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Method and apparatus for an improved micromechanical modulator

  • US 5,751,469 A
  • Filed: 02/01/1996
  • Issued: 05/12/1998
  • Est. Priority Date: 02/01/1996
  • Status: Expired due to Term
First Claim
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1. A monolithic micromechanical modulator for modulating an optical signal comprising:

  • a substrate characterized by a first refractive index; and

    a membrane for receiving an optical signal, wherein, the membrane has at least a first layer of material having a second refractive index that is approximately equal to the square root of the first refractive index of the substrate;

    wherein,the membrane is supported over a first region of the substrate, the first region having a perimeter defining a modulator cavity, wherein the membrane overlaps a substantial portion of the perimeter of the modulator cavity, and further wherein the substrate and membrane are monolithically integrated.

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