Capacitive pressure sensor with sensing element mechanically isolated from the casing
First Claim
1. A capacitive pressure sensor for measuring the pressure of a medium to be measured, comprising:
- a sensing element including a sensor diaphragm having an area exposed to a medium to be measured;
a casing for receiving the sensing element and having an interior space;
an annular flexible connecting element connecting the casing with an edge of the sensing element, the connecting element and the sensing element closing the interior space toward the medium to be measured; and
a liquid filling the enclosed interior space and surrounding the sensing element except for the area of the sensor diaphragm exposed to the medium to be measured.
1 Assignment
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Accused Products
Abstract
To provide a flush-mounted and corrosion-resistant pressure sensor for measuring the pressure of a medium which, on the one hand, is very rugged and, on the other hand, has a casing (2) mechanically isolated from the sensing element (1) as perfectly as possible, and whose measured values exhibit little temperature dependence and little hysteresis, the casing (2) has an internal space (21) and is preferably pot-shaped for receiving the sensing element (1). An annular, particularly annular-disk-shaped, flexible connecting element (3), disposed between the casing (2) and the sensing element (1), and the sensing element close the interior space (21) toward the medium to be measured, and a liquid (4) fills the enclosed interior space (21).
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Citations
11 Claims
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1. A capacitive pressure sensor for measuring the pressure of a medium to be measured, comprising:
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a sensing element including a sensor diaphragm having an area exposed to a medium to be measured; a casing for receiving the sensing element and having an interior space; an annular flexible connecting element connecting the casing with an edge of the sensing element, the connecting element and the sensing element closing the interior space toward the medium to be measured; and a liquid filling the enclosed interior space and surrounding the sensing element except for the area of the sensor diaphragm exposed to the medium to be measured. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification