differential capacitor, the method comprising the steps of:

(a) providing to the first group of fixed electrodes a first periodic signal;

(b) providing to the second group of fixed electrodes a second periodic signal, the second periodic signal having approximately the same minimum voltage, maximum voltage, and period T as the first periodic signal and being approximately 180°

out of phase with respect to the first periodic signal; and

(c) periodically providing to the movable mass a fixed DC voltage signal to reset a DC voltage of the movable mass when the DC voltage signal is provided, the fixed DC voltage signal being provided so that it is synchronized with the periodic signals.

16. The method of claim 15, wherein step (c) includes providing a DC voltage that has a magnitude approximately midway between the minimum and maximum voltages of the square waves.

17. The method of claim 15 wherein steps (a) and (b) include providing square waves that transition at times t=0, T/2, T, 3T/2, etc.

18. The method of claim 15, wherein step (c) includes providing a pulse of short duration relative to T at times t1, t1+nT, t1+2nT, etc., with 0<

t1<

T/2.