Method and apparatus for an improved micromechanical modulator
First Claim
1. A monolithic micromechanical modulator for modulating an optical signal comprising:
- a substrate characterized by a first refractive index; and
a membrane for receiving an optical signal, wherein, the membrane has at least a first layer of material having a second refractive index that is approximately equal to the square root of the first refractive index of the substrate;
wherein,the membrane is supported over a first region of the substrate, the first region having a perimeter defining a modulator cavity, wherein the membrane overlaps a substantial portion of the perimeter of the modulator cavity, and further wherein the substrate and membrane are monolithically integrated.
8 Assignments
0 Petitions
Accused Products
Abstract
An improved modulator and methods for making the modulator are disclosed. A membrane, preferably circular in shape, is formed over a region of a substrate in such a way that a gap results between the membrane and substrate forming a modulator cavity. The membrane forms a continuous surface over the cavity. In particular, the membrane is not supported by discrete support arms, but rather extends beyond the modulator cavity. Preferably, holes are formed in the membrane to aid in damping its motion and to allow access to underlying layers during modulator formation. According to the method, the modulator is formed by forming a means for creating a gap between the substrate and the membrane, forming a membrane, forming a lateral conduit to aid in removing the means for creating the gap and, finally, by removing the means for creating the gap.
-
Citations
12 Claims
-
1. A monolithic micromechanical modulator for modulating an optical signal comprising:
-
a substrate characterized by a first refractive index; and a membrane for receiving an optical signal, wherein, the membrane has at least a first layer of material having a second refractive index that is approximately equal to the square root of the first refractive index of the substrate;
wherein,the membrane is supported over a first region of the substrate, the first region having a perimeter defining a modulator cavity, wherein the membrane overlaps a substantial portion of the perimeter of the modulator cavity, and further wherein the substrate and membrane are monolithically integrated. - View Dependent Claims (2, 3, 10, 11)
-
-
4. A monolithic micromechanical modulator for modulating an optical signal comprising:
-
a substrate; and a membrane for receiving an optical signal, the membrane having a plurality of holes physically adapted to damp vibration;
wherein,the membrane is supported over a first region of the substrate, the first region having a perimeter defining a modulator cavity, wherein the membrane overlaps a substantial portion of the perimeter of the modulator cavity, and wherein the substrate and membrane are monolithically integrated, and further wherein the holes are spaced from each other and have a diameter such that the quality factor of the modulator ranges from about 0.7 to about 0.8. - View Dependent Claims (5, 6, 7, 8, 9, 12)
-
Specification