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Capacitive pressure sensor with sensing element mechanically isolated from the casing

  • US 5,750,899 A
  • Filed: 09/15/1997
  • Issued: 05/12/1998
  • Est. Priority Date: 08/19/1995
  • Status: Expired due to Fees
First Claim
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1. A capacitive pressure sensor for measuring the pressure of a medium to be measured, comprising:

  • a sensing element including a sensor diaphragm having an area exposed to a medium to be measured;

    a casing for receiving the sensing element and having an interior space;

    an annular flexible connecting element connecting the casing with an edge of the sensing element, the connecting element and the sensing element closing the interior space toward the medium to be measured; and

    a liquid filling the enclosed interior space and surrounding the sensing element except for the area of the sensor diaphragm exposed to the medium to be measured.

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