×

Multi-beam exposure unit

  • US 5,751,462 A
  • Filed: 01/09/1997
  • Issued: 05/12/1998
  • Est. Priority Date: 01/11/1996
  • Status: Expired due to Term
First Claim
Patent Images

1. An optical exposure unit comprising:

  • light sources which are arranged in correspondence with numbers indicated by N1 to NM (M is an integer not less than

         3) and emit light beams;

    first lens means for converting the light beams emitted by each of the light sources into one of convergent light and collimated light, said first lens means including one of a finite lens and collimate lens in number corresponding to a sum of N1 to NM ;

    second lens means given lens power associated with a first direction to converge the light beams output from each of said first lens means in only the first direction, M sets of said second lens means being provided;

    M-1 synthesizing reflection mirrors for reflecting M-1 groups of beams from M-1 sets of said second lens means to be substantially overlaid as M groups of beams from M sets of said second lens means in the first direction;

    deflection means for deflecting the light beams output from said second lens means and said reflection mirrors in a second direction perpendicular to the first direction, the deflection means including a reflection surface formed to be rotatable about a rotation axis extending in a direction parallel to the first direction as a center of rotation; and

    imaging means, including at least one lens, for imaging each of the light beams deflected at an equal speed by said deflection means at a predetermined position, andwherein M beam groups are incident on the reflection surface of said deflection means so that an interval between adjacent beam groups in the first direction monotonously increases from one end, and a beam group on one end with a smallest interval to an adjacent beam group in the first direction is incident to cross the beams deflected by said deflection means.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×