Magnetically-oscillated probe microscope for operation in liquids

• US 5,753,814 A
• Filed: 09/27/1996
• Issued: 05/19/1998
• Est. Priority Date: 05/19/1994
• Status: Expired due to Term

• Current Assignee: Keysight Technologies, Inc.
• Original Assignee: Molecular Devices
• Inventors: Harbaugh, Steven K., Jing, Tianwei, Lindsay, Stuart M., Han, Wenhai
• Primary Examiner(s): Williams, Hezron E.
• Assistant Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US08/722,344
• Time in Patent Office: 599 Days
• Field of Search: 73/105, 750/306, 750/307
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/06 Circuits or algorithms therefor
• CPC Class Codes: G01Q 30/14 Liquid environment
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/865 Magnetic force probe
• CPC Class Codes: Y10S 977/872 Positioner

Abstract

In accordance with a first aspect of the present invention, the sensitivity of a magnetically modulated AC-AFM is substantially improved by the use of a ferrite-core solenoid for modulating the magnetic cantilever of the ACAFM. In accordance with a second aspect of the present invention, the detection system for a magnetically modulated AC-AFM incorporates AC coupling of the signal from the position sensitive detector/beam deflection detector in order to remove the DC component of the signal, resulting in significantly improved dynamic range over systems utilizing DC coupling. High frequency modulation signals are detected through the use of fast analog multipliers which, after active filtering, give a low frequency signal which may be processed by digital electronics. In accordance with a third aspect of the present invention, operation of the microscope at small amplitudes of oscillation leaves small asperities on the tip intact and results in dramatic improvement in resolution.

Claims

1. A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample surface, said microscope comprising:

a force sensing probe tip disposed on a first side of a free end of a flexible cantilever and adapted to be brought into close proximity to the sample surface;

a film including a magnetized material disposed on said flexible cantilever;

an XY scanner for generating relative scanning movement between said force sensing probe tip and the sample surface;

a Z control for adjusting the distance between said force sensing probe tip and the sample surface;

a deflection detector for generating a deflection signal indicative of deflection of said flexible cantilever;

an AC signal source; and

a magnetic field generator for generating a magnetic field directed toward said second side of said flexible cantilever, said magnetic field generator coupled to said AC signal source so as to modulate said magnetic field with said AC signal and cause oscillatory movement of said probe tip, said magnetic field generator including a ferrite core solenoid.

2. A scanning probe microscope according to claim 1 wherein said ferrite core solenoid has a ferrite core formed of a material described by the chemical formula MO.Fe₂ O₃ where MO is a mixture of divalent metal oxides blended with 48 to 60 mole percent of iron oxide.

3. A scanning probe microscope according to claim 1 wherein said ferrite core solenoid has a ferrite core including a mixture of divalent oxides selected from the group consisting of manganese zinc, nickel-zinc and manganese, blended with 48 to 60 mole percent of iron oxide.

4. A scanning probe microscope according to claim 1 wherein said ferrite core solenoid has a ferrite core including manganese zinc ferric oxide.

5. A scanning probe microscope according to claim 1 wherein said flexible cantilever, said force sensing probe tip and the sample surface are all submerged in a fluid.

6. A scanning probe microscope for generating a signal corresponding to the surface characteristics of a scanned sample surface, said microscope comprising:

a force sensing probe tip disposed on a first side of a free end of a flexible cantilever and adapted to be brought into close proximity to the sample surface;

a film including a magnetized material disposed on said flexible cantilever;

an XY scanner for generating relative scanning movement between said force sensing probe tip and the sample surface;

a Z control for adjusting the distance between said force sensing probe tip and the sample surface;

a deflection detector for generating a deflection signal indicative of deflection of said flexible cantilever;

an AC signal source;

a magnetic field generator for generating a magnetic field directed toward said second side of said flexible cantilever, said magnetic field generator coupled to said AC signal source so as to modulate said magnetic field with said AC signal and cause oscillatory movement of said probe tip,

said magnetic field generator including a ferrite core solenoid; and

a synchronous detector having said AC signal as a reference input and said deflection signal as a signal input, an output of said synchronous detector corresponding to the surface characteristics of the scanned sample surface.

7. A scanning probe microscope according to claims 6 further comprising:

a high pass filter connected to said output of said synchronous detector to form a first filtered output.

8. A scanning probe microscope according to claims 7 further comprising:

a tracking filter connected to said first filtered output to form a second filtered output.

9. A scanning probe microscope according to claim 8 further comprising:

a first and a second signal multiplier, signal inputs of said first and second multiplier connected to said second filtered output, a reference input of said first signal multiplier connected to said AC signal source, a reference input of said second signal multiplier connected to said AC signal source through a phase delay, a signal output of said first signal multiplier providing a signal "x" and a signal output of said second signal multiplier providing a signal "y".

10. A scanning probe microscope according to claim 9, wherein said phase delay is 90°

relative to said AC signal source.

11. A scanning probe microscope according to claim 9 wherein said "x" signal is applied to a low pass filter and an analog to digital converter to form a digital-x signal.

12. A scanning probe microscope according to claim 11 wherein said "y" signal is applied to a low pass filter and an analog to digital converter to form a digital-y signal.

13. A scanning probe microscope according to claim 12 wherein a digital signal processor under control of a host computer processes said digital-x signal and said digital-y signal to form a feedback control signal used to control a parameter of the microscope.

14. A scanning probe microscope according to claim 13 wherein said parameter is the separation between said probe tip and the sample surface.

15. A scanning probe microscope according to claim 14 wherein said feedback control signal is a phase difference between a measured parameter and said AC signal source.

16. A scanning probe microscope according to claim 14 wherein said feedback control signal is a difference between a preset separation between said probe tip and the sample surface and a measured separation between said probe tip and the sample surface.

17. A scanning probe microscope according to claim 16 wherein said flexible cantilever, said force sensing probe tip and the sample surface are all submerged in a fluid.

18. A method of operating an AC-AFM, said method comprising the steps of:

providing a relative scanning movement between an atomic force microscope probe tip and a sample surface;

magnetically driving the probe tip into oscillation; and

limiting the amplitude of the oscillation of the probe tip to amplitudes not exceeding 10 nm so as to prevent damage to asperities on the probe tip.