Microgyroscope with vibratory structure having a multitude of grooves
First Claim
1. A microgyroscope comprising:
- a substrate;
first sensing means including a plurality of stripe-shaped anodes and cathodes alternatively arrayed in parallel on said substrate and having a stripe length direction, said first sensing means being for sensing displacement of a vibratory structure;
driving means arranged to be perpendicular to said stripe length direction of said first sensing means on said substrate and including a second plurality of stripe-shaped anodes and cathodes alternatively arrayed in parallel to each other, said driving means for applying pressure to said vibratory structure;
said vibratory structure including a plurality of first grooves of a stripe shape vertically spaced from a plane of said first sensing means and said driving means at a predetermined height and formed in a direction congruous with said stripe length direction of said first sensing means, and a plurality of second grooves of a stripe shape formed in a direction congruous with said stripe length direction of said driving means;
a support portion formed on said substrate for maintaining said vibratory structure spaced from said substrate at said predetermined height; and
elastic members for elastically connecting said vibratory structure and said support portion.
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Accused Products
Abstract
A microgyroscope includes a substrate, a first sensor where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel on the substrate, a driver arranged to be perpendicular to a stripe length direction of the first sensor on the substrate and where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel, a vibratory structure having a plurality of first grooves of a stripe shape vertically spaced from a plane of the first sensor and the driver at a predetermined height and formed in a direction congruous with a stripe length direction of first sensor and a plurality of second grooves of a stripe shape formed in a direction congruous with a stripe length direction of the driver, a support portion formed on the substrate for maintaining the vibratory structure from the substrate at a predetermined height, and elastic members for elastically connecting the vibratory structure and the support portion.
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Citations
8 Claims
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1. A microgyroscope comprising:
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a substrate; first sensing means including a plurality of stripe-shaped anodes and cathodes alternatively arrayed in parallel on said substrate and having a stripe length direction, said first sensing means being for sensing displacement of a vibratory structure; driving means arranged to be perpendicular to said stripe length direction of said first sensing means on said substrate and including a second plurality of stripe-shaped anodes and cathodes alternatively arrayed in parallel to each other, said driving means for applying pressure to said vibratory structure; said vibratory structure including a plurality of first grooves of a stripe shape vertically spaced from a plane of said first sensing means and said driving means at a predetermined height and formed in a direction congruous with said stripe length direction of said first sensing means, and a plurality of second grooves of a stripe shape formed in a direction congruous with said stripe length direction of said driving means; a support portion formed on said substrate for maintaining said vibratory structure spaced from said substrate at said predetermined height; and elastic members for elastically connecting said vibratory structure and said support portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification